Model: 51 (Bottom Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 4 Stations, P, E Port Location: D (D Side), A, B Port Size: 01 (1/8), Thread: T (NPTF)

Model: 50 (Side Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 12 Stations, P, E Port Location: B (Both Sides), A, B Port Size: 01 (1/8), Thread: T (NPTF)

Model: 50 (Side Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 10 Stations, P, E Port Location: B (Both Sides), A, B Port Size: 01 (1/8), Thread: T (NPTF)

Precision Regulator

Year Month T : 2015 o: January U : 2016 P: February V : 2017 Q: March W: 2018 R: April X : 2019 Z: December -7- 5. Precautions for handling Fluid Warning (1) The operating fluids must be compressed air.

PSxx-OME0003CN

MPa 0-101 kPa 0101 kPa -101101 kPa -0.10 MPa 10.10 kPa -10.10 kPa 1.5 MPa 500 kPa DC1224 V10%(p-p)10%() 15 mA () DC15 V() DC0.61 V() 1 k (25 ) 2%F.S.(),5%F.S.() 1%F.S. 1%F.S.

VFR2000-OMM0001

(N.O.)3 3 B 1.VFR200 2.VFR210 P8 0.9Nm -10No.VFR2000-OMM0001 ) ARBF2000 P 1.0MPa 1) 0.05to0.83MPa 2) -5to60oC ()3) M5X0.8 (kg) 0.16 PA 5.5 (mm2) P1=0.7MPa,P2=0.5MPa S PB 5.1 DIN DIN DIN DIN / / / / AEA 12 (mm2) DIN 180 P2=0.5MPa S BEB 11 )0.9MPa ) )50oC )2 ) P A B -11 No.VFR2000-OMM0001 01C 01T COM A (A B B AB ) COM AB+ BVFR2100 A COM VFR2200 A COM B 3 400 5 A COM

Manifold with Stainless Steel Plate: S, Model: 51S (EX260), SI Unit: QA (Positive Common, NPN; DeviceNet®; 32 Outputs; M12 Connector), Wiring Type: All Double Wiring, Valve Stations: 08 (8 Stations, All Double Wiring), Port Size: 01 [4(A)/2(B) Port: 1/8; 1(P)/3(EB), 5(EA) Port: 1/4], Thread Type: N (NPT), Option: P (Trim Plate)

Base Mounted How to Order Manifold VQC1000 Series Plug-in Unit

Base Mounted Plug-in Unit How to Order Manifold VQC1000 Series kit F P VV5QC 1 1 08 FD1 C6 M L T VV5QC 1 1 08 SDQ C6 S kit Base mounted plug-in VQC1000 series Enter EX600-compliant S kit only. Enter EX250-compliant S kit only. Valve stations Input block specification (Enter EX250-compliant S kit only.)

Manifold with Stainless Steel Plate: S, Model: 51S (EX260), SI Unit: KAN (Negative Common, PNP; IO/Link; 32 Outputs; M12 Connector), Wiring Type: All Double Wiring, Valve Stations: 08 (8 Stations, All Double Wiring), Port Size: 01 [4(A)/2(B) Port: 1/8; 1(P)/3(EB), 5(EA) Port: 1/4], Thread Type: One-touch: None; Thread Piping: Rc, Option: P (Trim Plate)

Air-hydro Unit

CC100-L1-G CC160-L1-G 3/8 186 1/2 64 104 86 88 53 121.8 151.5 98 35 18 35 104 45 86 45 83 60 1/2 223 1/2 92 139 116 123 61 121.8 156.5 98 35 18 35 109 65 86 45 88 65 1/2 259 3/4 92 139 116 123 61 133.8 185.5 134 40 24 50 140 65 116 66 112 85 3/4 319.5 3/4 144 202.5 180 183 60 133.8 181.5 134 40 24 50 136 93 116 66 108 81 L Dimension (mm) T Model NB Effective oil level stroke W QL S QB NL P

Compact and

For vacuum equipment precautions, refer to the Handling Precautions for SMC Products and the Operation Manual on the SMC website: http://www. smcworld.com Nozzle diameter Port size 05 0.5 mm 07 0.7 mm Nil 6 One-touch fitting 01 Rc1/8 female thread Symbol EXH Vacuum pressure reached S 90 kPa L 48 kPa Mounting P V Caution Specifications 1 .

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7

CC

4T Mounting hole for hexagon socket head cap screw Air port size Rc REC CX CY MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G Oil draining hole Rc 1/4 Oil port size Rc RS H A (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL H NL P

Valve; Stop Valve: None), Return Port Size: 03 (3/8), Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: N (w/o Lead Wire and M8 Connector)

Valve; Stop Valve: None), Return Port Size: 06 (3/4), Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: N (w/o Lead Wire and M8 Connector)

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SI unit for EtherNet/IP TM

Service Class Inst Attr ID Values ID ID Reset 01 h [Identity Object] 1 h 01 (Type1 reset) -35No.EX-OMX1001 Network information including the SI unit MAC address and communication speed are displayed. The EtherNet performance of the SI unit is displayed. -36No.EX-OMX1001 The communication status of the SI unit is displayed.

Multi Channel Pressure Sensor Controller

Output style P Peak value indication (mode) Shows the maximum pressure reached at that moment. PNP (open collector) (output) The switch that uses the PNP transistor for output.

Digital Flow Switch (Remote type monitor unit)

P Power saving mode The condition in which the digital display turns off and the current consumption is reduced. R Repeatability Reproducibility of the display or analogue output value, when the measured quantity is repeatedly increased and decreased.