tTV2000/3000

2tvPa Series lTV301tr Hysteresis Repeatability Linearity 0 1 0 0 0 9 o 0 5 s i 0 5 r s 0 0 8 I a9 d 0 0 7 I ooo E o o E 0 0 : fr I 0 0 5 o 3 o 0 4 I 4 0 0 3 E oo, o !

Refrigerated Thermo-chiller

[Outlet port: Max.] 0.9 50 40 0.8 0.4 0.7 40 30 0.6 0.3 30 0.5 20 0.4 0.2 20 0.3 [Return port] 10 0.2 0.1 10 [Return port] 0.1 0 0 0 0 0 10 20 30 40 0 10 20 30 40 Lifting height (m) Pressure (MPa) Lifting height (m) Pressure (MPa) Circulating fluid flow (l/min) Circulating fluid flow (l/min) The pump capacity of the HRZ010-W1S is same as that of the HRZ001-L1 group on page 85.

PSxx-PSV0007

Unused 1: Used 0x0712 (1810) 0 R/W Pin U8 0x00 (Use of PIN) (0) Setting of security code. 0999 0x0713 (1811) 0 R/W PinCode U16 0x0 (Security code) (0) P.8

EXxx-OMV0017-D

Setting range: 0 to 128 points (0 to 16 bytes). Increase or decrease by 16 points. Input size 0 to 128 points (0 to 16 bytes) 128 points / 16 byte Set the number of outputs which can be controlled by the Wireless Base unit. Setting range: 0 to 128 points (0 to 16 bytes). Increase or decrease by 16 points.

LEC-OM038xx

ID Rx1B Rx1A Rx19 Rx18 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 12 1 1 0 0 46 - 12. 4 Gateway unit control flag The flag to control the gateway communication status.

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

3 @1 @0 !1 !0 !2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 r !7 !6 t !8 !0 !2 i !9 y u MHZ Component Parts MHF Description Material Description Material Note Note No. No.

Fieldbus system CC-Link compatible SI unit

I0 O15..O0 0 AI0 AO0 Station I15..I0 O15..O0 0 AO0 System + unit diagnosis AO2 1 1 AI1 AO1 1 1 AO1 1st division 2 AI2 AO2 2 3 AI3 AO3 3 AI0 AO3 Station I31..I16 O31..O16 0 AI4 AO4 Station I31..I16 O31..O16 0 AI1 AO4 2 I47..I32 O47..O32 1 AI5 AO5 2 I47..I32 O47..O32 1 AI2 AO5 2 AI6 AO6 2 AI3 AO6 3 AI7 AO7 3 AI4 AO7 Station I63..I48 O63..O48 0 AI8 AO8 Station I63..I48 O63..O48 0 AI5 AO8 1 1

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

TR d d W D E E D TY W TDe8 MA a MA a C NA F K A A K F NA B H S + Stroke H + Stroke TX 0 -0.5 ZZ + 2 strokes TZ (mm) Bore size (mm) TR A a B C d E F G GA J K M MA MM NA P R S T D TDe8 H 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 -0.032 -0.059 -0.032 -0.059 -0.032 -0.059 -0.040 -0.073 -0.050 -0.089 -0.050 -0.089

CEx-OMQ0013

(LCD ) 4.DIN 7 1-2 30mm No. 1-3 30mm Err6 1-4 5mm 5-10-15 5mm Err5 4.2 5 10 15 20 1.0 1.0 1.0 1.0 5.8 5mm 30mm Err6: 30 20 50mm/sec100mm/sec :50cm :0.5MPa 2. 2-1 CE2CEU2 8 NO 1 0 0 2 0 0 2 0 0 YES (kgf) (kgf) 1 0 0 8 0 NO 1 0 0 1 0 0 8 0 6 3 6 3 5 0 YES 5 0 0 0 NO 1 0 0 2 0 0 3 0 0 4 0 0 5 0 0 1 0 0 2 0 0 3 0 0 4 0 0 5 0 0 mm/s mm/s YES OK (), ? NO YES NO , , ?

JXCx-OMY0004

Movement Speed Position Acceleration Deceleration Force Value speed Speed Area 1 Area 2 In pos force force mode mm/s (mm) mm/s2 mm/s2 (mm) (mm) (mm) mm/s 0 1 Absolute 100 50.00 1000 1000 0 0 0 100 0 0 0, 1 2 Relative 50 10.00 1000 1000 0 0 0 100 0 0 0, 1 (E.g.) Flow chart Controller (1) Select/input Step No.1.

JXCx-OMT0030CN

3 2 1 0 ID 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 5 0 1 0 1 40 - 124 OUT Data bit 7 6 5 4 3 2 1 0 Q_Address 0 1 2 3 1 178 Bit1 Bit0 0 0 0 1 1 0 (2) 0OFF1ON1ONCN2SW ON 3 0OFF1ON1ONCN2SW ON 4 0 OFF 1 ON LEC 1 ON 0 OFF 5 12.4.5 ID ON1 ID OFF0 bit 7 6 5 4 3 2 1 0 Q_Address 1 ID5 ID4 ID3 ID2 ID1 2 6 ID ID 1 50 5 5 3 2 1 0 ID 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 5 0 1 0 1 41 - 13LEC

1.1

Return port 0.0 0.0 0 0 0 10 20 0 10 20 30 Lifting height [m] Pressure [MPa] Pressure [MPa] Lifting height [m] Circulating fluid flow (l/min) Circulating fluid flow (l/min) HRG005-A, HRG005-W Facility Water Required Flow Rate 0.5 50 0.4 40 50 Outlet port [60 Hz] 0.3 30 Outlet port [50 Hz] 0.2 20 Return port HRG015-W 0.1 10 40 0 0.0 0 10 20 40 30 HRG010-W Pressure [MPa] Lifting height [m]

OMR0031

0 0 0 0 0 Caution In relative positioning the deviation will remain.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

VQ5000 0 5 72.0 (4.0) VQ54 0 53 or less Metal seal 50 or less Exhaust center 79.2 (4.4) 0 5 VQ54 1 63 or less Rubber seal 60 or less Plug lead unit 0 5 61.2 (3.4) VQ55 0 53 or less Metal seal 50 or less Pressure center 0 5 63.0 (3.5) VQ55 1 63 or less Rubber seal 60 or less Symbols 0 5 41.4 (2.3) VQ56 0 65 or less Metal seal 62 or less 2 position single Perfect (A) 4 (B) 2 0 5 45.0 (2.5)

Precision Regulator

9 @0 !1 @0 @0 !9 @5 @6 !9 !9 @6 ARJ @6Fixed throttle SUP side passage OUT side passage SUP side passage OUT side passage AR425 to 935 SUP side passage OUT side passage i i i ARX AMR !0 !0 !0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !

Ionizer

L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.5 MPa (20 L/min (ANR) per nozzle) Air purge: Yes 20 15 Discharge time (s) Discharge time (s) 15 10 1 Hz/60 Hz Static Neutralization Equipment 10 1 Hz/60 Hz 5 5 Sensing DC Sensing DC 0 0 500 1000 1500 2000 0 0 500 1000 1500 2000 Distance (mm) Distance (mm) Alphabetical Index Length Measuring/ Counter Supply pressure: 0.7 MPa (30 L/

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 @6 @7 Description No. Part no.

MG

9 i @0 @4 !0 y @3 !2 !0 r o @2 e !

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

0 Combinations q to !

Air Slide Table Series MXS

0 !6 !2 !3 !