Process Valve Series VNA

VNA VNB SGC VNC VNH VND VCC 403 Series VNC Threaded Type/Port size: 10A, 15A, 20A, 25A Electrical entry port: G1/2 4 x N Manual override (Non-locking push type) Pilot port 12(P1) 2 x (Back side 10(P2)) 8 1 Bracket Main port 1 (Back side port 2) Port size: refer to table below Main port 1, 2 A 63 63 80 90 L 52 52 62 72 B 42 42 50 60 M 26 26 31 36 K 148 148 159.5 175.5 C 28 28 35 40 N 4.5 4.5

ZP

M10 x 1.5 B 42 ZF (mm) B 42 50 ZPT50H-A14 52 Model A 40 ZPT40H-A14 ZP 50 ZPT50H-B8 52 M8 x 1.25 50 ZPT50H-B10 52 M10 x 1.5 ZCU AMJ 63 80 ZPT H-B (Female thread) 63 80 ZPT 6380H-A16 (Male thread) Misc.

58

Applicable bore size (mm) d H B C D 125 140 160 +0.084 0 +0.3 +0.1 0.1 0.3 Y-12A Y-14A Y-16A 8 46 27 42 25 32 64 100 M30 x 1.5 +0.084 0 +0.3 +0.1 0.1 0.3 NT-12 NT-16 125, 140 160 18 46 53.1 44 8 48 30 47 M30 x 1.5 28 36 72 105 M30 x 1.5 +0.1 0 +0.3 +0.1 0.1 0.3 21 55 63.5 53 8 55 34 46 M36 x 1.5 32 40 80 110 M36 x 1.5 Use a single knuckle joint or a double knuckle joint individually.

Refrigerated Air Dryers

Applicable air dryer Conversion piping set Conversion bypass piping set IDF-S0186 IDF-S0183 IDF6E IDF-S0203 IDF-S0202 IDF8E IDF-S0187 IDF-S0184 IDF11E IDF-S0188 IDF-S0185 IDF15E1 * Refer to page 42 for dimensions. * Refer to pages 42 and 43 for dimensions. * Refer to page 41 for dimensions. 35 Optional Accessories IDF/IDU Series Specifications/Dimensions Model Selection Options Optional Accessories

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

60 41 10 50 113 176 82 30 CY1R63 24 118 8.6 10 M8 x 1.25 16 Rc 1/4 171 60 48 70 47 10 60 121 188 94 32 8-15-42 42 Series CY1R Magnetically Coupled Rodless Cylinder Direct Mount Type Centralized Piping Type: 10, 50, 63 CY1RG Bore size H Stroke L Note) Type L is not available for 10.

LEJ-OM002xx

[LECSA] LEJS40 LEJS63 LEJB40 LEJB63 Series Lead symbol H A B H A B T Lead 24 16 8 30 20 10 27 42 Parameter Para.

MHZ

32 30 MHY 0.02 16.8 MHW MRHQ +2.4 0 0 -0.4 36 (42) 20 18 Misc.

CG5-S

H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18 18 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis type (D)/CJ5DS CDH9 +0.030 0 Cdd9 0.030 0.060 NB GA Piping port 2-M5 x 0.8 Clevis pin ( ) GB MM CA CB D NA A CX + 0.2 + 0.1

MHZ

32 30 MHY 0.02 16.8 MHW MRHQ +2.4 0 0 -0.4 36 (42) 20 18 Misc.

Modular F.R.L. Unit

Note 6) Refer to SMC catalog CAT.ES100-42 for detailed specifications and instructions of digital pressure switch.

Air Slide Table Series MXP

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Selection Caution Mounting 6.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

15.5 13 42 12 17 17 22 17 22 21 47.5 21 21 33 47.5 21 33 47.5 43.5 17 15 20 47.5 43.5 37 16 23 24.5 19 24.5 63.5 27 19 63.5 27 63.5 27 39 17 22.5 63.5 27 39 43 59.5 23 59.5 20 26 25.5 22 25.5 67 30 22 67 30 42 67 30 42 67 30 26 20 23.5 63 46 63 25 32 25 28.5 25 28.5 36 88.5 36 48 88.5 88.5 36 48 26.5 88.5 36 52 84.5 32 23 84.5 32 32.5 30 30 30 30 36.5 102.5 36.5 36.5 48.5 102.5 36.5 48.5

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

42 52 10 14 14 16 16 16 4 5 5 12 15 15 M6 x 1 M8 x 1.25 M8 x 1.25 Up to 1000 Up to 1000 Up to 1000 39 42 52 208 228 254 436 Series MGZ Non-rotating Double Power Cylinder With End Lock on Rod Side Dimensions: With Mounting Bracket Transaxial foot style: (L) 4 x LD through LT LH LY X/2 ZZ + Stroke LS + Stroke X X Y LZ LX (mm) Stroke range Bore size (mm) LS ZZ X LD Y LH LT LX LY LZ 40 50 63

ZR

Bracket B part no.: P3270154 (Standard accessory) Spacer B part no. : P3270157 Type K3 ZR1-VK3M Pilot air Circuit diagram Pilot air PS PE Air operated b Air operated a PV PD Release valve Supply valve V Pilot valve for release valve Pilot valve for vacuum switching valve Manual override Dimensions not indicated are identical to type K2. 13-3-42 42 Series ZR Large Size Vacuum Module: Vacuum

VCL

19.3 38.5 66 VV2CS4 26 68 47.5 58.5 70 103 94 57 25.5 28.5 30 5.5 42 20.8 41.5 74 344

Thermo-chiller/Rack Mount Type

The weight will increase by 2 kg when Option T1 (Inverter pump mounted) is selected. 12 Option M (Applicable to DI water piping) does not contain copper. 13 For Option DM (With electric conductivity control function, Applicable to DI water piping) 14 If the product is used at an altitude of 1000 m or higher, refer to For altitudes of 1000 m or higher on page 42. 15 No continuous voltage

CJ5-S

NB A FX FZ NA F FT BB 0 0.3 S + Stroke Z + Stroke H A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18.3 18.3 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis style (D): CJ5DS Piping port 2-M5 x 0.8 Clevis pin ( ) CDH9 + 0.030 0 Dd9

CJ5-S

NB A FX FZ NA F FT BB 0 0.3 S + Stroke Z + Stroke H Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16

Digital Flow Switch (Integrated display type) ( compatible)

Selection of display colour rED/Grn/1SoG/1Sor/2SoG/2Sor (Page 42) 6. Completed [F 1] Setting of OUT1 is completed. -37No.PF-OMV0006-B Press the UP or SET button in function selection mode to display [F 1]. Press the SET button. Move on to output mode setting.

HRX-OM-X037

Table 9.7-1 Standards Standard CE Mark EMC Directive Machinery Directive 2014/30/EU 2006/42/EC NRTL *1 E112803(UL61010-1) *1: Except option-T2 and T3,water-cooled type.