FQ1

Description Part number Dimensions (mm) Replacement parts: Seals Material JIS B2401-1A-P85 NBR I.D. 84.6 x 5.7 O-ring JIS B2401-4D-P85 FPM JIS B2401-1A-P11 NBR I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc

Direct Solenoid

$l (1r0) 1.38 (35) o.67 (n o.71 (r8) 't.34 (34) 1.18 (30) Mlmoters in Parenthoss 20 DIRECTIONAL AIR VALVES SUBPLATES SERIES NVS4et24,4oB4 NVS IO24 SUBPLATES Gonaral; Sub.plates are heaw duty aluminum dle castings.

Vacuum Module Series ZX

ZX1-R1 R2 R3 R4 R5 R6 R7 R8 Symbol Part no. ZX1-R 9 R10 R11 R12 R13 R14 R15 R16 PS PS PS PS PV PV PV PV PV PV PV PV R1 R2 R3 R4 R5 R6 R7 R8 R 9 R10 R11 R12 R13 R14 R15 R16 PE PE Caution when ordering manifold PD PD PD PD PE PE The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted.

Rotary Actuator/Vane Style Series CRB1

U V W X Y Z CRB1BW 5026 18 14 M6 x 1 depth 9 0 0.043 0.006 0.017 0 0.052 R6 1/8 67 70 3 10 13 5 50 60 34 66 46 5.5 6.5 78 19.5 39.5 13.5 11 11.9 12 25 CRB1BW 50-E CRB1BW 6321 18 29 22 15 M8 x 1.25 depth 10 0.006 0.017 0 0.043 0 0.052 DR7.5 1/8 82 80 3 12 14 5 60 75 39 83 52 8 9 98 21 45 17 14 14.9 15 28 CRB1BW 63-E CRB1BW 8027 25 30 30 20 M8 x 1.25 depth 12 0 0.043 0 0.052 0.006 0.017 R8

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Series LEKFS25, 32, 40 How to Order w y e r t u i q LEKFS 32 E A 300 R1 CD17T q Size w Motor mounting position e Motor type r Lead [mm] 25 32 40 Nil In-line R Right side parallel L Left side parallel Symbol LEKFS25 LEKFS32 LEKFS40 H 20 24 30 A 12 16 20 B 6 8 10 E Battery-less absolute (Step motor 24 VDC) y Motor option t Stroke*1 u Actuator cable type/length Robotic cable [m] Nil None R8

pneuaire

.83 (211 0.89 4 a E 1.0t (271 ).33 8.5) 0.29 (7.5) ).71 t 18 ) 0.53 13.5 Millimeters in Parentheses NVit430-N01-02 NVil430-N01-01 F O F 2 6s lbs. (1.2 kg ) P T 0.157 in (4mm) or, 0 177 in (4 5mm) T T 0 334 in, (8 Smm) F O F 2 4 3 l b s ( 1 1 k g ) P.T, 0 157 in (4mm) O T O 197 in (Smm) T T 0 334 in (9mm) A B c D E F G 4.02 1102\ 2.42 :61.5) 1.93 (49) 2.48 (63) 1.42 (36) 0.96 t24.5\ 0.31 r8

Battery-less

1 Actuator cable type/length Robotic cable [m] Nil None R8 8*7 R1 1.5 RA 10*7 R3 3 RB 15*7 R5 5 RC 20*7 Nil Housing B bottom*6 Housing B bottom K Body bottom 2 locations Body bottom For details on auto switches, refer to the Web Catalog. 21 Battery-less Absolute Encoder Type Slider Type/Ball Screw Drive LEFS Series Battery-less Absolute (Step Motor 24 VDC) !

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

LQ3T2A-R1 LQ3T2A-R5 LQ3T3A-R1 LQ3T3A-R2 LQ3T3A-R5 LQ3T3A-R7 LQ3T3A-R9 LQ3T4A-R1 LQ3T4A-R2 LQ3T4A-R5 LQ3T4A-R6 LQ3T4A-R7 LQ3T4A-R8 LQ3T4A-R9 LQ3T5A-R1 LQ3T5A-R2 LQ3T5A-R3 LQ3T5A-R5 LQ3T5A-R6 LQ3T5A-R7 LQ3T5A-R9 LQ3T5A-R10 LQ3T5A-R11 LQ3T5A-R12 LQ3T6A-R1 LQ3T6A-R2 LQ3T6A-R3 LQ3T6A-R4 LQ3T6A-R5 LQ3T6A-R6 LQ3T6A-R7 LQ3T6A-R9 LQ3T6A-R10 LQ3T6A-R12 LQ3T6A-R13 LQ3T6A-R14 Applicable tubing O.D. 1

HRL

Cable and Earth Leakage Breaker (Recommended) Recommended crimped terminal Cable specifications Earth leakage breaker Breaker size [A] Sensitivity current [mA] Terminal block screw diameter Model Power supply voltage specifications HRL100-Am-20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) M5 R5.5-5 4 cores x 5.5 mm2 (4 cores x AWG 10) including grounding cable 30 30 HRL200-Am-20 R8

IIIIIII

.83 (211 0.89 4 a E 1.0t (271 ).33 8.5) 0.29 (7.5) ).71 t 18 ) 0.53 13.5 Millimeters in Parentheses NVit430-N01-02 NVil430-N01-01 F O F 2 6s lbs. (1.2 kg ) P T 0.157 in (4mm) or, 0 177 in (4 5mm) T T 0 334 in, (8 Smm) F O F 2 4 3 l b s ( 1 1 k g ) P.T, 0 157 in (4mm) O T O 197 in (Smm) T T 0 334 in (9mm) A B c D E F G 4.02 1102\ 2.42 :61.5) 1.93 (49) 2.48 (63) 1.42 (36) 0.96 t24.5\ 0.31 r8

HRS100/150

Cable size Crimped terminal on the rated current thermo-chiller side HRS100-Al-20-l HRS100-Wl-20-l 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 4 cores x 5.5 mm2 (4 cores x AWG10) (Including grounding cable R5.5-5) R5.5-5 30 A M5 HRS150-Al-20-l HRS150-Wl-20-l 40 A 4 cores x 8 mm2 (4 cores x AWG8) (Including grounding cable R8-5) R8-5 A HRS100-Al-40-l HRS100-Wl-40-l 3-phase 380 to

Thermo-chiller

Cable size Crimped terminal on the thermo-chiller side Applicable model HRS100-A -20HRS100-W -204 cores x 5.5 mm2 (4 cores x AWG10) (Including grounding cable R5.5-5) R5.5-5 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 30 A M5 HRS150-A -20HRS150-W -2040 A 4 cores x 8 mm2 (4 cores x AWG8) (Including grounding cable R8-5) R8-5 A HRS100-A -40HRS100-W -403-phase 380 to 415 VAC (50/60

energy saving effect

cable examples Crimped terminal on the thermo-chiller side Terminal block thread size Power supply Applicable breaker rated current Applicable model Cable size 4 cores x 5.5 mm2 (4 cores x AWG10) (Including grounding cable) R5.5-5 HRSH100--20 HRSH150--20 30 A 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) HRSH200--20 40 A 4 cores x 8 mm2 (4 cores x AWG8) (Including grounding cable) R8

CRBB-OM00004

(Approx. 2V for each switch) (4) A contact protection circuit is not installed in D-R7, D-R8 and D-9 switches. If inductive load is connected, the lead wire is 5m or longer, or the current is AC100V, use the contact protection box shown on the bottom.

Compact Cylinder

If this is unavoidable due to the application, keep the bending radius of the lead wire R8 mm at least. How to Use Plug Connector Caution 1.

VS 8-2/VS 8-4

Size 18 mm VV802-SE Size 26 mm VV801-SE 24 Series VS 8-2/VS 8-4 S R S R Manifold Options Interface regulator (P, A, B port regulation) Specifications VVS8040-ARB--1 Interface regulator model A B P A, B Regulating port VSS R8-4 Applicable solenoid valve 1.0 Max. operating pressure (MPa) 0.05 to 0.85 Set pressure range (MPa) Air Fluid 5 to 60 Ambient and fluid temperature (C) M5 x 0.8 Pressure

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

30 C R1 C5H73 Size Motor type Motor mounting position Bearing type 25 32 40 Symbol Motor Compatible Nil Top mounting M Sliding bearing controller D In-line JXC5H JXC6H JXC9H JXCPH JXCEH High performance G Battery-less absolute Step motor 24 VDC Lead [mm] Actuator cable type/length [m] Symbol LEG25 LEG32/40 Robotic cable[mm] 6 8 Nil None R1 1.5 Stroke [mm] R3 3 30 30 50 50 R5 5 100 100 R8

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

JXC61 D4 Lower side R Right side parallel (4)Lead [mm] L Left side parallel Size *For size 8 8 16 25 10 12 16 (2)Motor mouting position 5 6 8 In-line D C 2.5 Right side parallel R Left side parallel L *For size 16/25 (5)Storke [mm] (7)Actuator cable type/length Robotic cable [m] (8)Controller Size #Please refer to the catalog for the controller part. 8 16 25 Without cable Nil R1 R3 R5 R8

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

How to Order L E K F S 32 E A 300 R1 CD17T Motor type Size Motor mounting position Lead[mm] 16 25 32 40 Nil In-line Size E Battery-less Absolute Symbol R Right side parallel 16 25 32 40 (Step Motor 24VDC) L Left side parallel H 20 24 30 A 10 12 16 20 Motor option B 5 6 8 10 Stroke Actuator cable type/length Nil Without option 50 50 B With lock to to Robotic cable [m] 1200 1200 Nil None R8

Rotary Table: High Precision Type

handed range D-90 90 Relay 5, 12, 24 V AC/DC 50mA D-90A 90A PLC 5, 12, 24 V AC/DC 50mA IC circuit 100V AC/DC 20mA D-9 D-97 97 5, 12, 24 V AC/DC 50mA Relay D-93A 93A 24 VDC 5 to 40mA PLC 100 VAC 5 to 20mA D-R731 D-R732 R73 Relay 24 VDC 5 to 40mA PLC 100 VAC 5 to 20mA D-R73 D-R731C D-R732C R73C Relay 24 VDC 5 to 40 mA PLC Relay 24 V AC/DC or less 50mA D-R801 D-R802 R80 PLC 48V AC/DC 40mA D-R8