ARX Series

1 ARX20 mm Nil F ARX21 mm Nil F Thread type G Pressure gauge Rc(PT) NPT G(PF) Nil N F ARX20Nmm ARX21Nmm P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.

VXA21/22

Model VXA212 VXA213 VXA21 VXA22 VX070-020 LQ 1 8 1 4 1 4 3 8 1 2 01 ( / ) 02 ( / ) 02 ( / ) 03 ( / ) 04 ( / ) VXA223 VXA224 VXA225 VXA226 VX070-022 LVN VX070-029 TI/ TIL PA Ordering example (Example) Series VXA21, Orifice size 4.5 mm, Normally closed, Rc 1/4 (Part no.) VXA2130-02 PAX PB 17-3-95

Series VF1000/3000/5000 Pilot Operated 5 Port Solenoid Valve Single Unit Note) Only DIN and conduit terminal types are available with AC mode. Refer to the electrical entry for details.

Body Ported RoHS How to Order Valve VF 3 1 3 0 5 G 1 01 Body ported Series 1 3 5 Bracket VF1000 VF3000 VF5000 Type of actuation Nil F Without bracket With bracket Thread type 1 2 3 4 5 2-position single 2-position double 3-position closed center 3-position exhaust center 3-position pressure center Rc G NPT NPTF Nil F N T VF1000/3000 Single type (The bracket cannot be connected after delivered

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

Series VFR2000 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in How to Order F: Plug-in type Electrical entry Option Port size (P, A, B port) Thread type Nil F G Rc Nil Z None Nil 01 Without sub-plate 1 8 1 4 With light/surge voltage suppressor 02 N NPT Piping (P, A, B, EA, EB port) T NPTF EA, EB port: Rc 1/8 Nil B Side ported Bottom ported Option SJ 1 00 01 F Plug-in

Regulator for 2 MPa Series ARX20

Regulator for 2 MPa Series ARX20 How to Order ARX2 0 01 Regulator for 2 MPa Option None Nil Regulating pressure range 1348112 G361001 G461002 G36401 G46402 G36P10N01 G46P10N02 G36P4N01 G46P4N02 1348110A B Bracket ARX20 Nil F 0.05 to 0.85 MPa 0.05 to 0.30 MPa 0 1 ARX21 Nil F Note 1) (2) Thread type G Pressure gauge ARX20N Rc NPT G Nil N F ARX21N P Port size Panel nut 1/8 1/4 01 02 Option

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?

Digital Pressure Sensor

M5, R(PT) 1/8, R(PT) 1/4 Mounting bracket .M5 style only 3.6-1 Digital Pressure Sensor GS40 How to Order GS40 X202 Digital Pressure Sensor PSE ZSE4 ISE4 Port size Optional M5 (Female) R(PT)1/8 R(PT)1/4 5m-long lead wire X202 M5 01 02 ZSE5 ISE5 ZSE6 ISE6 Accessories B None Bracket (M5 style only) ZSE3 ISE3 GS PS Specifications ISA Model GS40-M5 GS40-01 GS40-02 ZSE1 ISE1 Air or inert gas Fluid

Process Pump (Diaphragm Pump) Body Wetted Parts: Polypropylene/Stainless Steel Built-in Solenoid Valve/Air Operated (External switching type) PB1000A Series

Process Pump (Diaphragm Pump) Body Wetted Parts: Polypropylene/Stainless Steel Built-in Solenoid Valve/Air Operated (External switching type) PB1000A Series RoHS How to Order Built-in solenoid valve only PB101 Built-in Solenoid Valve PB1011A 1 A 01 Actuation Made to Order Symbol 1 3 Actuation Built-in solenoid valve Air operated Nil X16 X47 (For details, refer to page 588.)

How to Order VPA300/500/700 Series 3 Port/Air Operated Valve Body Ported/Single Unit

Nil V Standard For vacuum X505 VPA500 series Port size Symbol Port size VPA300 1/8 1/4 3/8 1/2 VPA500 VPA700 01 02 03 04 Bracket Nil F Without bracket With bracket Thread type Type of actuation A B N.C. (Normally closed) N.O. (Normally open) Nil F N T Rc G NPT NPTF VPA700 series Specifications Air Fluid N.C. or N.O.

VR4151/4152

Series VR4151/4152 How to Order A 01 5 1 1 VR41 Indicator light 0 No 1 Yes Sub-plate Side piping B A Bottom piping Port size W/o sub-plate 00 Rc 01 1 8 1 8 NPT N01 1 8 G F01 Number of pilot ports Single pilot 2 1 Double pilot Number of ports 5 port 5 Dimensions Side ported Bottom ported Stroke 2 mm Stroke 2 mm Indicator light Indicator light Manual override (Button diameter 3.5) Manual override

SY3000/5000/7000/9000

5 Port Solenoid Valve Body Ported/Single Unit Series SY3000/5000/7000/9000 How to Order 5 L SY 5 1 20 01 Series Bracket 3 SY3000 5 SY5000 Nil: Without bracket F1: With foot bracket A, B port size Thread piping 7 9 SY7000 SY9000 2 position single only Symbol Port size M5 x 0.8 SY3000 Applicable series M5 1 8 01 SY5000 1 4 SY7000 02 02 03 Type of actuation Coil specifications 1 4 Standard Nil

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?

Metering Valve with Silencer Series ASN2

ASN How to Order AQ ASN2 03 ASV JIS Symbol AK Option Nil S None With seal ASS Port size ASR M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASF Thread type Metric thread (M5) Unified thread (10-32 UNF) R NPT Nil N Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations 15-11-1

IZSE_X101

output P PNP open collector 1 output Symbol Description Nil Units selection function1 M SI unit only2 P Units selection function (Initial value psi)1 1 Under the New Measurement Act, switches with the units selection function are not permitted for use in Japan. 2 Fixed unit: kPa, MPa y Option 2 t Option 1 r Piping specification Symbol Description Nil None Symbol Description Symbol Description

ZSE20(F)_ISE20

output P PNP open collector 1 output Symbol Description Nil Unit selection function1 M SI unit only2 P Unit selection function (Initial value psi)1 1 Under the New Measurement Act, switches with the unit selection function are not permitted for use in Japan. 2 Fixed unit: kPa, MPa y Option 2 t Option 1 r Piping specification Symbol Description Nil None Symbol Description Symbol Description

VFS1000

5 Port Pilot Operated Solenoid Valve Metal Seal, Body Ported Series VFS1000 How to Order 01 VFS1 1 20 1 G Symbol Option 2 position single F: With foot bracket Thread type 1 Nil N Rc NPT NPTF G T Port size 01 F Rc 1 8 2 position double SJ Option 2 Mountable only for VFS1120.

Nozzle Type Ionizer IZN10E Series ®

Nil None B1 L-bracket IZN10-B1 B2 Pivoting bracket IZN10-B2 B3 DIN rail mounting bracket IZN10-B3 Symbol Type 01 Energy saving static neutralization nozzle 02 High flow rate nozzle 11 Female threads for piping*1 *1 Refer to the cautions when using the female threads for piping shown below. * Refer to page 12. Brackets are the same as those for the current model (IZN10).

Note) CE compliant: Electrical entry is applicable only for the DIN terminal. [Option] 3 Port Solenoid Valve Direct Operated Poppet Type Series VT307 Rubber Seal

Nil K Standard type (0.7 MPa) High-pressure type (1 MPa) Thread type Nil F N T Rc G NPT NPTF Semi-standard Rated voltage Port size Nil 01 02 1 2 3 4 5 6 7 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz 1/8 (6A) Without port (For manifold) 1/4 (8A) Light/Surge voltage suppressor Nil With surge voltage suppressor None With surge voltage