Digital pressure switch for energy-saving control ejector (such as static electricity. (2) Check if the power supply voltage System error is in the range 24 VDC 10%. (Er0, 4, 6, 7, 8 or 9) is displayed. (2) Supply power in the range 24 VDC 10%. HHH is 6 displayed. (1) Reset applied pressure (1) Check that the pressure is not to a level within the set pressure range.
A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room
M L Bearing type Compact type Slide Bearing Ball bushing bearing Bore size/Stroke (mm) Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50 Bore size 6 10 Auto Switch Specifications (Refer to the WEB catalog for detailed specifications and auto switches not in the following table.)
L/min 10 L ON OFF ON OFF 0 -14No.PF-OMO0004CN-E , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L/min ,10 11 12 1 L/min SI SI ON-OFF ON 0 ripple -15No.PF-OMO0004CN-E AB.
Low leakage 1.3 x 10-Pam/sec Leakage:1.3 x 10-Pam/sec or less (at normal temperatures, excluding gas permeation) 10Standard value Note 1) The data indicates the leakage measured in a vacuum environment of 10-Pa. Leakage [Pam3/sec] 10Note 2) The leakage test result shown is based on a test conducted for 10 minutes after the cylinder was pressurized with helium at 0.1 MPa.
High precision guide Note 1) 10 is available with central piping only.
Standard Stroke 2 , 3 , 4 , 5 , 6 , 8 , 1 0 2, 3, 4, 5, 6, 8, 10 5, 10, 15,20,25,30 5, 10, 15,20,25,30,40 5, 10, 15, 20,25, 30, 40 5, 10, 15,20,25,30,40 1 kg=2.2 16. Magnetic Holding Power (lbs) 1N=0.101 H 227.94 L type 140.65 Basicweight. -. -. 8.00 lb6) Additional weight.. . 0.30/1 inch !
Standard Stroke 2 , 3 , 4 , 5 , 6 , 8 , 1 0 2, 3, 4, 5, 6, 8, 10 5, 10, 15,20,25,30 5, 10, 15,20,25,30,40 5, 10, 15, 20,25, 30, 40 5, 10, 15,20,25,30,40 1 kg=2.2 16. Magnetic Holding Power (lbs) 1N=0.101 H 227.94 L type 140.65 Basicweight. -. -. 8.00 lb6) Additional weight.. . 0.30/1 inch !
Name of CAD file Page in Vol.2 Standard Copper-free 6 8 12 (10) 16 (15) 20 25 32 40 50 63 80 100 Series/Variation Floating joint Series JA 5.2-2 SJAl JA Standard For compact cylinder SJBl 5.2-10 JB RB Shock absorber/ Series RB J 5.1-2 SRBl 20-RB O.D. thread M8/M10/M14/M20/M27 D 5.1-7 SRBLl 20-RBL O.D. thread M10/M14/M20/M27 -X 20Technical Data 5.5-5 6, 10, 16, 20, 25, 32, 40, 50, 63, 80,
Replacement Parts 230 V type IDFA15E1-23, IDFA22E-23 IDFA37E-23, IDFA55E-23 IDFA75E-23 10 A 30 mA Model Part no.
Reed Auto Switch: D-A93 (mm) Stroke B A Stroke C Auto switch operating range Stroke Model 5 10 15 20 5 10 15 20 5 10 15 20 11-MXJ4 11-MXJ6 11-MXJ8 14 14 0.5 0.5 9 4 4 3 14 14 18 0.5 0.5 0.5 9 4 10 5 25 14 14 25 0.5 0.5 0.5 0.5 9 4 Solid State Auto Switch (Lead Wire, In-line Entry): D-M9 (mm) Stroke B A Stroke C Stroke Auto switch operating range Model 5 10 15 20 5 10 15 20 5 10 15 20
Refer to p.0-39 to 0-42 for Safety Instructions and common precautions. Standard stroke (mm) Model CJ1B2 CJ1B4 Bore size (mm) 5, 10 2.5 5, 10, 15, 20 4 Applicable Tubing Piping Caution Size O.D. Tubing Material Model No. I.D.
Grease pack (10 g) 1 pc. IN 84.8 59 42 25 CQSY16-PS 12 6 OUT 113 79 57 34 CQSY20-PS IN 151 106 75 45 CQSY25-PS 16 8 OUT 201 141 101 60 When only grease for maintenance is necessary, please order by the following part numbers.
Series CBQ2 Allowable Kinetic Energy Allowable Rod End Lateral Load 0.5MPa 0.4MPa With rubber bumper With auto switch (lateral resistance) 200 100 100 50 50 40 30 Allowable lateral load W (N) 63 20 Load weight kg 50 10 63 40 32 10 5 4 3 50 5 2 40 1 0 10 20 30 40 50 60 70 80 90 100 32 Stroke St (mm) 1 50 100 200 500 300 Maximum speed mm/s (Mounting orientation: Horizontal) W
Tightening torque Bore sizes (mm) Hexagon socket head cap screw (mm) Proper tightening torque (Nm) Piston rod lateral load (Graph 2) 20, 25 32 M5 M6 5.10 10% 8.04 10% 5.00 4.50 4.00 Selection Caution 3.50 Lateral load (N) 3.00 32 2.50 1. Operate the cylinder to the stroke end.
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).
M plug connector 2 position double: VZS2250-M(Z)-01 3 position closed center: VZS2350-M(Z)-01 3 position exhaust center: VZS2450-M(Z)-01 3 position pressure center: VZS2550-M(Z)-01 DIN terminal 2 position double: VZS2250-D(Z)-01 3 position closed center: VZS2350-D(Z)-01 3 position exhaust center: VZS2450-D(Z)-01 3 position pressure center: VZS2550-D(Z)-01 Applicable cable O.D.: 3.5 to 7 MAX
Operating: 0 to 50C, Stored: 10 to 60C (with no freezing and condensation) Resistance Operating or Stored: 35 to 85%RH (with no condensation) 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs., whichever is smaller.
Retainer prevents accidental loss of needle Increased number of needle rotations to 10 turns. Air Flow/Effective Area AS AS12l1FG AS22l1FG-01 AS22l1FG-02 AS32l1FG AS42l1FG Model 4 6 6 8 10 12 4, 6 6, 8, 10 8, 10 10, 12 4 Tube O.D.
Flow Rate and Effective Area Flow direction symbols on body Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Models Symbol JIS symbol Metric sizes 3.2, 4, 6 3.2, 4 6 6 8 10 12 6, 8, 10 8, 10 4 10, 12 Tubing O.D. 1/8 5/32 3/16, 1/4 5/16 1/4, 5/16 3/8 1/8, 5/32 3/16, 1/4 Inch sizes 5/32 3/16 5/16 3/8 1/2 3/8 1/4 Flow rate l/min (