Air Slide Table Series MXS Recommended pneumatic circuit t (mm) Mounting pitch: t Model MXS6 MXS8 MXS12 MXS16 MXS20 MXS25 5 10 10 10 15 15 Air slide table W Vertical use 2. Be sure to use meter-out speed control valves. If it is used in meter-in speed control or without a speed controller, it may result in malfunction. 3. When releasing the end lock manually, be sure that air pressure is released.
Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31
Visible Visible Air suction side Filter Filter holder LED Indicators PWR Power supply indicator ION/HV Static neutralization operation/ Incorrect high voltage indicator ALM Error indicator NDL Maintenance indicator 4 Fan Type Ionizer IZF Series Models and Functions New New IZF21 IZF31 IZF10 IZF10R P.11 P.11 P.21 P.21 Size (Depth x Width x Height) (mm) 40 x 104 x 155 40 x 144 x 195 39 x 80
Depending on the piping volume (piping length and diameter), if the pressure just before the supply (P) port falls below 0.5MPa, the performance such as vacuum pressure may reduce. Raise the upstream pressure,and the pressure just The pressure just before the supply (P) port is low. before the supply (P) port becomes 0.5MPa.
DIN (D) L (L) M (M) DC +DIN +-1 2 (G) A C S DIN DIN DIN DIN DIN D 68mm Y 4.57mm T 68mm E 2.32.8mm E, T 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S D,Y R Y Z EZTZDZLZMZ AC24V (+) D C S VF1000 VF1000 VF1000 VF1000 VF3000 VF3000 VF3000 VF3000 VF5000 VF5000 VF5000 VF5000 () P P(SUP) P A B A(CYL2) B(CYL1) A B EA EB R1(EXH2) R2(EXH1) R1 R2 (B)2 4(A) (B)2 4(A) (R2)3 1 5(R1) (P) (R2)3 1 5(R1
P EA EB 3 position pressure center A B 5 EB P EA 3 position double check A B 6 EB P EA For the solenoid valve specifications and dimensions, please refer to VQC catalog (ES11-80). Please refer to page 13 for Series EX250 single SI unit dimensions. For details of the Series EX250 SI unit, please refer to the technical instruction manual.
(Refer to page 338.) 348 Compact Guide Cylinder Series MGQ Bore Size 32 to 100: MGQM, MGQL 4 x YY depth YL X W + Stroke Z 4 x MM depth ML 4 x NN through 2 x P DB DA R H V T PW GB GA 2 L F C + Stroke G TB TA S Q K J B + Stroke E MGJ A + Stroke MGP MGQM, MGQL Common Dimensions (mm) P PW Bore size (mm) 32 40 50 63 80 100 Standard stroke (mm) B MGQ C DA F G GA GB H J K L MM ML NN Q R S TN TF
Hs T (mm) Symbol BX BY D F GA GB L M N S T W Wc Ws Z ZZ Hs IA K Bore size 40 56 54 16 44 77 10 55 M12 x 1.5 86 112.5 57 5 39 27.5 114 228 46 47 14 50 64 64 20 55 78.5 10 58 M16 x 1.5 87.5 117 60 7 41 33 118.5 232.5 50 58 17 63 74 74 20 69 82 12 58 M16 x 1.5 91 120.5 67 5.5 48 39 122 236 56 72 17 12 Series CLK1 Clamp Cylinder with Lock Accessory Dimensions (mm) Single Knuckle Joint Double
4 t w e !5 Rod end male thread CHQB32 to CHQB100 r o !0 y q !2 !1 !4 u t !3 e w !5 Rod end male thread Description Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.
(O.D.10, Length approx. 2m) Inside diameter 25 Compressed Air outlet (The opposite side (For Option K: 16K) 4xEye bolt condensed water JIS flange 80A 10K Drain tube for Drain tube Drain tube 268 t 217 20 18 t A A 8x23 8x19 20 Flange bolt hole Drawing of view A 75 4x 1056 720 9351 1290 160 150 t Other than Option K Option K Model (For Option K: 16K) Compressed Air inlet JIS flange 80A 10K
P D KG M KFG2 A L 8 4.2 MS D KKA H Connection threads KP KP Straight Union: KPQH, KPGH LQ Effective area mm2 D Model L Applicable tubing O.D. mm Note 1) 2 x Applicable tubing Weight g M MQR TPH TPS 4 KPQH04-00 KPGH04-00 10.4 35.4 17 4 4 4 D D T 6 KPQH06-00 KPGH06-00 12.8 18.5 10 10 6 37.6 M M L 8 KPQH08-00 KPGH08-00 15.2 26 18 10 42.4 20.5 IDK 10 KPQH10-00 KPGH10-00 18.5 29 15 46.6 23 41
Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89
.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--
Bodv PST Seat NSR 0 Lead wire Vinvtchloride (V,nvl sheath) Pressure sensor SUS630 G Fittings SUS304 2 Digital Pressure Switch Series ZSE6/ISE6 URJ'/4 Scale:75% (mm) Dimensions 30 (Union Ring JOint) 39 LCD W.lh back hght o -A '" '" ~ 00 '" []I-: 1DOWN button UP bulton [ ,~ LED (red) LED (green) I SET bunoo [, t::t::;I UAJ~ L 12.3 Sensor Depth 6.5 kj--t==:;A/ Welded section 2-flf2.7 20
1 5 Port Air Operated Valve Series VFA3000 How to Order SA Thread type (Including pilot port) VA Nil F N T Rc G NPT NPTF SA Port size (P, A, B port) VA 01 02 1 8 1 4 Option R1, R2 port are 1/8.
T VMG Female connector Plug P. 63 DHF P. 64 DP Use to pipe from male thread such as pressure gauge. Use to plug unused fittings. Male branch tee P. 64 DT Use to branch line from female thread in both 90 directions. Swivel elbow L Use to pipe at right angles to female thread. Swiveled at any direction. P. 64 Swivel extended elbow LL Use to pipe at right angles to female thread.
Depending on the piping volume (piping length and diameter), if the pressure just before the supply (P) port falls below 0.5MPa, the performance such as vacuum pressure may reduce. Raise the upstream pressure,and the pressure just The pressure just before the supply (P) port is low. before the supply (P) port becomes 0.5MPa.
T VMG Union tee Male run tee Use to branch line in the same direction from female thread and in 90 direction. P. 50 KFT KFY P. 51 Use to connect tubes in both 90 directions. Male branch tee Plug KFT P. 51 KFP P. 50 Use to branch line from female thread in both 90 directions. Use to plug unused fittings. Swivel elbow KFV Use to pipe at right angles to female thread.