VXR21/22/23

Frequency (Hz) 50 20 11 60 17 7 Model Power source AC VXR21 50 40 18 60 35 12 DC AC VXR22 50 50 21 60 45 17 DC AC VXR23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C) Ambient temperature (C) Temperature conditions Power source Water (Standard) Oil (Standard) High temperature water (2) (D) High temperature oil (2) (D) 80 80 AC DC AC/DC 60 40 1 60 40 40 60 Maximum

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

7 50.6 Vacuum supply port Vacuum pad connection port 20.5 RESET button DOWN button SET button Pneumatic circuit UP button Lead wire length 600 50 (3000) 10 58 PV 18 10.2 8 6.5 10.25 10 22.6 5.75 ZSE3-0X-C-D Vacuum pad connection port 2 x 3.3 Mounting hole Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1.0 0X: M5 x 0.8 0XY: M6 x 1.0 771

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Pressure Control Equipment Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output 1.5 MPa Withstand pressure Max. 30 V, 80 mA Residual voltage 1 V or less 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Pressure Control Equipment Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output 1.5 MPa Withstand pressure Max. 30 V, 80 mA Residual voltage 1 V or less 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

How to Order VFN212 02 N 5 F D Z CE marking NAMUR Interface Nil Q CE marked product Voltage Thread type 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz Nil Rc (PT) F G (PF) N NPT Electrical entry Solenoid G Grommet E Grommet terminal T Conduit terminal D DIN terminal Nil Single solenoid D Double solenoid Manual

GA342

Change of fluid passage Flow Characteristics Flow characteristics 1 2 (P A) C [dm 3/(sbar)] 27 38 Port size 2 3 (A R) C [dm 3/(sbar)] 27 40 2 1 (A P) C [dm 3/(sbar)] 25 40 3 2 (R A) C [dm 3/(sbar)] 26 38 b 0.38 0.30 b 0.37 0.32 b 0.36 0.22 b 0.37 0.20 Cv 7.0 9.8 Cv 7.4 9.8 Cv 7.3 9.8 Cv 6.8 9.6 1/2 3/4 N.C. N.O.

MHZ2/MHZJ2

P-77.5 (JT)

Digital Flow Switch (Remote type sensor unit)

Air leakage. -20No.PF-OMO0010-C Specification Specifications Specifications of body Model PF2A510 PF2A550 PF2A511 PF2A521 PF2A551 Applicable fluid Air and N2 Fluid temperature 0 to 50 C (no condensation or freezing) Flow Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 L/min L/min L/min L/min L/min Pressure Rated pressure range -50 kPa to 0.5 MPa -50 kPa to 0.75 MPa Proof pressure

Air cylinder

Table 1 32 40 50 63 80 100 Air cushion 2.3 3.6 6.1 11.4 21.1 31.7 Allowable kinetic energyJ Non cushion 1.1 1.8 3.6 6.0 12.0 12.0 C a u t i o n When the product is equipped with a bumper cushion, note that there will be a slight bounce at the stroke end. 9 2-7. Cushion C a u t i o n Cylinder cushions are adjusted properly at the time of shipment.

Power Clamp Cylinder ø 40, ø 50, ø 63, ø 80 Series CKZT

Power Clamp Cylinder 40, 50, 63, 80 Series CKZT How to Order CKZT Clamp Cylinder (Without Arm) 63 TN 120 T Power clamp cylinder European type Switch type T P TURCK P&F Bore size 40 50 63 80 40 50 63 80 Arm mounting position 30 45 60 75 90 105 120 135 30 45 60 75 90 105 120 135 Cylinder port Nil TN G NPT CKZT Clamp Arm 40 A015 C S Mounting hole Power clamp cylinder European type Symbol Bore

Unit Manifold Valve

Note 2) The wiring specification is positive common only. 1 Series VV061 Unit Manifold Specifications Fluid Air Operating pressure range (MPa) Standard 0 to 0.7 High flow type 0 to 0.3 1(P) port 3(R) port Vacuum specification (MPa) Standard 100 kPa to 0.6 100 kPa to 0 High flow type 100 kPa to 0.2 100 kPa to 0 Ambient and fluid temperature (C) 10 to 50 (No freezing) Response speed (ms) Note

Silencer Series AN

P 1 Silencer VEX Solenoid Tightening Torques for Silencers Applicable tightening torque (N.m) 12 to 14 Connection thread AN 1 4 22 to 24 3 8 28 to 30 1 2 28 to 30 3 4 36 to 38 40 to 42 1 4 1 2 48 to 50 48 to 50 R R R R R 1 R 1 R 1 R 2 Inlet pressure for silencer AMC 4.

ZSE40/ISE40

ON YES Unit selection Hysteresis mode OFF P-1 P-2 High pressure (for positive pressure/compound pressure) High vacuum (for vacuum pressure) [P] ZSE ISE H H H (Fixed hysteresis) = 3 digits ON PSE Window comparator mode OFF NO P-1 P-2 High pressure (for positive pressure/compound pressure) High vacuum (for vacuum pressure) Z I SE3 Set the unit by either button or button. : kPa or MPa

IZx-OMV0005

AC adapterIZN10E-C105 Models AC cord Input / Output signal IZN10E-CG1 Included NPN IZN10E-CG1-P Included PNP IZN10E-CG2 Not included NPN IZN10E-CG2-P Not included PNP 32 Doc. no.IZ-OMV0005 7.

AFF

type Type Symbol P.69 X15 Nil Rc P.69 X17 F G N NPT P.70 P.70 X26 X12 Port size Option 2 Size Applicable body size 37B 75B Symbol Description Symbol Nil 10 14 20 1 J Drain guide female threaded 4 1 4 1 1 2 2 R IN-OUT reversal direction T With element service indicator Accessory 4 Drain piping and piping for a stop valve such as ball valve are required.

EX510-GPR1.eng

COM C COM C is receiving data: Lights up 2 COM C is having no data to receive: Goes off A. For separate power supply use B. For single power supply use COM D COM D is receiving data: Lights up 2 COM D is having no data to receive: Goes off 1: Refer to "Operation Manual" for the extension diagnosis information. 2: It is lit when input unit is connected and communicating normally.

HAW

) Q R Cooling water outlet 87 G (H) K J Cooling water inlet S T 2 x 2 x U Mounting holes D N Drain C (A) B (M) W Rc (mm) B C D E F G H J K L M N P Q R S T U V W Y Z 473 ZA HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 Model A 360 570 948 1354 1612 2112 1724 1 2 3 4 1 2 1 2 3 4 3 4 3 4 3 4 1 2 1 2 3 4 395 10 10 12 18 18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139

3 Port Solenoid Valve

Series V V Y Series V V J Applicable cylinder size Cylinder size y Series C dm bar)] b Cv 6 8 10 12 16 20 25 32 40 50 63 80 100 0.28 0.37 0.28 0.29 0.36 0.32 0.35 0.29 0.90 1.4 2.5 0.12 0.21 0.74 V1Y V2Y V3Y V4Y 3.4 5.2 Series VY 10 0.46 0.83 2.9 V1J V2J V3J Series VJ Conditions Pressure: 0.5MPa Load rate: 50% Cylinder speed: 450mm/s 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel:

Digital Flow Switch (Integrated display type)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM710--C/E 10 (5) PFM710--D/F 10 (5) PFM725--C/E 25 (12.5) PFM725--D/F 25 (12.5) PFM750--C/E 50 (25) PFM750--D/F 50 (25) PFM711--C/E 100 (50) PFM711--D/F 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 Flow adjustment needle revolution Flow characteristics (reference value) -57No.PF-OMJ0006-J Pressure loss (at 350 [kPa]) -58No.PF-OMJ0006

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

SET 12 Series PSE Operation : Special Setting 3 Auto shift Refer to C Auto shift function on page 14 for details.