Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

Dimensions (mm) Recommended flow m3/min (ANR) Model Port size R Effective area (mm2) Weight (g) A B C 1 8 ANB1-02 15 10 51 22 ANB1-01 22 81 25 18 35 93 30 21 94 107 46 24 175 133 50 41 462 190 74 41 612 230 74 60 871 271 86 70 1.2 or less 2.7 or less 3.8 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 1 4 ANB1-03 35 3 8 ANB1-04 60 1 2 ANB1-06 90 3 4 ANB1-10 160 1

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

34 M42 x 1.5 1 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 28 27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 28 27.8 42.5 35 45 74 50 54

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 28 27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 28 27.8 42.5 35 45 74 50 54

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y l28 l27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 l28 l27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 l28 l27.8 42.5 35 45 74 50

Speed Controller with

L6 L7 L8 M1 MIN. 18.4 21 21.7 22.7 25.4 26.5 28.2 29.5 33.6 34.4 36 37.1 44.1 45.1 6 8.4 9.3 11.6 9.3 11.6 12.8 15.2 13.2 15.2 18.5 20.9 18.5 21.7 3.2 5 6 25.4 36 37 39.5 40.7 42.5 53.2 57.2 59 65 70.8 76 76.9 81.3 3.4 4.4 5.1 6.1 5.2 6.3 6.7 8 7.4 8.2 9.8 10.9 10.3 11.3 7.9 11.1 11.8 12.8 12.3 13.4 16.3 17.6 19.3 20.1 21.7 22.8 22.7 23.7 20.9 23.8 24.5 25.5 28.9 30 33.2 34.5 38.6 39.4 41

reduces flow setting time

9.3 19.2 47 (48) AS321FS-02-08 (S) 8 13.2 22.7 33 14.2 AS321FS-02-10 (S) 10 15.9 26.7 37 35.7 15.6 38 (39) AS321FS-02-12 (S) 12 18.5 29.7 40 34.5 17 50 (51) AS321FS-03-06 (S) 6 1/4 19 16.6 10.4 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FS-03-08 (S) 8 13.2 22.7 33 14.2 AS321FS-03-10 (S) 10 15.9 26.7 37 28 15.6 29 (40) AS321FS-03-12 (S) 12 18.5 29.7 40 26.8 17 41

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

24.7 47.3 17 28 AS331FSG1-02-06 (S) 6 8.2 16.5 29.9 17.5 40.1 13.3 1/4 17 (17.5) 12.9 13 49.7 48.3 44.2 42.8 24.5 19.2 ASV 49 AS331FSG1-02-08 (S) 8 13.2 37.1 23.5 59.9 14.2 50 AS331FSG1-02-10 (S) 10 15.9 17.4 23 41.2 26.1 62.5 15.6 53 AS331FSG1-02-12 (S) 12 18.5 42.5 28.3 64.7 17 55 AS331FSG1-03-06 (S) 6 11.2 12.9 16.6 20.2 36 21.4 57.8 13.3 AK 1/4 19 63.1 61.7 57.9 56.5 24.5 19.2 VCHC 41

CE2

For details, refer to page 10-20-41. 5 6 6.5 6.5 7 Data 6 7 7.5 7.5 8 9 9 10 10 11 Since this is a guideline including hysteresis, not meant to be guaranteed. (Assuming approximately 30% dispersion.)

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The

VK300

(-Q) (S) 42 (-Q) VV3K3-20 (-Q) 21 (-Q) VV5K3-20 (-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.

20

600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 31 32 33 34 35 36 37 38 41

3 Port Solenoid Valve/

A B C D E F G H J K Y300T-A 4.2 82 41 71.5 35 14 7 19 4 41 Y400T-A 5.2 96 48 86.1 40 18 9 26 5 50 Ordering Example Dual residual pressure release valve with soft start-up function VP544-5DZ1-03-X538 1 pc. Filter regulator AW30-03G-A 1 pc. Spacer with bracket Spacer with bracket Y300T-A 3 pcs. Piping adapter E300-03-A 2 pcs. * Each product is not assembled.

VZA2000

0 to 1.0 VZA4121, 4141 Pilot pressure range (MPa) 2 3 4 2 3 4 VZA4 21, 4 41 0.1 to 1.0 Impact/Vibration resistance (m/s2) Note) 150/50 Operating pressure Pilot pressure Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal ON and OFF .

Vacuum Unit

(Ejector system) 41 A Vacuum Unit ZK2mA Series Electrical Wiring Specifications D-sub Connector Flat Ribbon Cable Connector Triangle mark indicator position Polarity Terminal Connector terminal no. Terminal number Polarity number Connector terminal no.

Stability of suction position,

ZP3EA-YAL16 [Weight: 116.6 g] M16 x 1.5 Width across flats 22 Width across flats 19 M14 x 1 6 6 25 24.5 49.5 16 5 5 25 41 M5 x 0.8/ Effective thread depth 5 Rc1/8 14.5 9 9.9 Applicable pad part no. ZP3E-63UM ZP3E-80UM ZP3E-100UM ZP3E-125UM ZP3E-63BM ZP3E-80BM ZP3E-100BM ZP3E-125BM 7 M10 x 1 M16 x 1.5 Applicable pad part no.

ZSE30A(F)/ISE30A

Note) When the display calibration function is used, the set pressure value may change 1 digit. 41 ZSE30A(F)/ISE30A Series The F in ( ) shows the function code number. Refer to the Operation Manual for the details of operation procedures and function codes.

S Couplers Series KK/KKH/KK13

R 3/8 32.9 32.9 39.4 KKA4P-02M 17 R 1/4 36.2 28.3 42.2 -03M 1/4 R 3/8 18.9 6.9 26.4 36.7 36.6 43.2 T A -04M 22 R 1/2 38.2 65.9 46.2 KKA6P-03M R 3/8 40.6 60.3 47.1 24 -04M 1/2 R 1/2 20.4 10.0 54.2 39.9 69.2 47.9 -06M 30 R 3/4 40.4 119.0 49.9 KKA7P-04M R 1/2 58.1 173.9 66.3 32 -06M 3/4 R 3/4 27.6 13.5 99.6 59.9 209.6 69.4 L2 H -10M 36 R 1 59.5 275.0 69.9 L1 KKA8P-06M R 3/4 73.4 362.8 82.9 41

CRQ2

L L 13 16 22.5 24.5 28.5 Size Screw M4 M4 M6 M8 M8 10 15 20 30 40 11-8-8 9 Series CRQ2 Compact Rotary Actuator Rack & Pinion Style Proper Auto Switch Mounting Position at Rotation End Solid state switch Reed switch Rotating angle Size Operating angle ( m) Operating angle ( m) Hysteresis angle Hysteresis angle 75 (41) A 10.5 13.5 13.5 17.5 26 32 33 41 38 47.5 B 13 22.5 18 30.5 34.5 53.5 45

Rotary Cylinder Series MRQ Size: 32, 40 1

The standard angle adjustment range of 5 (one side) is changed to in this type. + 5 95 (mm) E Mounting screw Y Q Stroke 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 Size 58.5 ( 5 Stroke)/2 61 ( 10 Stroke)/2 61 ( 15 Stroke)