Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Modular Type Lubricators Series AL

Modular Type Lubricators Series AL AC-A Lubricator Series AL Model AF-A Port size Option AF-A AL10 M5 x 0.8 AR-A AL20 1/8, 1/4 AL-A AL30 1/4, 3/8 AW-A AL40 1/4, 3/8, 1/2 Bracket AC AL40-06 3/4 AF AL50 3/4, 1 AF AL60 1 Pages 508 through to 513 AR AL AL AW AG E AV AF 507 Lubricator AL10 to AL60 Symbol Lubricator AL20 AL40 How to Order AL 30 03 B Option/Semi-standard: Select one each for a

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

M5 6 47 8 61 26 70 9.5 6.0 28.5 41 92 40 M6 x 1.0 M5 6 55 8 71 Note 1) Dimension F provides a clearance of 1mm between the body and the floating joint, but does not consider dead weight deflection of the cylinder tube, etc.

Escapements Series MIW/MIS

C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-M9W D-M9V D-M9WV D-M9 D-M9W D-M9V D-M9WV D-M9 D-M9W D-M9V D-M9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 16.5 25 4.5 18.5 49 6.5 7.5 38 21 MIW8-8D MIS12

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

2 x M5 x 0.8 (Vacuum port) 6.5 12 12 11 10 10 1 24 14 S O 20 46 24 30 K 15 (70) 10 24 24 12.5 4 12.5 4 10 30 When open F 17 17 54 4 x M6 x 1 through (Thread for mounting attachment) When open G (mm) J 32 68 88 H 176 276 316 G 138 238 278 F 98 158 178 E 38 80 100 D 87 129 149 B C 58 100 120 A MHL2-20D MHL2-20D1 MHL2-20D2 112211221122136 211 251 54 96 116 MHL2-25D 1122D A B C 12.5 +0.030 4H9

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

Use this as a standard when mounting, etc.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A Part No.

Compact Guide Cylinder

When used as a stopper, select a model with a stroke of 30 mm or less. 2.

VQ

SY SYJ (L5) Plug assembly (L4) VK 2-4.5Mounting hole 1 2 3 VVQ100-12A(L3) 88 (8.5) L2 VZ 48.7 L1 VT VT (45) (35) 33 25 (5.5) VP 23.5 12.3 VG R11 Manual override 21.5 (Min. bending inner radius) (29.3) VP 104 VQ VQZ Stations 1 2 3 4 5 n Dside Uside VZ 2-M5 X 0.8(E port) VS 2-M5 X 0.8(P port) 42.9 A A 20 (8.5) 1.5 5 n-M5 X 0.8 (A port) 5 (7.5) 15 P=10 38 Equation: L1=10n+32 L2=10n+43

48

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

High Vacuum L Type Valve

Fd G J XLAV-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

M1 Weight (g) ASV120F-M3-04 ASV220F-M5-04 ASV220F-M5-06 Model 5 8 9 M3 x 0.5 M5 x 0.8 M5 x 0.8 5.5 8 8 9.3 9.3 11.6 7.2 9.6 9.6 21.4 22.8 23.6 25 27.6 28.4 9.8 11.1 11.1 28.6 31.4 31.4 26.1 28.6 28.6 25.8 27.7 27.7 23.3 24.9 24.9 12.7 12.7 13.5 4 4 6 Reference dimensions of M thread after installation. Inch Size Applicable tubing O.D. d T H D1 D2 L1 L2 L3 L4 A Max. Min. Max. Min.

CQM

+ Stroke B + Stroke W L S EA EB EC M J 2 x 2-OA 2 x 2-RA Both ends tapped style (CQMA) (mm) Without auto switch With auto switch Stroke range (mm) Bore size (mm) P P EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33 7.5 10.5 45 43 34.4 Rc1/8 NPT1/8 G1/8 NPT1/8 7.5 10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(With mounting screw) For VKF334: VKF300-S-01 For VKF332: VKF300-13A-2 For VKF333: VKF300-11A-2 For VKF334: VKF300-11A-1 i 3 4 For VKF33 : VKF300-6A-1 2 sets per unit required Bushing assembly o Resin 4-13-5 6 Series VKF300 Dimensions: Single Type M5 01 DIN terminal: VKF332-DM5 01 Body ported Grommet: VKF332-G17 Rc 1/8, M5 x 0.8 2(A) port Manual override (Non-locking) A A 18.5 20.5 300

VK300

type A port: Rc 1/8 V100 S070 Common SUP/Individual EXH VQD How to Order Type 21: Body ported (A port top ported) Applicable solenoid valve VK332--M5(-Q) VK332--01(-Q) VV3K3 05 21 VQD-V A port: Rc 1/8, M5 x 0.8 VK VK Applicable blanking plate assembly VK300-42-1A Valve stations P, R port thread type 01 1 station VT Nil Rc G NPT NPTF CE-compliant 20 20 stations 00F 00N 00T Q CE-compliant

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

only) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84

ARJ310

CAT.ES40-41 A Miniature Regulator Series ARJ310 Improved flow characteristics 0.7 Conditions: Upstream pressure 0.7MPa 0.6 Downstream pressure MPa 0.5 ARJ310-01 0.4 0.3 0.2 ARJ210-M5 0.1 0.0 0 100 200 300 400 500 Flow rate l/min (ANR) Compact and light weight Allows smaller mounting pitch 18.3mm A Accommodates two types of threads Inside: Female thread (M5 x 0.8) Outside: Male thread (1/8

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

B C D Note 1) A C Note 1) The above mentioned values are indicated as a guide for auto switch mounting position for stroke end detection.

AIR COMBINATION

-3003-A piping adapter IS10E-4004-A IS10E-2003-A IS10E-3004-A IS10E-4006-A Y24-01-A Y34-01-A Y44-02-A Y54-03-A Cross spacer Note5) Y14-M5-A Y24-02-A Y44-03-A Y34-02-A Y54-04-A Note1) in part numbers for a round pressure gauge indicates a pipe thread type.