Fieldbus system (SI unit compatible CompoNet TM )

Communication specifications Model Specifications Protocol CompoNetTM Communication speed 93.75 kbps/1.5 Mbps/3 Mbps/4 Mbps Setting file EDS file (downloaded from our web site) Occupied area (No. of input/output) 0/16 Applicable solenoid valve series Number Valve series Enclosure Mounting Valve interface SV1000/2000/3000/4000 VQ1000/2000 SY3000/5000/7000 IP20 EX120-SCM# Direct Plug-in EX121

EXxx-OMC0002

Valve series Enclosure Mounting Valve interface SV1000/2000/3000/4000 VQ1000/2000 SY3000/5000/7000 IP20 EX120-SCS1/2 Direct Plug-in EX121-SCS1/2 SY3000/5000 Flat ribbon cable DIN rail EX122-SCS1/2 SY3000/5000 Plug-in EX124U/D-SCS1/2 VQ2000/4000/5000 IP65 Direct -27No.EX-OMC0002-C Dimensions EX120-SCS1/2 EX121-SCS1/2 -28No.EX-OMC0002-C EX122-SCS1/2 EX124D/U-SCS1/2 -29No.EX-OMC0002-C Revision

XLF Series

10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN) Main material Body: aluminum alloy, Main part: SUS304 and FKM (standard sealing material) Note 2 Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.40.7 Air consumption cm3 Note 3 for 0.5MPa 19 46 200 360 660 1350 3000

Fan Type Ionizer

Cable color Signal name Conductor size(AWG) IZF10R-CP 3000 +60 0 1 Brown +24 VDC 26 +100 0 IZF10R-CPZ 9850 2 Blue 0V 26 3 Green F.G. 26 AC adapter 4 Yellow Maintenance signal 26 5 Purple Error signal 26 IZF10R-CG1 (With AC cord) F.G. cable (AWG26, semi-stripped terminal) AC adapter AC cord IZF10R-CG2 (Without AC cord) F.G. cable (AWG26, semi-stripped terminal) Inlet IEC60320-C8 AC adapter

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

300 Parallel Stroke 701 to 800 20 to 550 12 to 330 6 to 180 24 to 750 16 to 500 8 to 250 30 to 750 20 to 550 10 to 300 range 801 to 900 24 to 610 16 to 410 8 to 200 30 to 750 20 to 550 10 to 300 901 to 1000 24 to 500 16 to 340 8 to 170 30 to 750 20 to 520 10 to 250 1001 to 1100 30 to 660 20 to 440 10 to 220 1101 to 1200 30 to 570 20 to 380 10 to 190 Max acceleration/deceleration [mm/s2] 3000

ITV2-OM00118_(PR-E)

ITV2-OM00118-A P R O D U C T N A M E E/P Regulator (PROFIBUS DP type) MODEL/ Series/ Product Number ITV1000/2000/3000/2090-PR* Series Install and operate the product only after reading the Operation Manual carefully and understanding its contents. Specifically, read the safety instructions carefully. Keep this operation manual available whenever necessary.

Digital Pressure Switch

connector / Part numbers Part number Lead wire with connector V100-49-1-1 Cable length: 300 mm (with connector at one end) V100-49-1-2 Cable length: 500 mm (with connector at one end) V100-49-1-3 Cable length: 1000 mm (with connector at one end) V100-49-1-4 Cable length: 2000 mm (with connector at one end) V100-49-1-7 Cable length: 5000 mm (with connector at one end) PCA-1557772 Cable length: 3000

ITV2-OM0095

ITV2-OM00095-C P R O D U C T N A M E E/P Regulator (DeviceNetTM type) MODEL/ Series/ Product Number ITV1000/2000/3000/2090-DE* Series Install and operate the product only after reading the Operation Manual carefully and understanding its contents. Specifically, read the safety instructions carefully. Keep this operation manual available whenever necessary.

RS-232C-E

ITV2-OM00116 P R O D U C T N A M E E/P Regulator (For RS-232C) MODEL/ Series/ Product Number ITV1000/2000/3000/2090-RC* Series Install and operate the product only after reading the Operation Manual carefully and understanding its contents. Specifically, read the safety instructions carefully. Keep this operation manual available whenever necessary.

ITV2-OM00114

ITV2-OM00114-B P R O D U C T N A M E E/P Regulator (CC-Link type) MODEL/ Series/ Product Number ITV1000/2000/3000/2090-CC* Series Install and operate the product only after reading the Operation Manual carefully and understanding its contents. Specifically, read the safety instructions carefully. Keep this operation manual available whenever necessary.

High Vacuum L Type Valve

FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 for 0.5MPa Note 3) Main pumping 46 200 360 660 1350 3000

HRX-OM-K003

HRW030-H HRW002-H1 HRW008-H1 HRW015-H1 HRW030-H1 HRW002-H2 HRW008-H2 HRW015-H2 HRW030-H2 HRW002-HS HRW008-HS HRW015-HS HRW030-HS HRW002-H1S HRW008-H1S HRW015-H1S HRW030-H1S HRW002-H2S HRW008-H2S HRW015-H2S HRW030-H2S 4h 2h 1h 30min 20min 14min 10min 6min 4min 2min 1min MAX 30s 20s Operating Time 10s 5s 2s MIN 1s 0.5s 0.2s 0.1s 0.05s 0.02s 0.01s 100 135 200 300 400 500 600 700 1000 1500 2000 3000

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM00201 (7) Connector assembly ZK2 LV W K A Valve type: J Valve type: K, R Applicable valve type Lead wire length Nil 300 mm Valve type K, R 6 600 mm W (With supply valve and release valve) 10 1000 mm 20 2000 mm S Valve type J (Supply valve only) 30 3000 mm (8) One-touch fitting assembly (Purchasing order is available in units of 10 pieces.)

IZx-OMR0035

L IZS41-CP 3000 +60 0 +100 0 IZS41-CPZ 9850 AC adapter Shield wire IZF21-CG1 (with AC cord) IZF21-CG2 (without AC cord) Inlet IEC60320-C6 33 Doc. No.: IZ-OMR0035 7.

CYBx-OM0001H

Long stroke The stroke between 2001 and 3000 is required. Low speed The speed between 7 and 50mm/s is required. Intermediate stop accuracy higher than one obtained by pneumatic circuit is required. Air hydraulic With air supply port in axial direction The position of air supply port needs to be changed in axial direction. Operation at speed higher than standard spec. is required.

Series CE1

flange A Bore (mm) LA LB LD LE LH LL LS LX LY LZ FD FL FV FX FZ A CD CL CU CW CX CZ RR 12 106.5 4.5 8 4.5 29.5 17 2 85 34 52 44 4.5 5.5 25 45 55 114 5 108 7 14 5 10 6 99.5 20 121 5.8 9.2 6.6 42 24 3.2 96.4 48 66.5 62 6.6 8 39 48 60 133 8 124 12 18 8 16 9 114 4.4-11 Series CE1 Dimensions 32, 40, 50, 63 Both ends tapped CE1B Bore size Stroke 4-N through 8-O thread depth 20 20 2.5 91 500 or 3000

CLK1

Reed switch Choke coil 5 32 22 5 13.6 500 (3000) [5000] 2 x 2-6 Resistor Depth of counter bore 2.4 2-3.4 through LED Zener diode D-P70 4 20 Blue () [Black] Brown (+) [White] D-P75 Reed switch Lead wire: Oil and fire resistant 0.75mm x 2 Effective operating range 3mm Case: PBT resin Fire resistant (UL94-V0) Resistor Operating range (Refer to the table below.) l 16 Most sensitive position LED

ITV0000

SUP, VAC port (4, 5/32") OUTx 3 2 5 EXH, ATM port (4, 5/32") 38 2-M3 x 0.5 thread depth 3.5 Bracket mounting hole L bracket (optional) Flat bracket (optional) 6-3.5 19 74 2-3.5 19 27 19 64 28 Minimum bending radius 80 Body +50 0 3000 15 35 (30.9) 8.7 4 9.9 Cable connector (4-wire) Straight type (optional) 7 14 Body Cable connector (4-wire) Right angle type (optional) 8.3 4.3 10.2 Minimum

MGG

Ball bushing/MGGLStroke 3000 P = 0.5MPa 2000 MGGL100MGGL801000 MGGL63Allowable eccentric load W (N) MGGL50500 MGGL40MGGL32100 MGGL25MGGL2050 10 0 50 100 150 200 Eccentric distance from center of cylinder to load center of gravity l (mm) (Set the maximum allowable load so that it does not exceed the following percentages of the theoretical output: 40% for 20, 50% for 25, and 60% for 32, 40

3 Port Solenoid Valve Series VQ100 1

AXT661-12A Nil 300 mm 600 mm 1000 mm 2000 mm 3000 mm 6 10 20 30 Plug connector lead wire length Passage Indicator light Single Latching type A-C ON (Set) Indicator light Passage The lead wire length of the valve with lead wire is 300 mm.