Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

1" 1" 4 16 33.5 17 6 12 16 34.5 20 1/4" 19.5 22.5 44.5 47.5 21 25 19.5 44.5 22.5 21 47.5 25 3/8" 5 9 18 16 17 37 38 16 20 16 37 17 16 38 20 1/4" 22.5 24.5 50.5 52.5 24 29 19.5 16 19.5 16 19.5 22.5 17 22.5 17 22.5 45.5 38 45.5 38 45.5 48.5 39 48.5 39 48.5 21 16 21 16 21 25 20 25 20 25 22.5 50.5 24.5 52.5 22.5 24 50.5 29 24.5 24 52.5 29 1/2" 6 10 20 19.5 16 22.5 22.5 19.5 16 22.5 17 24.5 24.5

KF

20.5 8 5 14 6 Connection thread 17 6.5 5.5 18 22 10 18.8 28.8 14 17 19 21.5 17 7.5 6.5 25 22 17 30 7 8 22 12 19.3 30.3 17 19 22 23.5 17 38 8 9 22 Reference dimensions after R thread installation.

Series SV

SV1000 3 position 73 (.16) (B) 2 (A) 4 4 position dual 3 port 71 (.15) Single solenoid 74 (.163) SOL.b SOL.a 3 (EB) 5 (EA) Double solenoid 78 (.17) SV2000 1 (P) 3 position 83 (.18) 4 position dual 3 port 78 (.17) 4 position dual 3 port valve: N.C./N.O.

C85

38 22 6 12 9 16 14 9.5 16 19.7 6H9 16 M5 x 0.8 M16 x 1.5 M6 x 1 18.3 6.2 24 8 5 10 13 5.5 17 38 22 6 12 9 16 14 9.5 16 19.7 20 M22 x 1.5 G 1/8 M8 x 1.25 24 8.2 32 11 62 126 6 13 115 11 8.5 95 20 44 24 8 16 12 22 17 8 8 11.5(13) 15(17) 15(17) 20 28 8 25 M22 x 1.5 G 1/8 M10 x 1.25 30 32 11 65 137 8 126 17 11 104 22 50 28 10 16 12 22 20 8 8 11.5(13) 15(17) 15(17) 10.5 10.2 22 33.5 ( ): In the

CM2

50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore size (mm) 20 17 36 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 143 156 168 181 206 231 256 25 17 36 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 147 160 172 185 210 235 260 32 17 36 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 149 162 174 187 212 237 262 40 19 46 41 77 90 102 115 140 165

C85

38 22 6 12 9 16 14 9.5 16 19.7 6H9 16 M5 x 0.8 M16 x 1.5 M6 x 1 18.3 6.2 24 8 5 10 13 5.5 17 38 22 6 12 9 16 14 9.5 16 19.7 20 M22 x 1.5 G 1/8 M8 x 1.25 24 8.2 62 32 11 126 6 115 13 11 8.5 95 20 44 24 8 16 12 22 17 8 8 11.5(13) 15(17) 15(17) 20 28 8 25 M22 x 1.5 G 1/8 M10 x 1.25 30 65 32 11 137 8 126 17 11 104 22 50 28 10 16 12 22 20 8 8 11.5(13) 15(17) 15(17) 10.5 10.2 22 33.5 ( ): In the

0.4

(+) () 19 Station 10 (+) () 20 17 16 15 14 2 1 Plug terminal no.

Micro Mechanical Valve Series VM1000

Thickness 5, Width across flats 17 12 10 O.T.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Insert bushing Tubing 17-5-131

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Fittings & Tubing Air Cylinders Rotary Actuators Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 20 20 20 Positive pin (Common) Positive pin 19 19 19 18 18 Station 9 SOL.b Negative pin Negative pin (Common) 18 17 17 SOL.a Station 16 Station 16 17 16 16 Station 8 SOL.b 16 15 15 SOL.a 15 6 6 SOL.b Station 5 SOL.b Station 5 4 5 4 5 Station 2

Air Cylinder Series MB

Z B TA TL TU TC TX TE TO TT TR TS TH TF TDH10 MB-S03 32 40 50 63 80 100 125 32 40 50 63 80 100 125 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 +0.084 0 47 60 60 80 80 100 115 46 52 65 75 95 114 136 45 60 60 70 70 90 105 8.5 10 10 15 15 15 18.5 62 80 92 110 130 158 186 50 63 75 90 110 132 160 74 97 109 130 150 184 212 12 17 17 20 20 26 26 13 17 17 22 22 24 24 10 12 12 14 14 17 25

CL

17 21 21 16 16 18.5 27 30 31 37 40 35 35 39 15 17 17 21 21 16 16 18.5 84 90 98 116 126 98 98 106 11 11 11 11 11 16 16 18.5 8 0 0 0 0 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 51 58 58 71 72 110 110 120 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 11 11 14 17 17 30 24 26 22 19 22 237 245 254 262 296 305 315 324 379.5 402.5 382 405 419

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

17 Series VZ3000 Specifications Applicable for cylinder actuation (up to 40).

Magnetically Coupled Rodless Cylinder

21 23.5 29 36 45 51 G 3 4 5 6 6 7 7 8.5 8.5 HA 17 24 30 36 41 52 62 80 92 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 HR 17 24 30 36 41 51 62 80 90

NCG/CG1

17 17 17 18 10 7 30 30 35 35 40 40 52 62 0.25 stroke l h + l ZZ + l + Stroke The minimum stroke with rod boot is 20 mm.

SYJ300/500/700

9 17 9 17 9 17 9 8.5 8.5 8.5 8.5 21 21 21 21 44.5 44.5 44.5 44.5 Refe page 4-4-61 for dimensions with connector cable. 4-4-23 Series SYJ500 Manifold Specifications Manifold Specifications Type 20 Type 40 Type 41 For internal pilot Model Type 21R Type 40R Type 41R For external pilot Single base/B mount Manifold type Common SUP, common EXH P (SUP), R (EXH) 2 to 20 stations Valve stations A

42

Valve + Release valve spacer (VVQ4000-24A1 5 D) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x 26) 2 Valve Spacer Valve + SUP stop valve spacer (VVQ4000-37A1 5 ) q AXT632-17-10 (M3 x 62) 3 1 w AXT632-17-19 (M3 x 26) 2 Not necessary when mounting the sub-plate.

Prevents Micro-Bubbles

Refer to page 17-6-3 for Safety Instructions and 17-5-41 to 17-5-42 for High Purity Chemical Valve Precautions. Piping Caution 1. Connect tubing with special tools. Refer to pages 17-5-35 through 17-5-37 regarding tubing connection and special tools. 2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

12 13 14 13 14 15 16 17 11.5 Two SUP/EXH blocks are provided for models with 11 stations or more.

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket