Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

PSxx-OMG0001CN

DCDCPSE32(T) PSE33(T) NPN 2 PNP 2 Max.80 mA 1 V Max.30 V80 mA 1 V 15 V 1 k DC+ DC+ OUT1 OUT1 OUT2 OUT2 DCDCPSE34(T) PSE35(T) PNP 2 PNP 2 Max.80 mA 1 V Max.80 mA 1 V 420 mA 300 (DC12 V) 600 (DC24 V) 50 DC+ DC+ OUT1 OUT1 OUT2 OUT2 DCDC-15No.PS-OMG0001CN-H 1 M [S_J] [S_F] 2Sor 1 LCD ON ON OFF OFF [] 2(SorSoG) LCD OUT2 OUT1 [] 3 () 1MPa -101kPa 100kPa 500 kPa 100kPa

ZB-OM00301

No.ZB-OM00301 / ZB No.ZB-OM00301 2 9 12 13 15 16 16 V Assy 17 21 25 26 28 28 29 30 30 31 31 32 35 37 38 39 40 Assy 40 Assy 41 42 1 - No.ZB-OM00301 1) (ISO/IEC) (JIS) 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

Speed Controller with

Body size 100 200 205 300 400 Metric size Inch size M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 02 23 04 06 08 10 12 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)

Pneumatic Transfer System Series MF

Curved type Air supply unit Note 1) RS RT RG Lateral curve Inside curve Outside curve Qty. None 1 set 2 sets Description Symbol Nil AS AW Angle A unit (Air system 1) 45 90 180 45 90 180 Note 1) Air supply unit, 1 set breakdown: Supply block (slide table side) 1pc. Supply ring (plate side) 2pcs.

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

Fs(a) Fs(b) Allowable thrust load (N) Allowable radial load Fr (N) Size Fs(a) Fs(b) 05 1 25 20 20 30 25 25 Features 4 Series CRJ Inertial Moment Formulas I: Inertial moment kgm, m: Load mass kg 1. Thin shaft 6.

ITVH

Self-diagnosis: 5% F.S. or less Linearity 1% F.S. or less Hysteresis 1% F.S. or less Repeatability 1% F.S. or less Sensitivity 1% F.S. or less Temperature characteristics 0.12% F.S. or less/C Output pressure display Accuracy 2% F.S. or less 1 digit 2 Output pressure [MPa] This range is outside of the control (output). 0.2 MPa Minimum unit Note 4) MPa: 0.01, kgf/cm2: 0.1, bar: 0.1, psi: 1

LMU100/200 Series Mist Spray Unit

gauge 10 G46-10-01 1 Pressure gauge 11 G46-4-01-L 1 Pilot valve 12 81022P 1 O-ring 13 NBR KA00078 1 O-ring 14 FKM KA00099 2 Regulator 15 INA-13-717 1 VO307KG1-X328 1 2 5 1 2 5 VO315-00 G Solenoid valve 16 1 Solenoid valve 17 1 O-ring 18 NBR 4 KA00087 1065 A LMU100/200 Series Related Products Mixing Valve: LMV Series Specifications Inlet air pressure Ambient and fluid temperature 0.3 MPa

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body ported 80 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 130 (Without subplate 80) N.C. Base mounted (with sub-plate) SYJA724-01 SYJA724-02 N.O.

ZQ

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP

NVEPA|VEFseies

NVEP NVEF 3 1 r T 1 0 3 4 0 T I tffi IFTC I B"dt nowj I Rate rype I I Ports Port Size Code Max. Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

Compact Electric Actuator Series LG1

4-M6 x 1 thread depth 10 67 4-M8 x 1.25 thread depth 10 20 0.02 8H10 depth 10 Encoder signal line Motor power line 8H10 depth 8 85 210 A (Table movement range) 78.5 (78.5) 107 10 95 Work mounting reference plane 55 Body mounting reference plane 52.5 1 D 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 95 95 8(4)-6.2 C 100 () () (170) 95 95 B 110 20 (150) () () Dimensions A 329 429 529

Compact Vacuum Ejector Series ZQ

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE

Suction cups with flange

Note that M applies only to cup form: JT2. 16 16 Thin flat 20 20 Multistage bellows SF Silicone rubber (Blue) *1 25 25 T2 2.5-stage bellows *1 The silicone material is compliant with the FDA(U.S. Food and Drug Administration) regulation 21CFR177 B25 25 T5 5.5-stage bellows B30 30 32 32 1 Suction Cup Part Numbers and Weight See the table below for the suction cup part combination.

CXT

9 23 55 53 28 M8 X 1.25 10 86 6.9 9.5 16 MM (N) M (NA) NN PA* PB PW Q QW RB RW S T U W X Y Z Bore size (mm) 12 M4 X 0.7 M8 X 1.0 6 8 27 30 60 80 85 26 RB0806 17.5 96 13 1 77 22 7.5 5 16 M5 X 0.8 M8 X 1.0 8 8 27 45 70 95 90 40 RB0806 15 103 13 2 92 22 7.5 5 20 M6 X 1 M10 X 1.0 10 10 29 60 100 120 105 46 RB1007 26 122 17 2 117 29.5 9 5.5 25 M6 X 1 M14 X 1.5 10 12 50 60 100 130 105 50 RB1411

Electro-Pneumatic Valve NVEP/NVEF Series

NVEP NVEF 3 1 r T 1 0 3 4 0 T I tffi IFTC I B"dt nowj I Rate rype I I Ports Port Size Code Max. Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

VXD21/22/23

LQ Hexagon width across flats Bracket 2-Rc , , 4 1 8 3 2 1 LVN TI/ TIL Conduit terminal: T PA PAX PB Bracket 2-Rc , , 4 1 8 3 2 1 : Port size Rc 1/2 17-3-39 8 The VX series will be revised shortly.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

OUT reversal -T Element service indicator Accessories B 02 03 1 4 3 8 04 1 2 1 1 2 20 2B B B B Options AMD800 to AMD1000 (Self-standing style) AMD801/901 (Piping support style) 20 00 AMD 8 20 01 AMD 8 Port size Port size Body size Body size 8 20 2BFlange 30 3BFlange 20 2BFlange 30 3BFlange 8 9 9 10 40 4BFlange 40 4BFlange 60 6BFlange Style Style 00 With manual drain cock With manual drain

ZSE1/ISE1

V, 80 mA 1 V or less (With load current of 80 mA) Model Output type Residual voltage Number of outputs PNP open collector 80 mA PF2 IF 1 1 2 1 to 10% of set prss.