M-E05-1-LQ1 Union Tee Reducing LQ1T-T-R p. 5-18 Union Tee LQ1T p. 5-6 Space Saving Type Union Elbow LQ1E-SN p. 5-19 Panel Mount Union LQ1P p. 5-7 Space Saving Type Union Tee LQ1T-SN p. 5-20 Union LQ1U p. 5-7 Space Saving Type Panel Mount Union LQ1P-SN p. 5-21 Union Flange LQ1F p. 5-8 Union Elbow Reducing LQ1E-R p. 5-8 Space Saving Type Union LQ1U-SN p. 5-22 Union Tee Reducing LQ1T-R p. 5-9 5-1 A Male
LVN Port P TI/ TIL Port P Port P PA Port A PAX Port A Port A PB Normally open (N. O.) Port P Port P Port P Model Manifold base model Individual port Rc VVXA211-stations Common port Rc Port A 1 8 1 4 3 8 1 8 1 4 VVXA212-stations VVXA221-stations VVXA222-stations Manifold Manifold Stations B mount 2 to 10 stations 17-3-97 The VX series will be revised shortly.
Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM
2-M6 x 1 thread depth 12 (Mounting hole) 34 45 24 27 30 8 2 +0.2 +0.1 17 26H9 +0.052 depth 3 0 30 40 21 4-M5 x 0.8 thread depth 6 M5 x 0.8 (Finger closing port) (Thread for mounting attachment) Auto Switch Mounting Groove Dimensions 30.3 45 20 O S 16 4.5 4.5 23 10 M5 x 0.8 (Finger operating port) 5 MHW2-25D1 Right angle finger type 6.45 5.5 37 18 12 6 15 16 4-M5 x 0.8 (Thread for mounting
Cam Style Series MHY2 MHY2-20D 2-M5 x 0.8 thread depth 8 (Mounting hole) Pin hole positioning 14 5 19 MHZ 42 4H9 + 0.030 depth 4 0 MHF 4-M4 x 0.7 MHL 8 4-M5 x 0.8, thread depth 10 (Thread for mounting attachment) 10 0.005 0.025 (Mounting hole) 5 9 MHR 25.5 2-M5 x 0.8 thread depth 10 (Mounting thread) 18 MHK (Mounting hole) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco
Same as page 3-3-9 Manifold Specifications Type 25 Type 25F Stacking type, non plug-in type Stacking type, plug-in type Common SUP and EXH 2 to 20 stations 2 to 20 stations Valve C6 (One-touch fitting for 6) Model Manifold type P(SUP), R(EXH) Valve stations 4(A), 2(B) port location 1(P), 3/5(R) port Port size 4(A), 2(B) port M5 x 0.8 Valve effective (1) 1 2: 0.48, 4 3: 0.85 VZ1120 area
4 Exhaust port 76 P Standard ZL212 40 V ZA 54 125 Label ZX 188 61 ZR P Port exhaust ZL212P ZM V ZMA Exhaust port (EXH.)
Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM
Alarm Sequence Setting range : On, Off Indicated content : Use of temp. upper/lower limit alarm U p p e r / L o w e r T e m p . A l a r m S e q u e n c e M O D E < O f f sequence(Ex. : Off) Function : Determines whether or not temp. upper/lower limit alarm is output when power is turned on.
Unit switching Real-time switch output ( ) ZSE ISE For Air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON PSE YES CFM x 102, CFM x 101 ft3 x 101 OFF P-1 P-2 High flow rate Z I SE3 CFM = ft3/min P Window comparator mode H: Hysteresis High Flow Rate Type (For Air) PS H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON Z I SE1 2 NO OFF P-1 P-
x 0.8 15 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc
ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25 13 25 8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10 x 1.25 13 30 8.5 102.5 160 34.5 44.5 32 20.5 38 32 For details on rod end nut and mounting nut, refer to page 10-5-24. 10-5-
9 Specifications p. 10 Flow Range p. 11 Analog Output p. 11 Pressure Loss p. 11 IN Side Straight Section and Accuracy p. 12 Internal Circuits and Wiring Examples p. 12 Construction: Parts in Contact with Fluid p. 13 Dimensions p. 13 3-Screen Display Digital Flow Monitor PFG300 Series How to Order p. 14 Specifications p. 15 Internal Circuits and Wiring Examples p. 16
Refer to p.3.8-14. Auto Switch Mounting Bracket Part No.
MXW Non-rotating accuracy M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 MXJ Symbol Specifications Piping port size NPT 1/8 NPT 1/8 XC8 Adjustable stroke cylinder/Adjustable extention type G 1/8 G 1/8 MXP XC38 Vacuum (Rod through-hole) Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.
Easy and simple wiring Connector type 16-6-7 2 Series ZSE2/ISE2 How to Order Operating pressure range/ Setting pressure range Piping specifications Single mounting R 1/8, M5 x 0.8 01 T1 Single mounting NPTF 1/8, M5 x 0.8 Nil L 0 to 1 MPa 0 to 100 kPa Note) M5 x 0.8 (female) thread.
x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except for lock unit: 0.12MPa for 12 and 16; 0.10MPa for 20 to 40 Piston Speed Order Made Order Made Specifications 8 50 to 500 0.02 12 16 20 25 32 40 50 to 800 Bore size (mm) Piston speed (mm/s) Allowable kinetic energy J Refer to page 20 for series MTS order made specifications. 0.19 0.32 0.55 0.78 1.6 2.8 End Lock Specifications
0.2 MHZ2-16D 7 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 14.9 20.9 6.6 12.6 11.6 2.1 4 MHZ2-20D 9 5 M5 x 0.8 M5 x 0.8 M5 x 0.8 16.3 26.3 7.2 17.2 14 2.1 4 MHZ2-25D 6 12 M5 x 0.8 M5 x 0.8 M5 x 0.8 19.3 33.3 8.8 22.8 19 3.5 4 Note) Through-hole mounting is not possible for 10. 925 Standard Type / Series MHZ2 Finger Option 1122Air Preparation Equipment Pressure Control Equipment Flow Control Equipment