Body Size/Type: 22 (Elbow Size 01, 02 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: G (G), Port Size: 01 (1/8), Applicable Tubing O.D: 08 (ø8)

Body Size/Type: 22 (Elbow Size 01, 02 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: N (NPT), Port Size: 01 (1/8), Applicable Tubing O.D: 09 (ø5/16")

SI Unit for Vacuum Manifold

0EN-PSRJ Cable length (L) 01 1000 [mm] 02 2000 [mm] 03 3000 [mm] 05 5000 [mm] 10 10 [mm] Item Specifications Connector M12 Straight RJ45 Cable O.D. 6.4 mm Nominal cross section AWG26 Min. bending radius (Fixed) 26 mm Fig. 9-3 EX9-ACxx0EN-PSRJ -36No.EX-OMY0014-A (4) Cable with communication connector (M12 M12, Straight) Part number: EX9-AC 005 EN-PSPS Cable length (L) 005 500 [mm] 010 1000

VEX-OMV0001

AC110V 110V VK300-82-2-03 AC200V 200V VK300-82-2-02 AC220V 220V VK300-82-2-04 ) AC240V 240V VK300-82-2-07 DC6V 6V VK300-82-4-51 () VEX1300-03 DC12V 12V VK300-82-4-06 G36-4-01 DC24V 24VD VK300-82-3-05 DC48V 48VD VK300-82-3-53 2 AC DC24V DC12V VEX1-11-2 DIN LED NL: LED (VEX110112011301 ) D R R R () (3.57) IP65() 7 VEX-OMV0001 VEX1 Series DIN (VEX110112011301 ) (VEX150117011901 )

Body Size/Type: 22 (Elbow Size 01, 02 Standard), Control Type: 1 (Meter-in), 1: 1, Thread Type: (R Thread or In-Line Type), Port Size: 01 (1/8), Applicable Tubing O.D: 08 (ø8), Sealant: S (w/Sealant)

Series GS40 Digital Pressure Sensor

Model GS40-M5 GS40-01 GS40-02 AV Air/Inert gas Fluid AU 3% F.S.

Series GS40 Digital Pressure Sensor 1

Model GS40-M5 GS40-01 GS40-02 AV Air/Inert gas Fluid AU 3% F.S.

Flame Resistant

With One-touch fitting Port size 01 1/8 02 1/4 03 3/8 04 1/2 Thread type G G thread 1 Flame Resistant (Equivalent to UL-94 Standard V-0) Flat Head Screwdriver Adjustable Speed Controller with One-touch Fitting AS21F-W2D Series Needle Valve/Flow Rate Characteristics Construction AS2201F-G01, AS2211F-G01 AS2201F-G02, AS2211F-G02 e t w u Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa o !

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Target position (01-149) Posn failed D SVON Input The connection with the higher-level devices is disconnected. A Communication error occurred (01-150) RESET Communi Do not interrupt the connection between the PC and teaching box when the electric actuator is being operated by upperlevel devices.

JXCx-OMY0004

Drive is ON when SVRE is OFF (01-098) Servo OFF ALM C RESET Modify the setting so that those operations will be requested while the servo motor is ON (SVRE is ON). Drive is ON when SETON is OFF (01-099) A positioning operation or pushing operation is requested before the return to origin position is completed.

Process Pump

Symbol Nil N F Option Option Symbol Applicable actuation Built-in solenoid valve Air Operated PB1013A Air operated Port size Port size 1/8 Nil B N None With foot With silencer Symbol 01 When option is more than one, suffix in alphabetical order.

High performance type Step Motor Controller (Servo/24 VDC)

The output current exceeded the specification (01-194) current E Power Over off An abnormality is detected by the current sensor that is checked when the controller is reset. A current sensor abnormality has occurred. (01-195) Make sure that the electric actuator conforms to the controller.

JXCx-OMY0008

Alarm_Co mment_1 11 (01-111) 6F C RESET Input The motor speed exceeds a specific level due to an external force, etc. Speed exceeded set value (01-144) Make improvements so that the motor speed will not exceed the maximum speed of the actuator.

JXCx-OMY0006

Alarm_Co mment_1 11 (01-111) 6F C RESET Input The motor speed exceeds a specific level due to an external force, etc. Speed exceeded set value (01-144) Make improvements so that the motor speed will not exceed the maximum speed of the actuator.

1

P CXWM10, CXWL10 4-J Herical insert thread depth K F P 4-M4 x 0.7 Helical insert thread depth 6 CXWM16 CXWL16 F 25 35 32.5 37.5 42.5 55 67.5 80 F 34.5 47 53 53 65.5 78 90.5 103 P 25 30 60 75 90 90 90 90 P 52 52 65 90 90 90 90 90 I I CXWM10 CXWL10 Stroke 25 mm 50 mm 75 mm 100 mm 125 mm 150 mm 175 mm 200 mm Stroke 25 mm 50 mm 75 mm 100 mm 125 mm 150 mm 175 mm 200 mm F 21 26 26 26 F 35.5 38

Digital Pressure Switch

Compound -100.0 to 100.0 kPa -100 kPa 100 kPa Positive pressure -0.100 to 1.000 MPa -0.1 MPa 0 1 MPa -57No.PS-OMM0005-J Dimensions Side piping Z/ISE10(F)-M5-#-# Rear piping Z/ISE10(F)-M5R-#-# -58No.PS-OMM0005-J Side piping Z/ISE10(F)-01-#-# Side piping Z/ISE10(F)-N01-#-# -59No.PS-OMM0005-J Panel mount side piping Z/ISE10(F)-M5-#-### + ZS-39-B Panel mount rear piping Z/ISE10(F)-M5R-#-###

4-channel Flow Monitor (Remote type monitor unit)

Dimensions (in mm) PF220 PF220 + panel mount adapter (ZS-26-B) + front protective cover (ZS-26-01) PF220 + panel mount adapter (ZS-26-B) + front protective cover (ZS-26-01) + 48 mm conversion adapter (ZS-26-D) -41No.PF-OMH0003-F Panel cut-out dimensions : Suitable for panel thickness of 0.5 to 8 mm.

Precision Regulator

Setting spring Setting knob Flapper Diaphragm C Nozzle Diaphragm A Fixed orifice Diaphragm C SUP.side passage BLEED Exhaust valve SUP OUT Main valve Valve guide Exhaust F i x ed ori f i ce S UP F or ce N F o rce N Nozzle flapper MPa/ m Diaph.(C) m 2 Main valve MPa/ m (S) 1 1 Setting spring N/m Displ Press Press.

IZ-OMU0031-CN

1]OUT1[F 2]OUT2 P_1 H_1 [kv] ON OFF [] <> 1 [P_1] -16No.IZ*-OMU0031 1 1 [P_2] -17No.IZ*-OMU0031 2[F 0] [F] 2 2 [F 0] 0.4 kV 19 [F 1] OUT1 [F 2] OUT2 20 OUT1+0.2 kV OUT2-0.2 kV 0.04 kV [F 1] OUT1 ON OFF 21 [F 3] 25 mm 22 [F 4] 1 23 [F 5] ON 24 [F 6] OFF 25 [F98] OFF 26 [F99] OFF 27 -18No.IZ*-OMU0031 [F 0] <> [F 0] [F 0] -19No.IZ*-OMU0031 [F 1] OUT1 OUT1 ON OUT1ONOFF

PF-OMN0011_C

1]OUT1(26)[F 2]OUT2(34) -21No.PF-OMN0011CN-C 3 1 [P_1][n_1] 1 1 OUT1OUT2[P_2][n_2] [ tn][ tp] [F 1]OUT1(26)[F 2]OUT2(34) 28 (23 ) -22No.PF-OMN0011CN-C 2 [F 0] [F] 2 2 [F 0] 25 4 L/min [F 1] OUT1 26 ON OFF 50% 5% ON OFF [F 2] OUT2 34 () ( ) ON OFF 50% 5% OUT1 -23No.PF-OMN0011CN-C [F 3] 40 1 [F10] 41 [F20] 45 [F22] 46 OFF [F30] 48 OFF [F80] 49 () [F81