5 Port Solenoid Valve

VQ 1/2 Valve + Release valve spacer (VVQ4000-24A1 5 D) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x 26) 2 Valve Spacer VQ 4/5 Valve + SUP stop valve spacer (VVQ4000-37A1 5 ) q AXT632-17-10 (M3 x 62) 3 1 w AXT632-17-19 (M3 x 26) 2 Not necessary when mounting the sub-plate.

Air Cylinder

Description Material Part no. 20 25 32 40 17 Rod seal NBR CM20Z-PS CM25Z-PS CM32Z-PS CM40Z-PS DVAir-hydro -X 17 Rod seal NBR CM2H20-PS CM2H25-PS CM2H32-PS CM2H40-PS Technical Data * Since the seal does not include a grease pack, order it separately.

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

Air Cylinder

21 35 1.5 Band mounting D-A9l 10 9 16.5 28.5 40.5 2 CG1 16 8.5 17 29 41 47 71 89 101 2.5 6 8 8 17 21 35 1.5 CG3 D-A9lV 10 9 9 16.5 28.5 40.5 2 16 8.5 8.5 17 29 41 47 71 89 101 2.5 JMB 6 7.5 16.5 20.5 34.5 1 D-H7l/H7C D-H7lW/H7BA D-H7NF 10 8.5 16 28 40 1.5 MB 16 8 16.5 28.5 40.5 46.5 70.5 88.5 100.5 2 6 8.5 17.5 21.5 35.5 2 D-C7l/C80 D-C73C D-C80C MB1 10 9.5 17 29 41 2.5 16 9 17.5

30

13.6 16.1 17 18.6 20.8 T H M M L Note) Value of FEP tube.

Series KV2 Fittings

17 17 17 21 21 21 21 21 21.8 21.8 21.8 22 22 22 25 17 16 16 16 21 17 17 17 17 17 21 21 21 16.8 20.4 20.4 2 22 22 25 1.6 1.6 1.6 1.6 3.5 3.5 3.5 3.5 3.5 3.5 5.4 5.4 5.4 4.6 7.0 7.0 8.5 8.5 8.5 9.8 23 15 16 23 40 16 23 37 40 53 36 44 68 76 64 76 43 51 76 126 100/400 100/400 100/400 100/400 100/200 100/400 100/400 100/400 100/200 100/200 100/200 100/200 100/100 100/100 100/100 100/100 100/200

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Made to Order Specifications (For details, refer to page 6-17-1.)

Air Cylinder

15 (17) 20 1.5 50 18 16 (18) 20 3 63 18 17 (18) 20 3 4 x TC F TB 8 x J S + Stroke ZZ + Stroke NA C MB Note) ( ): Denotes the dimensions for long stroke.

H/DL/L/LL

(mm) Connection threads Rc Model Effective area (mm 2) Mounting Weight (g) Mounting plate M L2 L1 hole thickness 1 4 8 6 DEF06-02 48 19 17 20 11 14 12 16 16 14 12 13 11 6 max. 4 max. 17 15 50.5 46.5 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 19 19 104 34 51 17 19 17 17 17 19 15 17 7 max. 7 max. 17 17 Connection thread Applicable tubing Mounting plate thickness 15-2-63 Series

5 Port Solenoid Valve

COM. () COM. 23 24 (+) 26 21 Note) 22 Positive COM Negative 19 20 19 20 COM 17 18 17 18 15 16 15 16 13 14 13 14 Note) Mounting valve has no polarity.

Series H, DL, L, LL Self-align Fittings

M L1 L2 1 4 8 6 DEF06-02 48 20 11 16 16 50.5 46.5 17 15 13 11 19 17 14 12 14 12 6max. 4max. 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 34 51 17 17 17 17 15 17 19 19 104 17 19 17 19 7max. 7max. 105 Series H, DL, L, LL Self-align Fittings Plug: DP Applicable tube O.D. Weight (g) Part No.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

20.5 16.2 12 14 8 6 14 5 17 6.5 18 5.5 22 10 28.8 19 21.5 18.8 14 17 17 7.5 25 6.5 22 17 7 30 8 22 12 30.3 22 23.5 19.3 17 19 17 9 8 38 22 Reference dimensions after R(PT) thread installation. 100

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

1" 1" 4 16 33.5 17 6 12 16 34.5 20 1/4" 19.5 22.5 44.5 47.5 21 25 19.5 44.5 22.5 21 47.5 25 3/8" 5 9 18 16 17 37 38 16 20 16 37 17 16 38 20 1/4" 22.5 24.5 50.5 52.5 24 29 19.5 16 19.5 16 19.5 22.5 17 22.5 17 22.5 45.5 38 45.5 38 45.5 48.5 39 48.5 39 48.5 21 16 21 16 21 25 20 25 20 25 22.5 50.5 24.5 52.5 22.5 24 50.5 29 24.5 24 52.5 29 1/2" 6 10 20 19.5 16 22.5 22.5 19.5 16 22.5 17 24.5 24.5

KF

20.5 8 5 14 6 Connection thread 17 6.5 5.5 18 22 10 18.8 28.8 14 17 19 21.5 17 7.5 6.5 25 22 17 30 7 8 22 12 19.3 30.3 17 19 22 23.5 17 38 8 9 22 Reference dimensions after R thread installation.

Series SV

SV1000 3 position 73 (.16) (B) 2 (A) 4 4 position dual 3 port 71 (.15) Single solenoid 74 (.163) SOL.b SOL.a 3 (EB) 5 (EA) Double solenoid 78 (.17) SV2000 1 (P) 3 position 83 (.18) 4 position dual 3 port 78 (.17) 4 position dual 3 port valve: N.C./N.O.

Table of Contents

) 18.5 (17) 20 20 12.5 12.5 22.5 22.5 2026.5 (25) 20.5 (19) 28 22 20.5 14.5 24.5 30.5 34 (32.5) 23 (21.5) 36 24.5 28 17 27 38 Data 34 (32.5) 30 (28.5) 36 31.5 28 24 34 38 44 (42.5) 35 (33.5) 46 6.5 38 29 39 48 As for auto switch mounting dimensions, auto switch mounting method and its operating range, those are the same as basic type.

Table of Contents

17 17 2.5H9 +0.025 0 depth 2.5 3 3.4 64.3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting thread 15.8 58 5.9 E 11 11 14 19 E 0 -0.1 4-2.6 through (Mounting hole) M3 x 0.5 17 18 0.8

C85

38 22 6 12 9 16 14 9.5 16 19.7 6H9 16 M5 x 0.8 M16 x 1.5 M6 x 1 18.3 6.2 24 8 5 10 13 5.5 17 38 22 6 12 9 16 14 9.5 16 19.7 20 M22 x 1.5 G 1/8 M8 x 1.25 24 8.2 32 11 62 126 6 13 115 11 8.5 95 20 44 24 8 16 12 22 17 8 8 11.5(13) 15(17) 15(17) 20 28 8 25 M22 x 1.5 G 1/8 M10 x 1.25 30 32 11 65 137 8 126 17 11 104 22 50 28 10 16 12 22 20 8 8 11.5(13) 15(17) 15(17) 10.5 10.2 22 33.5 ( ): In the

CM2

50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore size (mm) 20 17 36 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 143 156 168 181 206 231 256 25 17 36 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 147 160 172 185 210 235 260 32 17 36 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 149 162 174 187 212 237 262 40 19 46 41 77 90 102 115 140 165

C85

38 22 6 12 9 16 14 9.5 16 19.7 6H9 16 M5 x 0.8 M16 x 1.5 M6 x 1 18.3 6.2 24 8 5 10 13 5.5 17 38 22 6 12 9 16 14 9.5 16 19.7 20 M22 x 1.5 G 1/8 M8 x 1.25 24 8.2 62 32 11 126 6 115 13 11 8.5 95 20 44 24 8 16 12 22 17 8 8 11.5(13) 15(17) 15(17) 20 28 8 25 M22 x 1.5 G 1/8 M10 x 1.25 30 65 32 11 137 8 126 17 11 104 22 50 28 10 16 12 22 20 8 8 11.5(13) 15(17) 15(17) 10.5 10.2 22 33.5 ( ): In the