SMC Corporation of America
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Port size (nominal size B) 1.5MPa 5 to 60C 99% 1/8, 1/4, 3/8 1/4, 3/8, 1/2 Ambient and fluid temperature Dehumidification rate 0.38 0.55 Weight (kg) Note) Maximum flow rate at pressure 0.7MPa 2 years, or when pressure drop reaches 0.1MPa Element life Note) With auto drain is 0.15MPa 21 Related Products Related Products (Refer to the individual product catalogs for further details.)

Refer to pages 14-21-3 and 14-21-4 for Safety Instructions and Common Precautions. Piping Selection Warning Warning Use auto-drain under the following conditions. Otherwise, it may result in a malfunction. 1. Float type auto-drain (N.O.) 1) Use compressor with capacity more than 3.7 kw {400 l/min Be sure to pipe auto-drain under the following conditions.

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Mounting/Adjustment F.R.L. Warning AV 1. Install the valve guide (on the opposite side of the handle) 60 mm away from the ground surface to facilitate maintenance inspection. 2.

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions.

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Handling Operating Environment Warning Warning 1. Absolutely never use in an atmosphere where explosive gases are used. The compact manometer does not have explosion proof construction.

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Noise reducing effect: 30 dB or more. Large effective area Piping How to Use DIN Terminal Caution Caution Tightening the fittings and their torque When screwing fittings into the valves, make sure to tighten them to the proper torque values given below. Wiring procedures 1.

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Feedback circuit (VEA252 only) P/I/D adjustment NULL adjustment Warning Integrator cicuit Driving circuit Voltage comparing circuit Electro-pneumatic proportional valve GAIN adjustment 1.

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Power amplifier with feedback circuit Control circuit Electro-pneumatic proportional valve Pressure sensor Caution VEXP3141 1. Air supply Poor quality air could increase the spools sliding resistance, while preventing it from attaining its specified characteristics.

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Noise reduction capability of over 30 dB. Provides a sufficient effective area. Operating Fluid Piping Caution Warning 1.

D E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2 57.5 30 36 44 11 31.5 13 4 20 37 3.5 26.5 M3 x 0.5 Rc 3/8 NPT 3/8 LVA3 77.5 36 47 56 15 41.5 17.5 7.5 34 46 5.5 37.5 Rc 1/2 NPT 1/2 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 LVA4 96 46 60 68 22 55 18 8 42 57 5.5 48 Rc 3/4 NPT 3/4 LVA5 129 58 75 84 26 68 27.5 8 56 71 6.5 62 17-5-21

32 Stork turbine 32 Turbin oil 32 General R turbine oil 32 Fucoal turbine 32 PTFE NBR Approx. 40 ml PA3000 automatically operated type 100 million cycles 50 million cycles LVH Approx. 100 ml PA5000 automatically operated type 50 million cycles 50 million cycles Approx. 22 ml PA3000 air operated type 50 million cycles LVD Approx. 90 ml PA5000 air operated type 50 million cycles Approx. 21

Dimensions (N.O.) (44) W T R (Y) Z VC T 25 VDW IN port 2-3/8 l =280 l =300 : Thread type VQ VX2 (V) (X) 2.5 (N) VX (U) E C D G Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Q S A VX3 C B VXA L1 L2 16 VN L3 LVC D side U side Stations 1 2 3 4 5 n LVA LVH LVD LVQ 21

Frequency (Hz) 50 20 11 60 17 7 Model Power source AC VXR21 50 40 18 60 35 12 DC AC VXR22 50 50 21 60 45 17 DC AC VXR23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C) Ambient temperature (C) Temperature conditions Power source Water (Standard) Oil (Standard) High temperature water (2) (D) High temperature oil (2) (D) 80 80 AC DC AC/DC 60 40 1 60 40 40 60 Maximum

Frequency (Hz) 50 60(53) 18 60 51(44) 12 Model Power source VX3 7.5 6 8 11 9.5 11.5 AC VXZ22 VXA DC 50 80 21 60 67 17 AC VXZ23 VN DC LVC JIS Symbol LVA OUT LVH IN LVD N.O.

21 ZSP 27 27 Mounting thread M2.5 X 24 Mounting thread M2.5 X 24 ISl Grommet style SE1-14, -15, -18, -19 Connector style SE1-14C, -15C, -18C, -19C ZSM I Z 01 T1 01 T1 I Z PFl Pressure setting trimmer Pressure setting trimmer Pressure setting trimmer Pressure setting trimmer IFl HYS HYS SET SET 15 15 Indicator light Indicator light 23 23 I Z I Z SE1-01 -16, -17 SE1-01 -16C, -17C Pressure

CAT.ES70-21 A Series VC Direct Operated 2 Port Solenoid Valve for Air Series VCA Multipurpose Valve for Air Direct Operated 2 Port Solenoid Valve for Air Series VCA Series VCA Improved durability (Nearly twice the life of the previous series) Operating resistance of moving parts reduced for improved longevity and wear resistance.

W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (Pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5

Straight Plunger/VM220-02-05, VM230-02-05 Panel mounted hole JIS Symbol 2 port 3 port 56N F.O.F. 0.5MPa supply 3.5mm P.T. 2mm O.T. 5.5mm T.T. 3.5-21 VM200 Series VM200 Roller Plunger/VM220-02-06, VM230-02-06 VM220-02-06S, VM230-02-06S JIS Symbol 2 port Panel mounted hole 3 port SlA VlA 56N F.O.F. 0.5MPa supply 3.5mm P.T. SlA 2mm O.T. 5.5mm T.T.

L size 20 260.5 30 385.5 29 373 28 360.5 27 348 26 335.5 25 323 24 310.5 23 298 22 285.5 21 273 No. L size Blank plate with 2 screws and gasket 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. L size 40 510.5 2.9-15

Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS For further details on solenoid valves, refer to the SMC solenoid valve catalogs "SY100" (N219) and "SYJ 300, 500, 700" (N220) XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)