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AT Ambient temperature 0.98 B 75 psi (0.53 MPa) Inlet air pressure 0.95 C IDF IDU 14 SCFM Air consumption Note) Values obtained from the table below. IDFA 2 Calculate the corrected air flow capacity. IDFB IDFB Corrected air flow capacity = 14 SCFM (0.82 x 0.98 x 0.95) = 18 SCFM Obtain the corrected air flow capacity from the following formula.

Symbol (B) 2 (A) 4 1 (P) 3 (R) Flow Rate Characteristics C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 14/2(PA/B) 4/25/3(A/BEA/EB) Flow rate characteristics Valve model Port size Body ported 10-VQD1121(V)-L M-M5 10-VQD1121 -L M-M5 10-VQD1151(V)-L M-M5 10-VQD1151W-L M-M5 0.05 0.07 0.06 0.07 Base mounted (With sub-plate) 0.22 0.27 0.22 0.27 0.16 0.24 0.10 0.25 0.05 0.07 0.05 0.07 0.19 0.28 0.22 0.27

through 6 (mm) ST 10 20 30 40 50 14+ST 24 34 44 54 64 17+ST 27 37 47 57 67 49.5+ST 59.5 69.5 79.5 89.5 99.5 61+ST 71 81 91 101 111 Part no.

distributor Auto feed tank 1047 ALF400 to 900, ALT-5/-9 Series Operating Pressure Range Tank and line pressure How to Order ALF 40 02 0 (2) (1) Option Operating allowable range Operating allowable range Tank pressure (MPa) Nil R Auto Feed Lube Flow direction: Right to left Option Body size Port size Symbol Nil Description Applicable model 40 50 60 80 90 2 1 02 03 04 06 10 12 14

Port size Exhaust cleaner for vacuum pump 10 14 20 30 40 R1 R1 R2 80 (3B) JIS 10K FF flange 1 2 Captures and separates 99.5% of even low-flow and highly concentrated greasy fumes. Using the AMV series, greasy fumes cannot be visibly recognized in the exhaust from the vacuum pump. (When greasy fumes are 1,000 mg/m3 at the IN side, it will be 5 mg/m3 or less at the OUT side.)

max 15 in. (0.4 m) Option: 10 in.(0.25 m), 7in.(0.18 m), 5 in.(0.13 m) Face seal, Tube weld Bottom mount 0.76 in3 (12.52 cm3) Inboard leakage Outboard leakage Leak rate Across the seat leak Surface finish Connections Installation Internal volume Mass Knob LOTO (Lockout) 3 lbs (1.36 kg) 3) Round knob with open/close indication window N/A 3.20 lbs (1.45 kg) 3) Pull twist knob 4) Standard 1) 14

Dimensions for installation n: number of valve stations n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 n L 9 10 11 12 13 14 15 16 L1 232.7 248.7 264.7 280.7 296.7 312.7 328.7 344.7 L2 192 208 224 240 256 272 288 304 (mm) The above table shows dimensions as an example for the SY5000 series valve manifold.

. : : : : : Green flashes EtherNet/IPTM-level communication not established 14 0 1 1 1 NS Green light ON Element Description Multiple EtherNet/IPTM-level communications established DHCP mode 1 1 1 1 CLEAR/HOLD Communication connector Connect the EtherNet/IPTM line.

Remote (2) Mount the end plate bracket (EX600-ZMA2) to the end plate using 2-M4 x 14 screws. Tightening torque: 0.7 to 0.8 Nm 1 2 3 CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

Remote (2) Mount the end plate bracket (EX600-ZMA2) to the end plate using 2-M4 x 14 screws. Tightening torque: 0.7 to 0.8 Nm 1 2 3 CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

LCD 3. 4. 5. 14 6. 5 Terminal Setting -13No.EX-OML0010CN-C 15 (I/O ) 24 () 27 () 33 () 47 () -14No.EX-OML0010CN-C 1. I/O Monitor(I/O ) I/O [1.I/O Monitor] 2.& 1. 3. 4. 1. 2.4. 16 2.

Doc.No.LV50***-OMQ0002-G Product Name Electromagnetic Digital Flow Switch Model/ Series/ Product Number LFE# SMC Corporation No.LV50***-OMQ0002-G Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product Parts 13 Definitions and Terminology 14 Mounting and Installation 16 Installation 18 Piping Method 19 Wiring 21 Flow Setting 24 Function Settings 26 Default Setting

Doc.No.LFE*-OMZ0012 Product Name Electromagnetic Digital Flow Switch Remote Type Model/ Series/ Product Number LFE#(Z) SMC Corporation Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product Parts 13 Definition and Terminology 14 Mounting and Installation 15 Installation 17 Piping Method 18 Wiring 20 Maintenance and Inspection 22 Troubleshooting 23 Specifications

Doc.IZ*-OMU0031 / Series IZE11 2 7 8 10 10 11 14 15 18 18 F0 19 F1 OUT1 20 F2 OUT2 22 F3 22 F4 23 F5 24 F6 25 F98 26 F99 27 28 31 32 32 34 -1No.IZ*-OMU0031 1) (ISO/IEC)(JIS) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment

XL-OMV0002 VR 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All Rights Reserved 15 XL-OMV0002

Insert the cover. 13 XL-OMO0001-A Revision history Limited warranty and Disclaimer SR 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved 14 XL-OMO0001-A

No.PS-OMS0004CN-D // PSE570/573/574 2 8 9 10 10 14 15 15 17 -1No.PS-OMS0004CN-D (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety

26 - Revision history AAll revised contents 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved

GR-S-010(10g)GR-S-02020g 2. 3. 4. 1. 2. 3. 4. 5. 6. 7. 1. 2. 1. 2. 21 - 1. 2. 1. 2. 3. 1. 2. . 1. 2. 1. 2. 3. 1. 22 - 7. 6. 1 2A A 2B B 2C C 3 4 5 6 7 8 9 A 10 B 25 A 11 12 13 14 15 16 17 CDM2 23 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications

No.CE-OMQ0010-C CE2 CE2 SMC 1 2 2 2-1. 89 2-2 10 2-2-1. 10 2-2-2. 11 3 1213 4 4-1. 14 4-2. 14 4-3. () 15 5 5-1. 16 5-2. 16 5-3 17 5-4 1718 6 6-1. 18 6-2 19 6-3. 19 7 7-1. 20 7-2. 2021 8 8-1 21 8-2. 2122 8-3. 22 8-4. 23 8-5. 2324 1 1) (ISO/IEC)(JIS) 2) *1) ISO 4414:Pneumatic fluid power General rules relating to systems.