Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

m 20 m 0 1 2 4 5 None Nil IN left IN right Differential pressure indicator Construction/Connection L Differential pressure indication switch Note) Note) The paper elements for water-glycol or emulsion is 10 m only. 40 42 Element upward removal Element upward removal Differential pressure indicator Threaded Differential pressure indication switch Note) Element Note) N.C. and N.O. common 41

Lightweight and Compact

Bevelled place 19. Insects or plants may enter the unit. 2. The product is not designed for clean room usage. It generates particles internally. 88 HRS090 Series Specific Product Precautions 2 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions.

Environment

LEY -X5 LEFB/Belt Drive 11LEFS Horizontal 11LEJS 14 LEFB32 25A12 LEC 10 Work load: W [kg] LEC S 8 LEC SS-T LEFB25 6 LEC Y 4 Motorless LEFB16 2 0 LAT 0 500 1000 1500 2000 Speed: V [mm/s] LZ LC3F2 41 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) Servo Motor (24 VDC) The following graph shows the values when moving force is 250%

3 Port Air Operated Valve VPA3145/3165/3185 Series

9 for 3/4/5 Port Solenoid Valve Precautions. 3 (EXH) 1 (IN) 3 (EXH) 1 (IN) Pilot Pressure Range Vacuum/Low Ordinary pressure Pilot pressure (MPa) Operating pressure (MPa) 1574 3 Port Air Operated Valve VPA315 Series Flow Rate Characteristics/Weight Flow rate characteristics Weight (kg) Port size 12(INOUT) 23(OUTEXH) Valve model C[dm3/(sbar)] C[dm3/(sbar)] 1(IN), 2(OUT) 3(EXH) b Cv b Cv 19

Counter/Extension Cable

CV MVGQ + 0.05 0.00 0010.00 0.02 0010.03 OK CC RB J If the workpiece dimension + 0.05 0.02 the product is good. 10 is within , D-X 20Data 10-12-41

Piping: 41 (Base Mounted), Stations: 19 Stations, A, B Port: N7T (1/4" One-touch Fitting)

How Grip: Open, Parallel Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 41, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Single Acting Type (Normally Closed), Main Body Shape: Square Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): -, Gripping Force (Open Side at 0.5 Mpa)(N): 63, Environment, Applications: Dust Resistant / Drip-Proof, Additional Function

How Grip: Open, Parallel Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 41, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Single Acting Type (Normally Closed), Main Body Shape: Square Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): -, Gripping Force (Open Side at 0.5 Mpa)(N): 63, Environment, Applications: Dust Resistant / Drip-Proof, Additional Function

How Grip: Open, Parallel Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 41, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Single Acting Type (Normally Closed), Main Body Shape: Square Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): -, Gripping Force (Open Side at 0.5 Mpa)(N): 63, Environment, Applications: Dust Resistant / Drip-Proof, Additional Function

How Grip: Open, Parallel Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 41, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Single Acting Type (Normally Closed), Main Body Shape: Square Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): -, Gripping Force (Open Side at 0.5 Mpa)(N): 63, Environment, Applications: Dust Resistant / Drip-Proof, Additional Function

How Grip: Open, Parallel Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 41, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Single Acting Type (Normally Closed), Main Body Shape: Square Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): -, Gripping Force (Open Side at 0.5 Mpa)(N): 63, Environment, Applications: Dust Resistant / Drip-Proof, Additional Function

How Grip: Pinch, Parallel Type / Open, Parallel Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 41, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Square Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 79, Gripping Force (Open Side at 0.5 Mpa)(N): 90, Environment, Applications: Dust Resistant / Drip-Proof, Additional Function

How Grip: Pinch, Parallel Type / Open, Parallel Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 41, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Square Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 79, Gripping Force (Open Side at 0.5 Mpa)(N): 90, Environment, Applications: Dust Resistant / Drip-Proof, Additional Function

How Grip: Pinch, Parallel Type / Open, Parallel Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 41, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Square Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 79, Gripping Force (Open Side at 0.5 Mpa)(N): 90, Environment, Applications: Dust Resistant / Drip-Proof, Additional Function

How Grip: Pinch, Parallel Type / Open, Parallel Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 41, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Square Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 79, Gripping Force (Open Side at 0.5 Mpa)(N): 90, Environment, Applications: Dust Resistant / Drip-Proof, Additional Function

How Grip: Pinch, Parallel Type / Open, Parallel Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 41, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Square Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 79, Gripping Force (Open Side at 0.5 Mpa)(N): 90, Environment, Applications: Dust Resistant / Drip-Proof, Additional Function

How Grip: Pinch, Parallel Type / Open, Parallel Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 41, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Square Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 79, Gripping Force (Open Side at 0.5 Mpa)(N): 90, Environment, Applications: Dust Resistant / Drip-Proof, Additional Function

How Grip: Pinch, Parallel Type / Open, Parallel Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 41, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Square Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 79, Gripping Force (Open Side at 0.5 Mpa)(N): 90, Environment, Applications: Dust Resistant / Drip-Proof, Additional Function

How Grip: Pinch, Parallel Type / Open, Parallel Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 41, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Square Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 79, Gripping Force (Open Side at 0.5 Mpa)(N): 90, Environment, Applications: Dust Resistant / Drip-Proof, Additional Function

How Grip: Pinch, Parallel Type / Open, Parallel Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 41, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Square Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 79, Gripping Force (Open Side at 0.5 Mpa)(N): 90, Environment, Applications: Dust Resistant / Drip-Proof, Additional Function