VFR4000-OMH0003

P 1= 0.7 MPa/P 2=0.5MPa PB 31 31 24 Although A, B+ and B marks are indicated on the terminal 55 Effective area at exhaust side(mm 2) AEA block, VFR4000 can be used as either +COM or COM. 45 S at P 2 = 0.5 MPa BEB solenoid valve.

ITV

0.4 0.3 0.3 0.5 0.2 0.2 0.1 0.1 1.0 0 1000 2000 3000 4000 5000 60007000 0.0 0.0 3000 4000 0 1000 2000 5000 6000 0.4 0.6 0.8 1.0 1.2 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Supply pressure (MPa) 1.12-6 Electro-Pneumatic Regulator Series ITV2000/3000 Dimensions ITV20mm Cable connector (4 wire) Cable connector (4 wire) Right angle type Note) Straight type m50 4-7 Mounting hole AC (31

PSxx-OMU0002CN

[SEt] [SEt]()[P_1][n_1]() () ( )(61) ( )(61 ) 2 (2OUT2) 1 2 2 3(31) ([SEt]) 4OUT2OUT2[P_2][n_2] -26No.PS-OMU0002CN-D 26 P1L()P1H() WH1()dt1() (n1L n1H) 33 OUT2 -27No.PS-OMU0002CN-D 35[F 0] [F] 2 3 5 F0 F1 F99 ()[-] [F 0] 30 ISE20A MPa M ZSE20A(F) kPa ISE20A P psi ZSE20A(F) [F 1] OUT1 31 ISE20A0.500 MPa ZSE20A-50.5 kPa ZSE20AF50.0 kPa ONOFF ISE20A0.050 MPa ZSE20A5.1 kPa ZSE20AF5.0

Electro-Pneumatic Valve NVEP/NVEF Series

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

KRM

(mm) Model N L1 L2 Port B Min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KRM11-06-10-10 KRM11-06-10-6 76 10 6 6 10 29 47 19.5 31.5 21.5 31 13 13.5 17 21 7.5 10 102 6 85 10 116 41 39 55 73 KRM11-08-12-10 KRM11-08-12-6 8 12 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 22 9 57 86 Dimensions: KRM12 2-connection thread 2-4.5 mounting hole N-applicable tubing O.D.

HRS100/150

Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions. Design Operating Environment/Storage Environment Warning Warning 1. This catalog shows the specifications of a single unit. 1.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 10 10 ISO Class 5 30 L/min (ANR) 1000 1000 ISO Class 4 ISO Class 4 90 L/min (ANR) 100 100 50 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter [m] Particle

PA3000/5000/PAX1000

(except IDG1, IDG5) Maintenance Part Lists PA3000/Automatically operated type PA5000/Automatically operated type PAX1000 KT-PA5-31 KT-PA3-31 KT-PAX1-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PA5-32 KT-PA3-32 KT-PAX1-36 Check valve kit Diaphragm kit (NBR) Diaphragm kit (NBR) KT-PA5-36 KT-PA3-36 KT-PAX1-37 Check valve kit Check valve kit Switching valve parts kit

Process Valve Series VNA

VNA Cylinder speed (mm/s) VNB Conditions Cylinder Supply pressure 0.49 MPa Stop valve SGC Cylinder Hydraulic fluid ISO VG32 VNC Load No load Piping length Piping length 1 m Speed controller Skip valve VNH VNA111A, CCVSO2 3/8B (9 mm) Bore size (mm) Piping diameter VNA211A, CCVLO2 VND 1/2B (13 mm) This series can supplement the capacity of conventional air-hydro valve units.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

(except IDG1, IDG5) Maintenance Part Lists PA3000/Automatically operated type PA5000/Automatically operated type PAX1000 KT-PA5-31 KT-PAX1-31 KT-PA3-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PA5-32 KT-PAX1-36 KT-PA3-32 Check valve kit Diaphragm kit (NBR) Diaphragm kit (NBR) KT-PA5-36 KT-PAX1-37 KT-PA3-36 Check valve kit Check valve kit Switching valve parts kit

Process Pump Series PA3000/5000/PAX1000 Series PB1000

(except IDG1, IDG5) Maintenance Part Lists PA3000/Automatically operated type PA5000/Automatically operated type PAX1000 KT-PA5-31 KT-PA3-31 KT-PAX1-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PA5-32 KT-PA3-32 KT-PAX1-36 Check valve kit Diaphragm kit (NBR) Diaphragm kit (NBR) KT-PA5-36 KT-PA3-36 KT-PAX1-37 Check valve kit Check valve kit Switching valve parts kit

VZ1000

Refer to page 3-13-4.) 15 or less 15 Refer to the table below.

M Series

X83 M3 Note 1) M-3G2 M5 Note 2) M-5G2 X226 Gasket material: Stainless steel 304, FKM Applicable thread Gasket part No. M3 M3G-DPH00489 X112 Gasket material: Stainless steel 316, special FKM Applicable thread Gasket part No. M5 M-5G3 Note 1) Compatible with models using M3 excluding M-3-2.

3 Port Air Operated Valve Series SYJA300 1

M3 x 0.5 18 0.9 M3 x 0.5 39 (Without subplate 18) Base mounted (with sub-plate) 0.089 M5 x 0.8 0.36 0.31 0.089 0.36 0.31 N.O.

3-Position Rotary Table

DK (through) DH DI DJ DK DL FE HA UV Size 10 20 30 50 45h8 46h8 20H8 6 15H8 10 18.5 52.5 60h8 61h8 28H8 9 17H8 15.5 26 63 65h8 67h8 32H8 12 22H8 16.5 27 67 DL 75h8 77h8 35H8 13 26H8 17.5 30 76 (mm) AA A AV AW AX AY AZ BA BB BC CA CB CC D DD DE DF DG FA FB FC FD H J JA JB Size 10 20 30 50 D7 24.7 50 14 17 8 1 9.5 60 27 7 7 38 45h9 46h9 20H9 6 15H9 8 4 3 4.5 13 6.8 11 6.5 8 32.4 65 17 18.5

V100

Grommet (G), (H): V11 24(A)-G H-M5 13.1 (Light/Surge voltage suppressor) 5 + 13 15.5 3 13 3 28.5 [32.4] 10 G: Approx. 300 H: Approx.600 (Lead wire length) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 30.9 [33.1] 25.1 11.4 5.7 5.7 5.7 2 1 7 5 9.5 5 19 (Piping

4

[1(P), 3(R) port] 13 L2 L1 (Station n) (Station 1) Max. 10 77.1 64 (35) 40 A A 23 5 1/8" [2(A) port] (Pitch) P = 26 31 n: Stations L Dimension n L L1 L2 2 88 62 3 114 88 4 140 114 5 166 140 6 192 166 7 218 192 8 244 218 9 270 244 10 296 270 Formula L1 = 26 x n + 36 L2 = 26 x n + 10 6 Series VT307 3 Port Solenoid Valve Direct Operated Poppet Type Dimensions: Individual Exhaust VV307-01-3-

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

6H9 (+0.030 0 ) depth 7 Body mounting reference plane (B dimension range)1 60 106 58 74 7 6H9 (+0.030 0 ) depth 7 L Cable length 250 86 (165) A (Table traveling distance)2 (86) 13 (3.1) (4) [(2)]4 [Origin]4 (90) [88]4 Stroke Origin3 88 [(90)]4 (90) 2 [(4)]4 65 24 61 (68) 8 31 Motor cable 68 M4 x 0.7 thread depth 8 (F.G. terminal) 53.8 8 Auto switch groove5 (1 row per side) 60 D x 150 (=

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

86 9 116 108 11 138 130 L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215 207 10 127 119 12 149 141 14 171 163 8 105 97 601

JCRB-OM00003

Table 4 BoltTightening torque Size Bolt Recommended tightening torque 10 M3 0.63 Nm 15 20 M4 1.50 Nm 30 M5 3.00 Nm 40 Fig.8 Mounting 2 Using a plate with tapped holes (Refer to Fig. 9). L dimension when the unit is used as a flange is shown in the table below.