110, 220VAC, Protection structure: dust proof (protection class 0 based on JIS C0920), Ambient and fluid temperature: -10 to 50C, VALVE SOL/PILOT 110VAC *LQA, VALVE, VZS2000 SOL VALVE 4/5 PORT, 2G, VZS2000, .35273 lb, Type of actuationModelPort size RcFlow characteristics(1)Max. operatingcycle (CPM)(2)Responsetime (ms)(3)Weight(kg) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2

Protection structure: dust proof (protection class 0 based on JIS C0920), Ambient and fluid temperature: 14 to 122 F, VALVE DBL NON-PLUG-IN BAS *LQA, VALVE, VZS2000 SOL VALVE 4/5 PORT, NE, VZS2000 BASE MT 1/8, .41800 lb, Type of actuationModelPort size RcFlow characteristics(1)Max. operatingcycle (CPM)(2)Responsetime (ms)(3)Weight(kg) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2

110, 220VAC, Protection structure: dust proof (protection class 0 based on JIS C0920), Ambient and fluid temperature: 14 to 122 F, VALVE SGL PLUG-IN BASE MN *LQA, VALVE, VZS2000 SOL VALVE 4/5 PORT, 2D, VZS2000, .30800 lb, Type of actuationModelPort size RcFlow characteristics(1)Max. operatingcycle (CPM)(2)Responsetime (ms)(3)Weight(kg) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2

48, 110, 220VAC, Protection structure: dust proof (protection class 0 based on JIS C0920), Ambient and fluid temperature: 14 to 122 F, VALVE SOL/PILOT 24VDC *LQA, VALVE, VZS3000 SOL VALVE 4/5 PORT, 2D, VZS3000, .23100 lb, Type of actuationModelPort size RcFlow characteristics(1)Max. operatingcycle (CPM)(2)Responsetime (ms)(3)Weight(kg) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2

110, 220VAC, Protection structure: dust proof (protection class 0 based on JIS C0920), Ambient and fluid temperature: -10 to 50C, VALVE, SOL/PILOT 24VAC *LQA, VALVE, VZS2000 SOL VALVE 4/5 PORT, 2I, VZS2000, .44000 lb, Type of actuationModelPort size RcFlow characteristics(1)Max. operatingcycle (CPM)(2)Responsetime (ms)(3)Weight(kg) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2

, Protection structure: dust proof (protection class 0 based on JIS C0920), Ambient and fluid temperature: -10 to 50C, VALVE SGL PLUG-IN BASE MN *LQA, VALVE, VZS2000 SOL VALVE 4/5 PORT, ND, VZS2000 BASE MT 1/8, .35200 lb, Type of actuationModelPort size RcFlow characteristics(1)Max. operatingcycle (CPM)(2)Responsetime (ms)(3)Weight(kg) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2

48, 110, 220VAC, Protection structure: dust proof (protection class 0 based on JIS C0920), Ambient and fluid temperature: 14 to 122 F, VALVE, SOL/PILOT 24VDC *LQA, VALVE, VZS2000 SOL VALVE 4/5 PORT, 2E, VZS2000, .30800 lb, Type of actuationModelPort size RcFlow characteristics(1)Max. operatingcycle (CPM)(2)Responsetime (ms)(3)Weight(kg) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2

Piping module series KB has made distribution easy utilizing one-touch fittings. A locking system makes the use of tools unnecessary for installation of one- touch fittings and makes piping more efficient. Universal construction allows for changes in air output direction after connections are completed.Piping module series, Material: nylon, soft nylon, polyurethane, Tube O.D: 4, 6, 8, 10

Piping module series KB has made distribution easy utilizing one-touch fittings. A locking system makes the use of tools unnecessary for installation of one- touch fittings and makes piping more efficient. Universal construction allows for changes in air output direction after connections are completed.Piping module series, Material: nylon, soft nylon, polyurethane, Tube O.D: 4, 6, 8, 10

Piping module series KB has made distribution easy utilizing one-touch fittings. A locking system makes the use of tools unnecessary for installation of one- touch fittings and makes piping more efficient. Universal construction allows for changes in air output direction after connections are completed.Piping module series, Material: nylon, soft nylon, polyurethane, Tube O.D: 4, 6, 8, 10

Piping module series KB has made distribution easy utilizing one-touch fittings. A locking system makes the use of tools unnecessary for installation of one- touch fittings and makes piping more efficient. Universal construction allows for changes in air output direction after connections are completed.Piping module series, Material: nylon, soft nylon, polyurethane, Tube O.D: 4, 6, 8, 10

5 Port Solenoid Valve Series VQZ1000/2000/3000

closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) (B) 2 4 (A) (B) 2 4 (A) (B) 2 4 (A) (B) 2 4 (A) (B) 2 4 (A) (B) 2 4 (R2) (P) (R1) 5 3 1 (R2) (P) (R1) 5 3 1 (R2) (P) (R1) 5 3 1 (R2) (P) (R1) 5 3 1 (R2) (P) (R1) 5 3 1 (R2) (P) (R1) 5 3 1 Note) Except metal seal type of the VQZ1000.

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) 1 (P) 5 (R1) 3 (R2) e q w q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 VQ5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5301 VQ5401 (A) 4 (B) 2 (A) 4 (B) 2 VQ5300 VQ5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5500 (A) 4 (B) 2 VQ5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note No. 1 2 3

Exhaust Cleaner for Vacuum Pump AMV Series

R2 80 (3B) JIS 10K FF flange 100 (4B) JIS 10K FF flange 789

5 Port Solenoid Valve Series SQ1000/2000

Exhaust center: SQ A31 Pressure center: SQ B31 5 (R1) 3 (R2) 1 (P) For applications which demand high speed, high frequency, long life and a precise response time. 1 2 (A) 4 (B) 2 1 2 1 2 SQ B31 N.O. valve N.O. valve 5 (R1) 3 (R2) A side B side 1 (P) A (A) 4 (B) 2 1 2 B SQ C31 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R P

IDX-OM-U022

[IDFA125F-38/40] () (10 2m) (100.7m) 20 4x R2 1/2 R2 1/2 1130 78 9351 267 1120 655 75 64 (17 ) 40 1276 1375 R ) (14~18) () P.1-5 P.1-5 P.1-5 7122 20 350 700 752 IDFA100F150F 6 4 6.3 IDX-OM-U022 6.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

temperature: -10 to 50C, VALVE, SGL, PLUG-IN, VALVE, SQ2000 VALVE, SOL 4-WAY, UD, SQ2000 BUILT IN FITTING .00000 lb SeriesType of actuationSealModelFlow characteristic (1)Response time (ms) (2)Weight (g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2

temperature: -10 to 50C, VALVE, SGL, PLUG-IN, VALVE, SQ2000 VALVE, SOL 4-WAY, UD, SQ2000 BUILT IN FITTING .00000 lb SeriesType of actuationSealModelFlow characteristic (1)Response time (ms) (2)Weight (g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2