Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Recommended flow rate Note) (l/min (ANR)) IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" Internal capacity (cm3) 1.7 Mass (g) ZA Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 4.3 1.7 ZR Metric size Easy installation

ITV

Note) Breathing hole (M3 x 0.5) 3.7 3.7 13.7 1 SUPz VACz OUT port (4, 5/32") SUP, VAC port (4, 5/32") OUTx 3 EXHc ATMc 2 5 EXH, ATM port (4, 5/32") 38 2-M3 x 0.5 thread depth 3.5 Bracket mounting hole L-bracket (Option) Flat bracket (Option) 6-3.5 19 74 2-3.5 19 27 19 64 Minimium bending radius 80 28 Body +50 0 3000 15 35 (30.9) 4 8.7 9.9 Cable connector (4-wire) Straight type (Option) 7

VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

PA300/500/700

Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

HRX-OM-X071

] 1000 32 32 25 25 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature

Series 12-REA Sine rodless cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 Although speed adjustment is possible with

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

03 02 03 VVQ4000-P-1(Plug-in type) 163 (Plug-in type) VVQ4000-P-5(Plug lead type) 115.5 (Plug lead type) 25 12.5 73 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 26.4 1(P) 4(A) Rc 3/8 2(B) 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Individual EXH spacer 02 03 VVQ4000-R-1(Plug-in type) 163 (Plug-in

VQ5000

. 4(A) P U S H 40.3 LOCK FREE 2(B) 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Release valve spacer: For D side mounting 179 (plug-in type) 133 (plug lead type) VVQ5000-24A-1D (plug-in type) VVQ5000-24A-5D (plug lead type) 16 32 A VQ51 (single) valve can be used as an air release valve by combining it with a release valve spacer.

125

. * The load ratio is obtained by the following formula: ((Load mass x 9.8)/Theoretical output) x 100% VEX VEX Conditions System Solenoid valve Speed controller Silencer Tubing diameter x Length A VEX31 22-02 AS4000-02 AN20-02 10 x 1 m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Nil N Body only With silencer 1 2 ADC12 (aluminum) SCS14 (stainless steel) For AIR EXH: AN200-02 Connection port size 1/4 (8A) 3/8 (10A) Diaphragm material 02 03 1 PTFE (fluororesin) Symbol Type of operation Thread type FLUID OUT AIR SUP Nil T F N Rc NPTF G NPT Automatically operated type with built-in pulsation attenuator 2 AIR EXH FLUID IN Built-in pulsation attenuator Automatically

Title not found

(inch) 1 8 1 2 3 8 5 32 3 16 5 16 1 4 One-touch Inch-size tubing/UNF, NPT thread connection Possible to use in vacuum to 100kPa UNF 10-32 Nylon 1 16 One-touch Mini Series KJ Soft nylon 1 8 Polyurethane Unions Applicable area U.S.A. etc.

AS

With One-touch fitting Port size M3 M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Thread type M5 Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT AS U10/32 01 02 03 04 Nil ASP N ASN Needle Valve/Flow Characteristics AQ AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AS1201F-M5-02, AS1211F-M5-02 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01

AS

Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASN M5 Nil U10/32 01 02 03 04 AQ N ASV AK Needle Valve/Flow Characteristics Note) The flow characteristics are representative values.

VP300/500/700

Common exhaust: VV3P3-41Stations 1-02 (G) (E) (T) (D, Y) N.C. N.O.

Air Cylinder

10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 M10 x 1.25 30 M26 x 1.5 1/8 32 22 19.5 17 32 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 M10 x 1.25 34.5 M26 x 1.5 1/8 40 24 21 22 41 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 M14 x 1.5 42.5 M32 x 2 1/4 With Rod Boot (mm) (mm) B3 e h Bore size S TD TT TX TY TZ Z ZZ 20 62 8 10 32 32 52 36 116 25 62 9 10 40 40 60 40 120 32 64 9 10 40 40 60 40 122 40 88 10

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 646 B AS Series Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow rate characteristics are representative values.

Vacuum Pad

ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

Vacuum Pad

ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

Vacuum Pad

ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.