SFOD-OMT0009CN

20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm/s] 500 500 410 340 250 200 170 [mm/s] 30 20 10 () [mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250 150 350 250 200 [mm/s] 20 10 20 10 () [mm

JXCx-OMT0001CN

1100 1200 1000 1100 1200 mm/s 500 500 410 340 250 200 170 [mm/s] () 30 20 10 [mm/s] () 49 33 17 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 mm/s 400 200 400 200 400 200 [mm/s] () 20 10 20 10 20 10 [mm/s] () 25 13 27 14 30 15 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 mm/s 300 250 150 350 250 200 [mm/s] () 20 10 20 10 [mm/s] () 25 13 27 14 -109No.JXC-OMT0001CN-C

PSxx-OMH0002CN

ISE70/ISE75(H) ISE70/ISE75(H) ISE70/ISE75(H) () 1 ON ON OFF Yes No 2 OFF ON 1 OFF 3 4 5 -26No.PS-OMH0002CN-D 6 Yes No 7 7 8 9 10 11 12 13 14 15 -27No.PS-OMH0002CN-D No.

PFMB.eng

M Setting F0 Setting F1 Setting F99 N Indicates the unit currently selected. Unit display The output will not operate for 3 seconds after supplying power. The identification code of the product is displayed. Indicates the reference condition selected. LED is ON (red) when standard condition is selected.

High performance type Step Motor Controller (Servo/24 VDC)

N N S1120010001 Label of controller version A side No. Label Name Description Power ON/No alarm: Green light Data (step data, parameter) writing /green light flashing Caution PWR Power LED (green) Do not turn off the input power supply for the controller while the data is being written (power supply LED (green) flashes). Data (step data, parameter) may not be written correctly.

CJ2Q

Low Friction: Double Acting Single Rod Series CJ2Q 10, 16 How to Order Bore size 10 16 10mm 16mm Mounting Basic Axial foot Front flange Double clevis Standard stroke (mm) B L F D 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 CJ2Q L 16 60 Standard L 16 60 C73 CDJ2Q With auto switch Number of switches With auto switch (Built-in magnet) 2 1 n S n Auto switch

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

N.C. auto drain not available for AM650 Options J: With drain guide T: With element service indicator HAl AT IDl Element service indicator AMG Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 55 6 6 7 7 9 9 9 11 N 35

AME

It cannot be used if connected in the opposite direction. 4.6-24 Series AME Dimensions: AME150 to AME350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4, 3/8

AMG

SAM, #1 AMG450 SAM, #4 AMG250 SAM, #2 AMG650 SAM, #5 AMG350 SAM, #3 AMG650 SAM, #6 4.4-4 Water Separator Series AMG AMG850 Dimensions Accessory D: With auto drain (N.O. type) for AMG850 HA AT IDl AMG AFF AMl Related products M Mounting Dimensions Model Port size (Nominal size B) A G F E D C B S 6.0 11/2, 2 R 18 Q 110 P 220 O 184 N 120 L 24 K 15 J 30 I 180 H 463.5 13 10 220 57.5 220

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

AMP

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7

VP3145/3165/3185

Double solenoid Single solenoid 81 4 6 8 1 2 1 1 Thread type 1 2 Passage, Type of actuation Rc G NPT NPTF T N F Nil Port size (IN, OUT port) N.C.

VHS

Filtration rating has to be 5m or smaller. 3(R) Model VHS2500 VHS3500 VHS4500 VHS5500 A 60 78 85 136 B 20 29 32 56 C 12.8 12.8 12.6 32 D 40 53 70 90 E 44 53 64 80 F 33 42 49 65 G 28 29 36 54 H 7.5 7.5 10 10 3.6-18

E/P Pressure Regulator

F Rc(PT) NPT NPTF Protocol SEN SMB Ethernet I/P Modbus TCP Porting ETHERNET ITV ETHERNET ITV Supply: 1/2 Out: 1/4 or 3/8 (per order) PWR NS MS PWR NS MS E/P REGULATOR E/P REGULATOR Thread Type: Rc, NPT or NPTF (per order) Dimensions H Length (mm) 52 (N-1) + 88 L G G 2 OUT Height (mm) 173.2 H Width (mm) 70 W Supply Out Mounting Screws IITV20-XX-X-SXX-DUR01490 4X M5x0.8 SHCS W Pitch (mm) 36

Series VS

SIZE 2 1/2 SIZE 3 3/4 2 PORTS EA, EB PORTS N N ALL DIMENSIONS ARE IN MILLIMETERS R S T EA EB P SIZE 2 3/8, 1/2, 3/4 SIZE 3 1/2, 3/4, 1 P PORT Q P O * 3/8 14.5 1/2 16 3/4 18.5 A B C D E F G H I J 29 8.5 ** 22 * 28 48.5 36 32.5 52 32.5 47.5 SIZE 2 SIZE 3 22 27 47 45 40 65 40 71 SIZE 3 SIZE 2 K L M N O P Q R S 41 39 T 57 65 19 17.5 15.5 27 187.5 174.5 58 19 14 26 19 40 234 221 76 27 12 Series

Industrial Filter FGD Series

seal material Note) Material Bronze Stainless steel Polypropylene Glass fiber Cotton Cotton Stainless steel 304/Epoxy Stainless steel 316 Polyester/Polypropylene Element type Element seal material Non-asbestos Fluororesin NBR FKM B S T G H P M L J Sintered metal A T N V Fiber (Honeycomb) Note) Refer to the below table for the element seal material types by the element category.

ISA3_L

range 3 Conforming to ISO 1179-1 Bracket mounting position 2 stations (Mount to 1st and 2nd stations) Option 1 (Cable) Straight 5 6 Centralized lead wire (Lead wire only) 4 5 Nil 1 2 S Right angle 5 6 n stations (Mount to 1st and nth stations) L Centralized lead wire (With bracket) 4 5 N None 1 2 n 4 Cannot be selected for 1 station One set is provided per manifold.

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

(g) 120 1 1 0 100 90 80 l|AN20002 U1 35 (1.9) .04 (17) NAN3OO-N03 % 60 (3.3) .06 t25) NANtrco+to4 90 (5.0) .08 (35) 60 NAN50(rN0,6 3A 160 (8.8) .36 (165) NAN6OO.NI O 1 27O llsl .46 e25) NAN700+i12 1]4 444 Q4l 1 .87 (4901 Supply pressure: 7l PSI Distance from silencer: NAN200-500-) 31t NAN6O0-7OO+ 6.5fi MN800_900 ,10f1 NANSOO-N,'4 1\h 590 (33) 2.21 (580) NANgOO-N2O 2 960 (53) 3.13 (820) Construction

Floating Joint

Allowable eccentricity U [mm] Rotating angle [] Operating temperature range JT20 M8 x 1.25 220 0.5 2 10 to 70C JT32 M10 x 1.25 560 0.5 2 JT40 M14 x 1.5 880 0.75 2 Operating range Center of sphere e g 2 n a Center of axis r U U g n ti a 2 r e p O Applicable Cylinder Model Applicable cylinder *1 Recommended cylinder Bore size Operating pressure JT20 20 JCM20 (Rod end male thread type) JT32