Line filter

P A B C D E G J M N Q R S T U V W AFF20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AFF30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AFF40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl drain Auto Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with

Mist Separator

P A B C D E G J M N Q R S T U V W AM20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AM30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AM40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with level

Micro Mist Separator

Standard specifications Bracket mount Indicator mount P A B C D E G J M N Q R S T U V W AMD20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AMD30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AMD40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard

Common Supply Regulator

Valve Guide Assembly and Valve Assembly Replacement 17 10-3. Square Embedded Type Pressure Gauge Replacement 18 10-4. Right Angle Square Type Pressure Gauge Replacement 19 10-5. Plug (with O-ring) Replacement 20 10-6. Plug Assembly Replacement 21 11. Disassembly Drawing 22-23 12.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

7.5 2 10 M12 x 1.25 16 11.5 3 14.5 M14 x 1.5 +0.08 0 Trunnion mounting taps for the width across flats NA are not attached to 80 and 100 types. 18 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM 35 12 26 12 5 M4 x 0.7 depth 7 5 M8 x 1.25 Up to 200 14 13 8 15.5 2 18 12 6 40 12 31 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 7.5 Up to 300 16.5 17

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

8 50 6.6 1/4 10.5 80 41 19 75, 100 58.5 50.5 6 Series CQ2Y Mounting bracket dimensions are the same as those of the anti-lateral load type of Series CQ2S.

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

@silrrc I SERIES NCJ2 Standard Type: Double Acting/Double Rod Symbol Double acting/Double rod -++T-T Auto switch specification Relay Sequence controller lC Circuit Calculalion (Enmple) NCJ2WLl 0-050 .Bas c weighr-1.23 o, (610) .AdditioMl weight --.17 oz (clindr strcke--1,') .Mountins brackr wgighr--.4g oz (Foot lyps] 1.23 +.17 +.49 = 1,89 oz @srrc SERIES NCJ2 Standard Type: Double Acting

Floating Joint/Stainless Steel Type Series JS

23 41 7 14 14.3 27 49.2 14.3 1 11000 3

High Vacuum L Type Valve

44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG-80-2 90 257 117 65 11 114 110 83 104 39 9 13 XL-OMV0003 6.

LMU100/200 Series Mist Spray Unit

T0604 (6 tube) applicable T0425 (4 tube) applicable T0806 (8 tube) applicable AIR OIL AIR BLOW Port size LMV110 How to Order LMV 0 1 1 20 Nozzle tubing length: L Air blow circuit Nozzle tubing construction 20 25 30 35 200 mm 250 mm 300 mm 350 mm LMV220 1 2 Flexible tubing Copper tubing Mixing valve 1 2 Available Not available Construction Dimensions LMV10/With air blow circuit LMV10L 45 41

Floating Joint

Model Wrench size (Bowl) Tightening torque Wrench size (Socket) Tightening torque JT20 Width: 22 mm 12 Nm Width: 10 mm 8 to 12 Nm JT32 Width: 27 mm 24 Nm Width: 12 mm 15 to 24 Nm JT40 Width: 36 mm 68 Nm Width: 17 mm 40 to 68 Nm 4. Use a cylinder with a built-in cushion mechanism.

ChemicalThermo-con

2.6 (65) 1.06 (27) 3.9 (100) 5.1 (130) Circulating fluid outlet (1.2 )30)) 12.6 (320) 0.8 (20) 0.8 (21) Terminal block Display panel 6.7 (170) 5.6 (143) 4.7 (120) AL SI 8.5 (215) OUT FG B B A FG + EXT.SENSOR REMOTE ON/OFF 3.8 (97) 3.1 (79) ALARM PURGE OUT PURGE IN SIGNAL Purge inlet (M5) Fluid leak sensor CHEMICAL 3.0 (75) 2.1 (53) POWER COMMUNICATION IN WATER I N O N WATER OUT DC 1.6 (41

Series 10-, 21- AF-A Air Filter

flats 17 Clearance for maintenance G 1/4 Drain A Metal bowl 10-/21-AF20-A 10-/21-AF30-A to 60-A With bowl guard Metal bowl with level gauge Metal bowl Applicable model Semi-standard specifications Dimensions B B B B Metal bowl with level gauge Bracket mounting size Semi-standard specifications Standard specifications Model B Metal bowl With bowl guard B B V U T R Q N M J G D E C B A P S

Miniature Regulator

pressure: 0.7 MPa 0.6 IR-A Outlet pressure (MPa) 0.5 ARJ310-01 IR 0.4 IRV 0.3 ARJ210-M5 0.2 VEX 0.1 SRH 0.0 0 100 200 300 400 500 SRP Flow rate (L/min (ANR)) SRF ITV IC ITVH ITVX PVQ VY1 Allows smaller mounting pitch Compact and lightweight (Main body 65 g) VBA VBAT Accommodates two types of threads 18.8 mm 18.3 AP100 Inside: Female thread (M5 x 0.8) Outside: Male thread (1/8) 82.5 ARJ310-01G 41

Manifold Regulator Modular Type ARM2500/3000 Series

B C D E F G H I J K L M N O P Symbol Model A ITVH ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 ITVX 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 PVQ Manifold stations Dimensions by the Number of Stations 10 Model Symbol VY1 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 VBA VBAT ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294

Speed Controller: Standard Type In-line Type AS Series

L1 L2 L3 L4 L5 L6 L7 (1) L8 D Model Bore size ASV AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 5 17 54.5 16 15.5 50 30 10 4.5 AK 1 4 1 4 2 x M4 x 0.7 11.5 17 56 51.5 40 5 23 20 30 4.5 Effective thread depth 6 Reference dimensions 8 3 45.5 5.25 20.6 61 13.2 68 56 25 26 5.5 VCHC Note 1) L7: Reference dimensions Dimensions: AS5000 ASR ASQ 2 x 1/4 to 1/2 2-1/4 to 1/2 74.9 (Max. 82.9)

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

SU) S A (mm) A AU AV AW AX AY BA BB Size 1 YA 1 28 2.8 11 8.2 5.5 1.5 35 39.6 2 30 3.6 12.6 9.2 7 2 37 45.1 3 34.5 4.4 15.5 10.5 8 2.5 43 46.7 7 41 4.8 18.4 12.2 10 3 50 59.2 YB effective depth YC (mm) BC BD BE BG BH BI BJ BK D DD DE FA FB FD H J JA JB JC JD JE JF JG Size M4 x 0.7 M4 x 0.7 1 4.5 32 17 11 8.2 30 4.5 5.3 27h9 27.5h9 14H9 4.8 2 3.7 9 3.3 6 3.5 2.2 5.3 4 M4 x 0.7 M4 x 0.7 2 5.5

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 11-/22-MXP6-5 W AA H 7 4 depth 2.5 2.5 11.2 2.3 3.5 1 3 4 x M3 x 0.5 depth 3 +0.030 0 D B 0.05 9.5 1 3.5 20 14 13 18 C 6 +0.030 0 depth 2.5 2.5 Width across flats 6 E 5 6 5 Prepared hole diameter 3.3 2 x M4 x 0.7 Piping port 2 x M3 x 0.5 (Plug: M-3P) F QL 6 13.5 17 Stroke: S M 2 0.05 M4 x 0.7 Mounting base side B D 7 5 2 x M3 x 0.5 Piping

VZM500

Push pull VZM550-01-37 Panel mounting hole Stroke 2.7 Position indicator Hexagon nut thick 5, across flats 17 JIS Symbol 2-3.2 mounting hole 20 N F.O.F. 2.7 mm T.T. 5-6-46 5 Port Mechanical Valve Series VZM500 External pilot type VZM551 type With foot bracket VZM55-01--F 2-4.5 mounting hole (External pilot port) SA VA SA VA VM VR VH VHS 5-6-47

Piping: Base Mounted, Stations: 17 Stations, A, B Port: 5/32" One-touch Fitting