Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

L M L CXTM L Series Action Double acting/Single rod Double acting CY1B: 6 10, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25

3 Port Solenoid Valve SYJ300/500/700 Series

Common exhaust(pilot and main valve)type Lubrication Not required Mounting position Free Impact / Vibration resistance m/s2 150/30 Protection structure Dust proof Base mounted type Solenoid Specifications Grommet (G), (H), L type plug connector (L), M type plug connector (M) Electrical entry 24, 12, 6, 5, 3 Coil rated voltage V DC 100, 110, 200, 220 AC 50/60Hz 10% rated voltage Allowable

180

Example) For setting the gripping force to be at least 20 times the work weight; Required gripping force = 0.05 kg x 20 x 9.8 m/s2 = 10 N min.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Standard strokes (mm) Bore sizes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 50, 63 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Example) For CQ2XB40-57D, an 18mm spacer is installed inside a standard stroke CQ2XB40-75D cylinder. Specific Product Precautions Be sure to read before handling. Refer to pages 15 to 24 for safety instructions and precautions.

Cylinder

> I A, ' Y.POO6 I 6 5 6 3g 040 112 3,5 M3XQ,5 5 3 5 I ~POO6 6 5 6 I 3 I-g040 112 3,5 M3 x Q,5 5 3 5 1 4 -1 -11'(51.0,1 '10 $,~ ~o ! 5+ g"'" 116 5:5 M4XO,7 YPOIO , '10 6.S 10 sg04I 16 5.5I M,4 XQ,7 71' 5 a 6.3 7 I 5 a 1 6.3 YP015 I 15 7 12 ~-g.048 19 7 M5XO,a 9 I 6 10 ,7.8 10 7,a ...!:!'.015 l 15 7 12 6 -g~ 19 9 I 6 7 M5 x O.B . ~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In .

NCRAI seies

E* A73L D-A73L Parls M 3 X 0 . 5 X 3 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 tvl3x0.5x5 @ Rotary Actuator Series:NCRAl l n ck and pinion rype ||m 30(17Ie) 50121,63(2 %),80(3 %),1 0o{4) Fluid Air Air o o o o 90' 180' 100" 190" Rotatio 1 ) o r)o Basic o o Shaft Singleend Doubleend o o o Body option With ctshion a Wlthalctqruitph -oand to 200. lrom 180" model.

Hydraulic Filters

-06 -24 -28 -12 -16 -08 10 Pressure drop (kPa) -30 10 100 1000 1 Flow rate (L/min) Conditions Fluid: Turbine oil Class 2 VG56 Viscosity: 45 mm2/s Filter material: Micromesh Nominal filtration: 74 m to 149 m 498 Vertical Suction Filter FHIA Series How to Order FH I A N 04 M M R 074 Vertical suction filter Relief valve Hydraulic fluid R D N W V With relief valve None (Blanking plate) Petroleum

AR20-B to AR60-B

) Note 10) Note 10) Note 10) Note 10) Note 10) use pressure within the specification range.

！ Contact our sales office for delivery dates and prices since this is a special model. SP157X-014E P TY P.G.Information (Specialized Product ) Step motor (Servo 24 DC) SMC Corporation Absolute Controller 4-14-

) Screw mounting: 0 to 30 (No freezing) Operating humidity range [%RH] Note 7) 90 or less (No condensation) Insulation resistance [M] Between the housing and SG terminal: 50 (500 VDC) Weight (including batteries) [g] 410g (Screw mounting) 430g (DIN rail mounting) Note 1) Do not use the inrush current prevention type power supply for the controller input power supply.

C95Series

10 !

3 Port Air Operated Valve Series SYJA300 1

(Example) SS3YJA7-41-03-01. 1 set SYJA714 . 2 sets SYJ700-10-2A . 1 set (Example) SS3YJA5-40-03-01. 1 set SYJA514 . 2 sets SYJ500-10-3A . 1 set The asterisk denotes the symbol for assembly.

Check Valve Series AK 1

4 6 8 10 12 3 5 10 17 25 2.8 6.5 14 24 34 9.3 11.6 15.2 18.5 21.7 33.5 37.1 53.3 63.6 70.2 2-Applicable tubing D Inch Size Weight (g) Effective area (mm2) D L M Model Applicable tubing O.D.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

N 9 T L A N 1 * S 1 9 T L A N ) a P M ( g i s p e r u s s e r p y l p p u s . x a M ) 5 . 1 ( 0 2 2 ) a P M ( g i s p e r u s s e r p g n i t a r e p o . x a M ) 0 . 1 ( 0 5 1 e g n a r . p m e t g n i t a r e p O ) C 0 6 ~ 5 ( F 0 4 1 ~ 3 2 t n a c i r b u l d e d n e m m o c e R ) 2 3 G V O S I ( 1 # l i O e n i b r u T y d o B C D A e r u s s e r p e n i l d n a k n a t n e e w t e

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 Single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) 10/15 20/25/32 6 Item 1.05

Mechanical Valves Series NVM, NVFM, NVZNI

(m/sec.)

IIIIIII

(m/sec.)

AKH/AKB Series Check Valve with One-touch Fitting

Model D L M M M AKH03-00 AKH07-00 AKH09-00 AKH11-00 AKH13-00 3 6 10 17 24 2.8 6.5 14 24 34 5/32 1/4 5/16 3/8 1/2 9.3 12 15.2 18.5 21.7 33.5 39 53.3 63.6 70.2 12.7 13.6 18.5 21 22 L Male Connector Type: AKH Millimeter Size Connection thread R Applicable tube O.D.

Electro-Pneumatic Regulator IT1000/2000/4000

(Note) Gauge port RC(PT)1/8, Pre6sur g6uge, 14{1.0}, 28{2.0}, 72{5.1), 100{7.1}, 145{10.2) How to Order Model t x#l r*m ? Electrlcal connectlon ?

W2M/4M

Supply pressure will pass through the main valve resulting in an electrical signal by the pressure sensor @ which provides feedback to the controller O.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

Grommet (G) (H) Examde pneumalic cirEuit diagram L typs plug connector (L) M type plug connector (M) with filter lll : With indicator light and surge voltage suppressor