VP300/500/700

S070 Nil Standard (Internal pilot) R External pilot Manual override VQ Option Light/Surge voltage suppressor Nil Push type Rated voltage B Locking type (Slotted) Nil None VKF 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz C Locking type (Manual) With light/surge voltage suppressor (Type E, T, D, or Y only) Z Option VQZ 110 to 120 VAC, 50/60 Hz S With surge voltage suppressor (Type G only) 4

VP4

Flow Characteristics/Weight 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Weight (kg) Port size Model Type of actuation C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 4.5 5.1 5.6 4.5 5.1 5.6 4.0 4.5 5.0 4.2 (4.0) 4.8 (4.5) 5.5 (4.8) 0.33 0.28 0.28 0.33 0.28 0.28 0.29 0.23 0.23 0.29 (0.28) 0.24 (0.27) 0.23 (0.30) 16 19 21 16 19 21 15 18

IDX-OM-M051

When the IDF100F-30 is provided with options C, R and V and specified to have the facility water piping direction on the right side, the part number will be IDF100F-30-CRVW4. NIL IDF 100 F 30 4 W C 5 G Size K Size Air compressor size Note) 100kW 125kW 150kW 100 125 150 P R Note) The value is referential. Confirm the capability of the compressor used.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Applicable bore size (mm) Snap ring l A1 NDH10 MM NX R1 U1 Dd9 t d L m Dd9 t d L m l +0.048 0 0.030 0.060 0.030 0.060 I-J010SUS 10 CD-J010 10 CD-J010 10 3.3 3.3 3.3 C type 3.2 C type 3.2 8 21 M4 x 0.7 3.1 8 9 3 15.2 12.2 1.2 0.3 3 15.2 12.2 1.2 0.3 0.030 0.060 +0.048 0 0.030 0.060 I-J016SUS CD-Z015SUS IY-J015SUS 16 16 16 5 5 5 C type 5 C type 5 8 25 M5 x 0.8 6.4 12 14 4.8 22.7 18.3 1.5 0.7

Compact Cylinder with Solenoid Valve/

C Example) Bolt M5 x 45L: 4 pcs.

RSH

3 Spring pin Roller pin Lever pin Ring A Ring B Adjustment dial End rod Lever spring Magnet Flat washer Flat washer C retaining ring for rod C retaining ring for rod C retaining ring for rod Return spring !4 !5 !6 !7 !8 !

MLGC

RLQ MLU View A-A' ML1C DStandard Stroke BP BZ C D E F G GC A AA AB AC AD AE AF AP B Bore size (mm) 20 25 32 40 Stroke range (mm) -X 11 depth 8 26.5 73.5 6.8 75, 100, 125, 150, 200 M6 x 1 depth 12 13 94 16.5 70 135 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 50 118 28 35 32 12 14 depth 10 31.5 86.5 8.6 M8 x 1.25 depth 16 16 104 19 75 160 50 140 29 40 37 16 2075, 100, 125, 150, 200, 250, 300 14 depth 10 31.5

HRX-OM-T002

Table 8-1 Quality criteria for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

MLGC

RLQ MLU View A-A' ML1C DStandard Stroke B AF AP E A AA AB AC AD AE BP BZ C D F G GC Bore size (mm) 20 25 32 40 Stroke range (mm) -X 11 depth 8 26.5 73.5 6.8 75, 100, 125, 150, 200 M6 x 1 depth 12 13 94 16.5 70 32 35 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 50 28 135 118 12 14 depth 10 31.5 86.5 8.6 M8 x 1.25 depth 16 16 19 104 75 37 40 50 29 160 140 16 2075, 100, 125, 150, 200, 250, 300 14 depth 10 31.5

PROFINET Compatible Fieldbus System

COM C) 7 Branch port D(COM D) 8 Display window Displays the status of the power supply and the communication with the PLC. 2 9 Protective cover This protective cover should not be opened. 10 Grounding terminal (FE) Used for functional grounding.

PFxx-OMX0002

Lead wire with M12 connector (ZS-49-A) M12 female Pin number Description M12 male Pin number 1 L+ 1 2 N.C. or Other 2 3 L3 4 C/Q 4 -97No.PF-OMX0002-B Revision history A: Contents revised in several places. [August 2022] B: Contents revised in several places.

AWM20 to AWM40

Float type auto drain (N.O.) b Nil C D Float type auto drain Note 3) Option + Nil E G E1 Note 5) Without pressure gauge Square embedded type pressure gauge Round type pressure switch NPN output / Wiring bottom entry NPN output / Wiring top entry PNP output / Wiring bottom entry PNP output / Wiring top entry Pressure gauge c Digital pressure switch E2 Note 5) E3 Note 5) E4 Note 5) + Nil 1

AWM20 to AWM40

Float type auto drain (N.O.) b Nil C D Float type auto drain Note 3) Option + Nil E G E1 Note 5) Without pressure gauge Square embedded type pressure gauge Round type pressure switch NPN output / Wiring bottom entry NPN output / Wiring top entry PNP output / Wiring bottom entry PNP output / Wiring top entry Pressure gauge c Digital pressure switch E2 Note 5) E3 Note 5) E4 Note 5) + Nil 1

SI Unit for Vacuum Manifold

(between FE and all accessible terminals) Insulation resistance 10 Mohm or more (500 VDC between FE and all accessible terminals) Ambient temperature Operating temperature range : 0...50 C Storage temperature range : -20...60 C Operating humidity range 35...85 %RH (non-condensing) Electrical Internal current consumption (L+ power) 100 mA or less Protection against polarity reversal Yes (Power

IDX-OM-Z004

50 50 (mg/L) 200 50 50 [pH4.8](mgCaCO3/L) 100 50 50 (mgCaCO3/L) 200 70 70 (mgCaCO3/L) 150 50 50 (mgSiO2/L) 50 30 30 (mg/L) 1.0 0.3 1.0 (mg/L) 0.3 0.1 1.0 (mg/L) (mg/L) 1.0 0.1 1.0 (mg/L) 0.3 0.3 0.3 (mg/L) 4.0 4.0 4.0 6.07.0 1 2 JIS K 0101 2 a b c 4.2 IDF100150F-W 4 2 IDX-OM-Z004 4 (3) 1 Y Y , Y Y (4) 3 2 (5) 1( 2 3 4 a) 1. 1.5 2. 4.2 IDF100150F-W

Air Cylinder: Standard Double Acting, Single/Double Rod Series NCM

Note 7) Available only with B or C mounting. Not available on 2" bore. Note 8) Not available with 7/8" bore, or with C, R mount, or non-rotating rod (K). Note 9) Stainless steel rod standard on 7/16", 9/16", 3/4" and 7/8". Note 10) Exclude 7/16" and 9/16". Note 11) Exclude 2".

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Leakage Voltage When a C-R device (Surge voltage suppressor) is used for the protection of switching device, note that leakage voltage will increase due to the C-R device. 3 4 Effect of back pressure when using manifold Possible malfunction due to back-pressure may result when valves are used on a manifold.

MGC

44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 25 38 80 60 MGP 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 32 46 95 70 75, 100 125, 150 200, 250 300 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 32 50 105 80 MGQ 70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 38 60 125 95 45 194 42 M10 200 95 12 11 135 115 210 190 82.5 19 23 142 50 75 150 115 MGG Bore (mm) Z Y X W

MLGC

Note 3) Common with cushion ring gasket A except for standard stroke of 20 and 25. 3.2-6 Fine Lock Cylinder with Guide Series MLGC Basic/With Rear Plate MLGClBl-l-R-l CL MLGC CNA CB CV/MVG CXW CXS CXT MX MXU MXS MXQ MXF Standard Stroke Stroke range (mm) AC AB AF B E AD A Bore size (mm) AA AE AP BP BZ C D F G GC MXW Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 20 25 32 40 75, 100, 125, 150, 200

In-line Air Filter

/min (ANR)] Flow rate [L/min (ANR)] ZFC74 6 ZFC75 8 0.1 MPa 0.3 MPa 0.5 MPa 0.1 MPa 0.3 MPa 30 30 Differential pressure [kPa] Differential pressure [kPa] 0.5 MPa 0.7 MPa 20 20 0.7 MPa 10 10 0 50 100 150 250 200 0 0 0 100 200 300 400 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC76 10 ZFC77 12 0.1 MPa 0.3 MPa 0.1 MPa 0.3 MPa 30 30 0.5 MPa 0.5 MPa 20 20 0.7 MPa 0.7 MPa 10 10 0 0 200