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Class 1 Turbine Oil (with no additive), ISO VG32 Viscosity according to ISO Grade 32 Classification of viscosity (cst) (40C) Turbine oil P-32 Idemitsu Kosan Co.,Ltd. Turbine oil 32 Nippon Oil Corp. Cosmo turbine 32 Cosmo Oil Co.,Ltd. Kyodo turbine 32 Japan Energy Corp. Turbine oil 32 Kygnus Oil Co. Stork turbine 32 Kyushu Oil Co. Mitsubishi turbine 32 Nippon Oil Corp.

45 66 59 41.5 20 49.5 78 69 52 25 54 75.5 55.5 Workpiece mounting hole 1 Compared with bore size of 10 Width [mm] Bore size MXZ MXH MGP CQM Height 12 23 201 26 25 16 26 25 30 29 20 30 32 36 36 25 33.5 42 40 1 Compared with bore size of 10 Linear guide Depth [mm] Bore size MXZ MXH MGP CQM 12 37.4 471 58 25 16 40.9 53.5 64 29 20 49.4 64.5 83 36 25 57.4 93 40 Compact auto switch can be

4" one-touch fitting) M5 0.8 1/8 NPTF Port size M5 0.8 A port X port Note1) M5 0.8 M5 0.8 M5 0.8 Body ported type SYJ5 2/SYJ5 2R 3.4 (0.19) Note 2) Valve effective area mm2(Cv) M5 : 3.3 (0.18) 1/8 : 4.8 (0.27) N3T, N7T: 3.8 (0.21) Base mounted type SYJ5 4/SYJ5 4R M5 : 3.8 (0.21) 1/8 : 4.7 (0.26) Note 1 : Only for external pilot Note 2 : Value when used on a manifold Proper Combinations of

Up to 300 22 19.5 42 17 31 10 24 8 9 38 6 M5 x 0.8 5.5 8 8 M10 x 1.25 18 1/8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to 400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16

, 3/8 VCW31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 59 46 57 60 54.5 48.5 101 57 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 64.5 48 62.5 62 60 50.5 103 62.5 70 107 1/4, 3/8 VCW41 30 50 94 41 13.5 17 36 25 23 M5 8 26 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 70 48 68 62 65.5 50.5 103 68 70 119 3/4 17-2-55 8 Series VCW Dimensions (N.O.)

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

(Inch) 1/8" x 0.086" 1/8" 1/8" x 1/16" 3/16" 3/16" x 1/8" 1/2" 1/2" x 3/8" 3/8" 3/8" x 1/4" 1/4" 1/4" x 5/32" Refer to Best Pneumatics No. 7 for further details. 13 Series PB Applicable Fluids Material and Fluid Compatibility Check List for Process Pumps The data below is prepared based on data provided by the material manufacturers.

80 85 90 95 100 105 60 65 70 75 80 85 73 78 83 88 93 98 16 to 25 Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2 x P through A1 H E 4 x T counterbore 0.5 B S Z (mm) S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0

Symbol Data type Data length Bit [byte] Description (IO-Link standard) U8 8[1] UIntegerT Unsigned integer U16 16[2] S16 IntegerT 16[2] Signed integer F32 Float32T 32[4] Floating point number -75No.PS-OMV0006-D [Selection of display items during standard setting] Value Setting content Supplemental information HYS mode set value 0 1 HYS mode hysteresis 2 Wind mode lower side set value OUT1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions Dimensions A (mm) ZL (mm) Model Model A B C D E F G Y B C D E F G Y ZY ZPT40HB-B8 ZPT40HB-A14 M8 x 1.25 40 41.4 28.4 43.2 20.5 32 62 13 40 41.4 28.4 43.2 20.5 32 13 ZPT50HB-A14 -B10 M10 x 1.5 50 51.9 35.7 54 24 35.5 65.5 16.5 ZQ ZPT50HB-B8

Dimensions 45 2-6 Driver 149 160 6 A B 130 Driver input/output signal list (CN-1/F connector ) Driver dimensions Signal description Command pulse input Command pulse input Command code input Command code input Deviation counter clear input Deviation counter clear input Brake interlock signal output Pin no. 14 15 16 17 18 32 33 34 35 36 Signal PULS PULS SIGN SIGN CLR CLR BK COIN SG P-IN Signal

M2 M3 m2 m3 16 25 16 25 5 4 3.5 18 16 14 E-MY2C 13 14 10 35 35 30 7 6 7 15 13 13 E-MY2H 28 26 26 32 30 30 The above values are the maximum allowable values for moment and load weight. Refer to each graph regarding the maximum allowable moment and maximum load weight for a particular slide table speed.

16 5.2 10 12 15 8.3 32 30 32 36 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (H9) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153 20 0 0.03 1 15 59 24.5 8 11 9.6 11.5 4 13.5 27 4 4 2.5 74 20

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 ASG22F-M5 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 M5 x 0.8 6, 10, 16, 20 R1/8 20, 25, 32 R1/4 20, 25, 32, 40 R3/8 40, 50, 63 R1/2 63, 80, 100 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure 0.1 MPa Ambient and fluid temperature 5 to 60C (No freezing) Number of needle rotations 10 turns

L M Nylon Urethane M5 0.8 KCH04-M5 KCH04-01S KCH06-M5 KCH06-01S KCH06-02S KCH08-01S KCH08-02S KCH08-03S KCH10-02S KCH10-03S KCH12-03S KCH12-04S 2.1 2.6 2.4 18 2.1 2.6 2.4 27.3 22.1 28.9 33.4 22.9 38.4 39.7 27.5 44.5 45 47.7 33.6 9.8 30.8 26.1 32.4 37.4 28.9 42.4 45.7 34 50.5 51.5 54.2 41.6 4 8 1 8 10 11.8 12 14 M5 0.8 10 16 14 20 27 25 34 43 48 41 19.5 1 8 1 4 1 8 1 4 3 8 1 4 3 8 3 8 1 2

LEM-OM00203 PRODUCT NAME Electric Actuator / Low profile slider type MODEL / Series / Product Number LEM Series Applicable models: LEMB, LEMC, LEMH, LEMHT L LE EM MB B 2 25 5/ /3 32 2 L LE EM MC C 2 25 5/ /3 32 2 ( (C Ca am m f fo ol ll lo ow we er r g gu ui id de e t ty yp pe e) ) ( (B Ba as si ic c t ty yp pe e) ) L LE EM MH H 2 25 5/ /3 32 2 L LE EM MH HT T 2 25 5/ /3 32 2

T T 600 .75 PSIG (5 Kgf/cm2) A B c D E F G A B c D E F G 2.8 (63) 1.50 (38) 0.94 (241 0.63 {16) 0.16 (4) 0.57 14.5) 0.24 (6) 2.66 (67.5) 1.67 42.5) 0.94 (241 0.63 (16) 0.20 (5) 0.57 14.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses MECHANICAL VALVES DIMENSIONS Series NVM Nvtrll20-N01-32 130-N01-32 NVM120-N01-30 130-N01-30 4 63 lbs (2 1 ks.) r U T 4 6 3 l b s ( 2 1 k 9 )

T T 600 .75 PSIG (5 Kgf/cm2) A B c D E F G A B c D E F G 2.8 (63) 1.50 (38) 0.94 (241 0.63 {16) 0.16 (4) 0.57 14.5) 0.24 (6) 2.66 (67.5) 1.67 42.5) 0.94 (241 0.63 (16) 0.20 (5) 0.57 14.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses MECHANICAL VALVES DIMENSIONS Series NVM Nvtrll20-N01-32 130-N01-32 NVM120-N01-30 130-N01-30 4 63 lbs (2 1 ks.) r U T 4 6 3 l b s ( 2 1 k 9