PF3W7x.eng

/min (250 L type) 1/2 23.9 mm Main screen (2-colour display) 3/4 29.9 mm UP button [ H_1] Hysteresis (OUT1) IO-Link status indicator light Operator 1 41 mm After hand tightening the piping, apply a spanner of the correct size to the spanner flats on the product, and tighten it for 2 to 3 rotations.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

L1 = n / 2 x 30 + 16 L2 = n / 2 x 30 + 32 n = Number of valves (cleaning valve + gate valve + other valves) n: Stations (mm) 2 n 4 6 8 10 12 14 16 18 20 22 24 26 28 30 32 34 36 38 40 L1 L2 76 106 136 166 196 226 256 286 316 346 376 406 436 466 496 526 556 586 616 46 92 122 152 182 212 242 272 302 332 362 392 422 452 482 512 542 572 602 632 62 13 VCC Series Dimensions SUS316L Stainless steel

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 Parts included 11 Gasket 1 11 Gasket 1 11 Gasket 1 11 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 in seal kit 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 Please refer to P19 to 21 for the product construction.

LEC-OM038xx

Initial Setting.16 4. 1 Gateway unit Communication speed switch (STATION NO.,B RATE) 16 4. 2 Setting the switch to change the communication CN2SW.17 4. Setting of controller (LEC) .18 5. External connection .21 5. 1 CN4: Power supply connector .21 5. 2 CN3: Bus connector .21 5. 3 CN1: CONT connector.21 5. 4 CN2: PC/TB connector.22 6.

XLF Series

Specifications Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 XLF-100 XLF-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the

CYV

100 PA 25 50 P 5/16-24UNF 7/16-20UNF N 4.5 7.5 M 6 8 MM M4 x 0.7 M6 x 1 LW 69 115 Model CYV15 CYV32 Note) Refer to "Cushion Effect (Sine Cushion) and Stroke Adjustment" under Specific Product Precautions on page 11. 3 Series CYV Model Selection 1 Design Parameters 1 The allowable load mass moment differs depending on the work piece mounting method, cylinder mounting orientation and piston

TL/TIL

1 High Purity Fluoropolymer Tubing Series TL/TIL Material: Super PFA Series and Specifications Metric sizes (Series TL) Inch sizes (Series TIL) TL0403 TL0604 TL0806 TL1008 TL1210 TL1916 TIL01 TILB01 TIL05 TIL07 TIL11 TIL13 TIL19 TIL25 Tubing model Nominal diameter 1/8" 1/8" 3/16" 1/4" 3/8" 1/2" 3/4" 1" Tubing size 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 1/8" x 0.086" 1/8" x 1/16" 3

Trimmer Auto Switch

to 10 30 to 10 22.5 to 10 180 Angular style MHW2 88 to 5 54 to 6 58 to 5 41 to 5 30 to 4 Air Cylinders (mm) Description/Series Bore size 10 12 16 20 25 32 40 50 63 80 100 Compact guide cylinder MGP 3.5 5.0 4.5 4.5 5.5 5.5 5.5 5.5 5.5 6.0 Non-rotating double power cylinder MGZ 5.5 6.5 6.5 Air cylinder CA2 4.0 4.0 6.0 6.0 6.0 Sensor Unit D-F7K Air Cylinders (mm) Description/Series Bore

TL/TIL

High Purity Fluoropolymer Tubing Series TL/TIL Material: Super PFA Series and Specifications Metric sizes (Series TL) Inch sizes (Series TIL) TL0403 TL0604 TL0806 TL1008 TL1210 TL1916 TIL01 TILB01 TIL05 TIL07 TIL11 TIL13 TIL19 TIL25 Tubing model Nominal diameter 1/8" 1/8" 3/16" 1/4" 3/8" 1/2" 3/4" 1" Tubing size 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 1/8" x 0.086" 1/8" x 1/16" 3/16

AC Servo Motor Driver (MECHATROLINK-II type)

Lead Series Lead (Including Pn20E Pn210 symbol pulley ratio) A 12 65536 750 LEY25/LEYG25 B 6 375 LEY25D/LEYG25D C 3 131072 375 A 20 65536 1250 LEY32/LEYG32 B 10 625 LEY63D C 5 131072 625 A 16 1000 LEY B 8 500 LEY32D/LEYG32D C 4 250 65536 A 20 1250 B 10 625 C 5 131072 625 LEY63 5(2.86) L 229376 625 (Pulley ratio 4/7) H 20 1250 LEFS25 A 12 750 B 6 375 H 24 1500 LEFS32 A 16 1000 B 8 500 LEF

•

I '-1 'N . ,." " H1 H2 01 02 03 l1 M odel ~ T1 T2 ' ~ f . 9 4 ' 3 ~9 . 2~q .. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M .. Ii' .. , . t ~ .230 42.2 25.8 38.9 ' 39.5 33.9 44.7 28.2 35. 1 10.5 17 ~ 35 A SP330F-N01-07S 1/4" NPT1 /8 10-32UNF ASP330F-N01 -09$ 5/16" ~ 14.2 118 15.8 15 .2 :.g 1/2' 8 NP'W~ " ~ NE?'T, lta ".,I:SP'43oFi!

LEC-OM036xx

Initial Setting.16 4. 1. Switch (NODE Address, B RATE) .16 4. 2. Setting the switch to change the communication (CN2SW).17 4. 3. Setting of controller (LEC).18 5. External connection .21 5. 1 CN4: Power supply connector .21 5. 2 CN3: Bus connector .21 5. 3 CN1: CONT connector.21 5. 4 CN2: PC/TB connector.22 6.

ML1C

Applicable bore Shock absorber model ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 Side Support Side support A 2 x G E E F 2 x H A B Side support B 2 x J A B (mm) A B C D E F G H J Part no.

KS/KX

SKX, #16 to #30 Hl Dl MS Tl 2.1-34

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Item CH2 measured value: 16-bit signed integer Bit offset 47 46 45 44 43 42 41 40 39 38 37 36 35 34 33 32 Item CH32 measured value: 16-bit signed integer Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item CH4 measured value: 16-bit signed integer Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Error diagnosis CH4 diagnosis CH3 diagnosis CH2 diagnosis CH1 diagnosis Reservation

SYA3000/5000/7000

(For 20, 41, 42 and 45 Types) Pilot pressure range SS5YA Fill the same as SS5Y . 3 5 7 3 5 7 SYA Pilot pressure MPa SYJA Specify the part numbers for valves and options together beneath the manifold base part number. VZA VFA SS5YA5-42-03-02 1 set (Type 42, 3 station manifold base part no.) SYA5140 1 set (Single air operated valve part no.)

5 Port Air Operated Valve SYA3000/5000/7000 Series

piping One-touch fitting (Inch size) Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N9 N11 G F 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 Except for M5 One-touch fitting for NPTF T 5 32" One-touch fitting for 1 4" One-touch fitting for SYA5000 One-touch fitting (Metric size) Bracket 5 16

Sine Rodless Cylinder Series REA

SN-032B SN-040B Applicable bore size (mm) 25, 32 40 8 M26 x 1.5 32 37 11 M32 x 2.0 41 47.3 H B 6

5 Port Solenoid Valve Series SV

Tie-rod base A 34 pin connector allows up to 16 stations with double solenoids.

Lightweight and Compact

Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions.