Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Escapements Series MIW/MIS

25 MB MA HC HE KB KA LA LB LC PA PB PD PC ME MD MIS12-10 MC HD HA, HB JB JA N Model 48 38 28 39 29 19 MIS12-30 MIS12-20 2.5H9 0 +0.025 13 10 7 6 4 3.5 11.6 2.3 M2.6 x 0.45 19 4 M4 x 0.7 6 17.5 11 5 18 6 MIS20-30 MIS20-20 MIS20-10 7 40.5 30.5 20.5 52 42 32 4H9 0 +0.030 8.5 17.5 5 5 2.8 M3 x 0.5 26 6 M6 x 1 9 25 12 8 10 15 14 26 10 Series MIW/MIS Finger options Tapped on upper and lower faces

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

285.5 11 142 191 211 237.5 248 16 192 241 261 287.5 298 12 152 201 221 250 260.5 15 182 231 251 275 285.5 L1 L2 (L3) (L4) (L5) *SG Type: L2=10n+68 (L3)=L3(Std.)+25 (L4)=L4(Std.)+25 (L5)=L5(Std.)+25 11 Series VQ100 Non Plug-in Unit Manifold VV3Q12 Phillips/ordinary round head screw M1.74 L1 5 L2 3 Manual override 2-3.2 Mounting hole 10.8 3.5 8.9 P E 28.7 11 P E 26.5 33.8 44.8 4-M5 (P,E port

3 Port Solenoid Valve Metal Seal Series VZ200 1

5 !6 Pilot valve assembly !

VQ

SY SYJ (L5) Plug assembly (L4) VK 2-4.5Mounting hole 1 2 3 VVQ100-12A(L3) 88 (8.5) L2 VZ 48.7 L1 VT VT (45) (35) 33 25 (5.5) VP 23.5 12.3 VG R11 Manual override 21.5 (Min. bending inner radius) (29.3) VP 104 VQ VQZ Stations 1 2 3 4 5 n Dside Uside VZ 2-M5 X 0.8(E port) VS 2-M5 X 0.8(P port) 42.9 A A 20 (8.5) 1.5 5 n-M5 X 0.8 (A port) 5 (7.5) 15 P=10 38 Equation: L1=10n+32 L2=10n+43

Guide Table Series MGF ø40, ø63, ø100 1

5 5 D-Y7BAL Since this is a guideline including hysteresis, not meant to be guaranteed.

VVX31/32/33

4 7,, 9= 5,'., ?4 , 9= 5,'., ?4 77, 9= 5,'., ?4 70, 9= 5,'., ?4 0( 9= 5,'., ?

LECA6_C

(P.48) 5() ()() () 6 10 - 3. 3.1.

Quick Exhaust Valve Series AQ 1

(Refer to pages 15-6-3 to 15-6-5 for details.) ASP ASN Model Applicable tubing O.D.

Compact End Lock Cylinder Series CBQ2

L1 (mm) With rear lock With front lock Bore size (mm) I J K C D E H Standard stroke A B Q A B F Q 32 72.5 65.5 12.5 65 58 7.5 10.5 13 16 45 M8 x 1.25 60 4.5 14 40 82 75 14 71.5 64.5 8 11 13 16 52 M8 x 1.25 69 5 14 10, 15, 20, 25 50, 75, 100 50 83.5 75.5 14 73.5 65.5 10.5 10.5 15 20 64 M10 x 1.5 86 7 17 63 85 77 15.5 79 71 10.5 15 15 20 77 M10 x 1.5 103 7 17 (mm) Bore size (mm) R W Z L M

PSxx-OMH0002CN

SorSoG 5. -27-67 6 7. 0 ISE75 / ISE75H 8.

MHx-OMZ0003

TMComponent . 20 5-4. . 24 5-5. . 24 5-6. . 24 5-7. . 25 6. . 25 1 - (ISO/IEC)(JIS)*1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370

PSE530/200

DC (+) Sensor input: +1 to 5 VDC DC () CH1_OUT1 (Black) Main circuit N.C. CH1_OUT2 (White) +12 to 24 VDC + CH2_OUT1 (Gray) Internal data error. Please contact SMC. DC (+) Sensor input: +1 to 5 VDC DC () CH3_OUT1 (Orange) N.C. CH4_OUT1 (Pink) DC (+) Internal data error. Load Sensor input: +1 to 5 VDC DC () N.C.

Clean Air Module

ISO compressed air quality class The class regarding the cleanliness of compressed air (solid particles, moisture and oil) stipulated by ISO 8573-1:1991 (JIS B8392-1:2000) Maximum oil concentration (mg/m3) Minimum pressure dew point (C) Maximum particle size (m) Quality class 1 2 3 4 5 6 0.01 0.1 1.0 5 25 70 40 20 3 7 10 0.1 1 5 15 40 Notation system Example) Solid particle size: 0.1 m

33

SMC Thermo-chiller Variations HRW HECR Series Temperature stability [C] Set temperature range [C] Cooling capacity [kW] Environment International standards 1.2 1.8 2.4 3 5 6 9 10 15 20 25 28 HEC HEB HRSE Basic type 2.0 10 to 30 V V V Indoor use (Only 230 VAC type) HED HEA IDH HRS Standard type 0.1 5 to 40 V V V V V V Indoor use (Only 60 Hz) HRS090 Standard type 0.5 5 to 35 V Indoor use (400

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

20 15 14 17 25 73 32.5 2 20 5 3.5 39.5 5 Dimension AU does not indicate the dimension when shipped because of the adjustment section.

PSxx-OMU0008CN

48.9 42.6 7 M50.8 5 02R1/4 N02NPT1/4 -79No.PS-OMU0008CN-D F02 C01 M50.8 5 Rc1/8 G1/4 A2 B2 URJ1/4 TSG1/4 -80No.PS-OMU0008CN-D 02L 22.6 12 M50.8 5 02R1/4 N02LNPT1/4 -81No.PS-OMU0008CN-D F02L C01L Rc1/8 M50.8 5 G1/4 A2L B2L URJ1/4 TSJ1/4 -82No.PS-OMU0008CN-D A -83No.PS-OMU0008CN-D C -84No.PS-OMU0008CN-D () 43.602 0.5~7 ()+ 43.602 0.5~7 -85No.PS-OMU0008CN-D () 1~5 -86No.PS-OMU0008CN-D

125

V 6 VDC S 5 VDC R 3 VDC * DC specification of type D and DO is only available with 12 and 24 VDC.

Compact Guide Cylinder End Lock Type SeriesMGP

to 175st 17.5 Over 25 to 175st 102 25st or less Over 175st 25st or less Over 175st 42 4 4.5 3 6 M8 x 1.25 16 21 97 140 20 12.5 55.5 32 32 50 4 4.5 3 6 M8 x 1.25 16 22 97 102 140 20 6 11 49 40 40 66 5 6 4 8 M10 x 1.5 20 24 50 106.5 118 161 25 9.5 21 64 50 80 5 6 4 8 M10 x 1.5 20 24 63 106.5 118 161 25 4.5 16 59 63 End lock mechanism dimensions MGPL (ball bushing)/A, DB, E dimensions (mm)

High Purity Fluoropolymer Fittings/Needle Valve/Tubing

Series Appearance Class Metric size Inch size 1/4" 3/8" None 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 2 3 Male 4 P.19 Connector LQ2H 5 2 3 Female 4 P. 20 5 2 3 Male 4 P. 21 Elbow LQ2L 5 2 3 Female 4 P. 22 5 2 3 Male 4 P. 23 Run tee LQ2R 5 2 3 Female 4 P. 24 5 2 3 Male 4 P. 25 Branch tee LQ2B 5 2 3 Female 4 P. 26 5 2 3 Union elbow LQ2E 4 P. 27 5 2 3 Union tee LQ2T 4 P.