Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

8 A -X i !1 !0 @6 o @0 20Data !3 !4 !5 !6 !2 @2 @1 Detail drawing of part A Component Parts Note Note Material Material No. Description No.

AMP

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7

CRB1/Size: 10, 15, 20, 30

5 Back-up ring O ring NBR Stainless steel i !6 1.1-8 Series CRB1 Size 10, 15, 20, 30 Single vane Port locations: Body side/ CRB1BWl-lS Port locations: Body side/ CRB1BW10-lS Port locations: Axial direction/ CRB1BWl-lSE The dimensions above show the pressurization state to B port of the one for 90 or 180. Refer to p.1.1-7 for further information.

FQ1

Cover SUS304 Case SUS304 Symbol 0 3 Quick Change Filter Series FQ1 Construction AIR VENT y Plug u O-ring w Cover INLET OUTLET t Element r O-ring e V-band i Upper element holder q Case o Lower element holder !4 Intermediate holder (L-129S) Note) Installed only for FQ1012 when two L250 elements are used. !0 Spring !3 O-ring !2 Quick plug !

3 Port Solenoid Valve Rubber Seal Series SY100 1

SY1 4, SY1 4A only 1 2 1 2 4-3-6 7 Series SY100 Construction SY114, SY114A (A) 2 3 (R) i q y e r w V100 SY SYJ VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP A R P !1 o u t !0 VG VP S070 VQ VKF Part no.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(Values at the initial period) VG VP JIS Symbol (A) 2 S070 VQ Construction 1 (P) 3 (R) VKF q t o r e VQZ y VZ y VS VFN i w 1(P)2(A)3(R) P R Description Component Parts No. q w e r t y u Note Material Aluminum die-casted Aluminum die-casted Aluminum Resin Stainless steel Steel Solenoid coil assembly Sub-plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly

3 Port Solenoid Valve Series VQ100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com i VT VP R A P VG o VP S070 VQ VKF VQZ (For N.C. valve) VZ Component Parts VS Description Material Resin Stainless steel Stainless steel, Resin Stainless steel NBR Carbon steel NBR No. q w e r t y u i Solenoid coil Body Fixed iron core Movable iron core

VZ100/300/500

VQZ VZ VS VFN Component Parts Replacement Parts No. u i o Note Part no.

Table of Contents

SZ Serial wiring with I/O unit Series EX250 SY Service life of 50 million cycles or (Based on SMC life test conditions) more IP67 compliant No. of input/output point: 64 points (Output 32 points, Input 32 points) Double solenoid allows up to 16 stations (up to 32 solenoids). SYJ Manifold block Solenoid Connector (D-sub connector, etc.)

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

M6 x 25 AXT335-12-3 AS568-015 Hexagon socket head screw Gasket O-ring i o Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Part no.

Controller Series: LECP1 (Programless Controller), Parallel I/O Type: N (NPN), I/O Cable Length: 3 (3), Option: Screw Mounting, Actuator Series: LEM (Low Profile Slider Type), Type: HT (Linear Guide Double Axis Type), Size: 25, Motor Mounting Position: U (Bottom Mounting), Lead: T (48mm), Stroke: 400

Parallel I/O Type: P (PNP), I/O Cable Length: 5m, Option: D (DIN Rail Mounting), Size: 25, Motor Mounting Position: R (Standard), Lead, mm: J (LES8: 8mm; LES16: 10mm; LES25: 16mm), Stroke: 100mm

Parallel I/O Type: P (PNP), I/O Cable Length, m: No Cable, Option: Screw Mounting, Actuator: LEFS (Ball Screw Drive), Accuracy: Basic, Size Motor Mounting and Lead: 25A (Size 25, 12mm Lead), Stroke: 150mm

Plug Connector or I/O Cable Length: None

Stations: 07 (7 Stations), Systems, Port Combinations: AN [Ejector System, ø5/16" (Common PV)], Exhaust: 1 (Complex Exhaust), SI unit prefix: S (SI unit for EX260 or EX500), SI Unit: DAN (EX260, EtherCAT, PNP, M12), EX600 Output Polority, End Plate Type: Nil (without SI Unit, or not EX600), EX600, I/O Unit Stations: Nil (without I/O stations, or not EX600), Option: B (with DIN rail mounting

Compact Vacuum Ejector Series ZA

Pilot valve symbol 1 2 3 4 5 6 100 AC 200 AC 110 AC 220 AC 24 DC 12 DC Nil Y Nil Y Nil Nil Nil Nil K1 K1 J1 J1 Q1 Q2 N1 N2 q w e r t y u i Combinations (1) to (8) in the above table are the only possible options. 850 Compact Vacuum Ejector Series ZA How to Order 08 ZZA1 3 P Manifold Right common air pressure supply (P) port (viewed from the vacuum (V) port side) ZA Number of stations 01

), Communication Plug Connector or I/O Cable Length: None

Series: LEFB, Size: 32, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: T (48mm), Stroke: 1800mm, Motor Option: B (w/Lock), Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: R3 (3m), Controller: C61 [Parallel Input (PNP)], Mounting: 8 (DIN Rail), I/O Cable: 1 (I/O Cable, 1.5m)

Series: LEFB, Size: 32, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: T (48mm), Stroke: 2000mm, Motor Option: B (w/Lock), Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: R3 (3m), Controller: C61 [Parallel Input (PNP)], Mounting: 8 (DIN Rail), I/O Cable: 1 (I/O Cable, 1.5m)

Parallel I/O Type: N (NPN), I/O Cable Length: 1 (1.5m), Option: D (DIN Rail Mounting), Type: B (Basic Type), Size: 32, Motor Mounting Position: w/o Cable, Stroke: 500