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[May 2019] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012-2019 SMC Corporation All Rights Reserved No.PF-OMO0005-F

PF-OMK0004-F PRODUCT NAME Flow sensor MODEL / Series / Product Number PFMV5## Table of Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 12 Definition and terminology 13 Mounting and Installation 14 Installation 14 Piping 16 Wiring 17 Troubleshooting 18 Specifications 19 Specifications 19 Characteristics data 20 Dimensions 22 -1No.

No.PF-OMG0010-H PRODUCT NAME Digital Flow Switch (Integrated display type) MODEL / Series / Product Number PF2A7##H Table of Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 11 Definition and terminology 12 Mounting and Installation 14 Installation 14 Piping 15 Wiring 16 Outline of setting 18 List of outputs 19 Function selection mode 20 F_0 Initialize

No.PF-OMO0014-D PRODUCT NAME Digital Flow Switch (Remote type sensor unit) MODEL / Series / Product Number PF2W5## Table of Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 12 Definition and terminology 13 Mounting and Installation 14 Installation 14 Piping 15 Wiring 17 Troubleshooting 21 Cross-reference for troubleshooting 21 Specification 22 Specifications

No.LFE*-OMY0008 / / / / / / / / LFE# SMC SMC SMC SMC 2 11 13 14 16 18 19 21 24 26 26 F1 OUT1 28 F2 OUT2 36 F3 40 F10 41 F20 45 F22 46 F30 47 F32 48 F33 50 F34 51 F80 52 F81 53 F82 54 F90 55 F98 56 F99 57 58 60 61 64 66 67 70 71 1 No.LFE*-OMY0008 (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

PAB*-OMY0018 PRODUCT NAME Process Pump MODEL / Series / Product Number PA5010 Contents Safety Instructions -P.2 to 3 Names and functions of parts P.4 Precautions P.5 to 9 Applicable Fluids P.10 Specifications P.11 Performance Curve P.12 to 13 Working Principle P.14 Maintenance Parts P.14 Piping and Operation P.15 Dimensions P.16 1 Safety Instructions These safety instructions are intended

Dynamic viscosity [cSt] Viscosity [mPas] Density [g/cm3] 1 [mPas1 [cP] 14 Working Principle 1. When air is supplied to P1 port, it enters drive chamber A. 2. Diaphragm A moves to the left, and at the same time diaphragm B also moves to the left. 3.

By this means pulsation is controlled. 14 Working Principle 1. When air is supplied, it passes through the switching valve and enters drive chamber B. 2. Diaphragm B moves to the right, and at the same time diaphragm A also moves to the right Control unit pushing pilot valve A. 3.

SUP=0.2MPa 8 6 4 2 0 1 2 3 4 5 Cycle (Hz) Hz 14 3) Viscosity characteristics With reference to the viscosity characteristic graph (shown below), discharge amount of transported fluid with higher viscosity can be calculated.

O O O 12 13 14 8 VN-OMP0002 Revision history 1st printing : Py 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved VN-OMP0002

SV Function 5.4 Operation of Controller 5-14 A_HEC-OM-J004-4 Chapter 5 Operation 5.4.10 Selection of EV Output Setting Mode Inputting 3 in the setting mode activates the event output setting mode. Each press of the [MODE] key changes the operating mode as follows.

Insert the cover. 14 XL*-OML0013-B Revision history Safety Instructions PQ Limited warranty and Disclaimer SR 1st Printing :MP 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All

Mount the needle seat or S valve seal assembly. 14 XL-OMP0003-A Step 6 Step 7 Tightening torque of bolt C Nm Bolt C O ring Model Tightening torque S valve seal Ass'y or Needle seat X*D-25 0.360.1 Other than X*D-25 0.630.1 Mounting surface of O ring Body Pilot port S Apply 0.3MPa of air pressure to the pilot port S.

(L250) (7)(9)(11)(12)(13) (14)(15)(16)(17) FGD-CA003 FGDT,F(L500) L500 (18) FGD-CA004 FGDC,E(L250) FGD-CA005 FGDC,E(L500) 7/11 FGX-OM-L007-C 2. 2.

A (1)(IEC79)ExdBT5 A ExdBT5 A) 164 ) B) () (1.5) 4 P368010-32 7.010.0 P368010-33 10.112.0 16 14 7.

1.5 ZS-31-X189 20 9 NPT1/8 NPT1/8 14 1.5 ZS-31-X175 29 13 R1/4 R1/4 17 1.6 ZS-31-X186 29 13 NPT1/4 NPT1/4 17 1.6 -14No.PS-OMG0005CN-E Revision history A B C D E [2018 7 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the

ON 23 4. 10. 24 5. 1 CG5SR CG5SV 2 15 3 16 NBR FKM 4 17 5 18 6 19 7 20 PET 8 21 9 22 10 11 12 13 14 1CG1 2 11. 25 Revision history 1: 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of

(M4),90 , -9 M4 1.5Nm -10 14 - 6-3. 5080 O 6-3-1. 4 50 : 12.5Nm 63 : 24.5Nm 80 : 42.0Nm -11 6-3-2. 1) -12 -12 2) 15 - 6-3-3. GR-S-010(10g),GR-S-020(20g) 1) 2) 3)O 4) -13 -13 6-3-4. 1)() -14 2)() -14 16 - 6-4. 6-4-1. B , 1 6-4-2. 7. 7-1.