High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

q q PA PA PA e e e A B A B A B A B A B t y r w u t y With reducer With flow rate adjustment With bypass i PB PA i A B A B Description Material Parts list No.

Slider Type Ball Screw Drive/11-LEFS Series

q Check the actuator label for model number. This matches the controller/driver. w Check Parallel I/O configuration matches (NPN or PNP). q w * Refer to the Operation Manual for using the products.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !1 Meter-in type Meter-in type M5 type U10/32 type M5 type U10/32 type 15-9-94 4 Tamper Proof Speed Controller With One-touch Fitting, Elbow Type/Universal Type Construction Elbow type Meter-out type Universal type Meter-out type AS3201F-02 AS3301F-02 i w o !6 !

Stroke Reading Cylinder and Counter

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

Cylinder

Description MBt~~ial Q., Flange busb Resin Trul'lnionlpin Stainless ... . Mate

Possible to transfer a workpiece at low-speed.

5 q r q w r y !5 !6 i CRQ2X MSQX CRQ2X MSQX MRQ Component Parts Component Parts Description Material No. Description Material No.

Process Valve

Note 3) Vacuum pilot type CE-compliant pilot solenoid valves will become VO307VD DZ-Q. 2 1 1 2 569 A VNB Series How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 and vacuum pilot type VO307 Q 1 5 D SF4 5 D 23 Q Body option CE-compliant CE-compliant Coil rated voltage CE-compliant Nil Q Standard Vacuum pilot Nil V CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200

Vacuum Pad

q Pad unit Dimensions Part no.

Vacuum Pad

adsorption (sec) QL: Leakage volume during workpiece adsorption L/min (ANR) Note 1) Q = + QL T1 T2 = 3 x T1 Max. suction flow rate Qmax = (2 to 3) x Q L/min (ANR) Ejector Select the ejector with the greater maximum suction flow rate from the Qmax indicated above.

CRQ2

8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

RB/RBL/RBQ

RS Q G Basic type: RBL1411, RBL1412, RBL2015, RBL2725 With cap: RBLC1411, RBLC1412 RBLC2015, RBLC2725 RS H A Other dimensions are the same as the basic type.

ARM10/11

1 u q SMC o A Component Parts Replacement Parts Part no. No. Material No. Material Description Description q w e r t y u i o !0 !

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

2 q u r !0 !1 e !4 !3 w !0 !

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

MTS Air pressure supplied from A operates on both surfaces q and w. (Extension) MY q w A B Piping is concentrated in the head cover. CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Air pressure supplied from B operates on surfaces e.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

8 q y !0 !4 !9 r !1 @0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @2 @5 o @4 @3 !2 Component Parts No. Description Spring pin Seal ring Bearing Inner wiper No.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

(Light ON) One auto switch One position, any of q, w Detection combinations and e can be detected. Two auto switches Two positions of A Pattern B q, w and e can C be detected. Step 1) Fully close the fingers. Step 1) Position fingers for gripping a workpiece. Step 1) Fully open the fingers.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

0.5 depth 3 +0.030 0 0.05 D B 9.5 1 3.5 20 14 13 18 C 6 +0.030 0 depth 2.5 2.5 Width across flats 6 E 5 6 5 Prepared hole diameter 3.3 2-M4 x 0.7 Piping port 2-M3 x 0.5 (Plug: M-3P) F 6 QL 13.5 17 0.05 Stroke: S M 2 M4 x 0.7 Mounting base side B D 7 5 2-M3 x 0.5 Piping port Y J 3 M3 x 0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 depth 2 2.5 3.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q

0.01

ID Construction IDG SFD101-02 SFD102-02 IDK w q r t e q r e w AMG AFF AM AMD AMH Component Parts Component Parts No. Description Note Material Aluminum alloy No.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Description q Notes No.

ASR

7 w w q @0 e q @0 e !4 i y !0 !1 !2 !4 i !5 !6 ASR530F-02 type ASR630F-03 type ASR530F-02 type ASR630F-03 type !8 u o !3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !