CY1

40 50 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1R20 CY1R63 200 H 1000 100 Allowable driving force Fn (N) Allowable driving force Fn (N) 500 H 400 50 30 L 300 200 L 100 10 5 Useable range 20 30 40 50 Useable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 1112

LJ1H

(kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) 10 L1 0 1 2 3 4 5 Transfer load m (kg) 30 L2 20 L2 (mm) Mer m Rolling Yawing 10 L2 0 1 2 3 4 5 Mer Transfer load m (kg) m 30 a = 1000 a = 500 20 L3 (mm) a = 2000 L3 10 m Mey a 0 1 2 3 4 5 Transfer load m (kg) Refer to page 145 for deflection data. 88 89 Courtesy of Steven Engineering

CJ2

D-C7 D-C8 D-C73C D-C80C D-H7 D-H7C D-H7W D-H7BAL D-H7F D-A7/A8 D-A79W Bore B A B A B A B A B A 2 (8.5) B 2 (0.5) A 1 (7.5) B 1 (0) A 6 0 0.5 0 0.5 3 3.5 3 3.5 3.5 4 3.5 4 7.5 8 7.5 8 0.5 1 0.5 1 10 16 2.5 3 2.5 3 1.5 2 1.5 2 ( ) in the table: In case of double rod style, series CJ2W.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

3 r y e @6 @5 @3 $1 10 Component Parts No. Description Slide block No.

Micro Mechanical Valve Series VM1000

(R) 1 (P) Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 13 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

REA/REB

Static moment M2 = WL1 = 100.2 = 2 [Nm] 2 = M2/M2 max = 2/16 = 0.125 W = 1 [kg] = 10 [N] W Review M2. Since M1 & M3 are not generated, review is unnecessary. M L1 3. Dynamic moment We = 5 x 10-3WgU = 5 x 10-319.8300 = 15 [N ] Me3 = 1/3We(L2-A) = 1/3150.182 = 0.91 [Nm] 3 = Me3/Me3max = 0.91/10 = 0.091 Me3 Guide central axis We W L2 Review Me3.

KJ

10 16 10 17 24 14 19 25 20 22 20 22.5 20.5 23 21.5 23.5 24.5 22.5 24.5 25.5 21 1 8 17.5 2.5 15.5 10 9.6 1 4 1 8 2-Applicable tubing 21.5 5 32 18 3 16 10.4 10 1 4 1 8 1 4 22.5 22.5 24 24.5 25 26 26.5 27 3 16 19.5 3.5 11.4 16.5 10 1 8 1 4 3 8 13.2 20.5 4.6 17 1 4 10 Connection thread 1 8 1 4 3 8 5 16 15.2 23.5 6 18.5 12 46 27 24 31 30 29.5 30 27 26.5 1 4 17.46 3 8 1 2 3 8 17.9 25.5 7 21 17

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Terminal no.) (16.6) (23.7) Cable length (L) [m] Connector A (7.0) 1 3 2 4 (12.7) (5.6) 1 1.5 3 3 5 5 8 8 3 2 1 (13.5) 1 4 A 1 2 (6.7) B A 10 (18) B 15 (14.7) 15 16 (30.7) (1 1) L Connector B C 20 (10) Connector D Produced upon receipt of order Connector A terminal no. 1 2 3 Connector C terminal no. 1 2 3 Signal Cable color Red White Black U V W Weight Product no.

High Vacuum Angle Valve

magnet) Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-7 1.3 x 10-9 (FKM) None A B C Note 1) Standard lead wire length is 0.5 m.

MGP

2-Rc 3/8 (plug) DL GA GC 2-Rc 3/8 PB GB J JA 10 WB Q PA + Stroke C + Stroke B + Stroke A + Stroke WA Z JB 6H7 depth 10 FA FB S K E G 6H7 depth 10 With front lock 7 6 HN 10 5 6H7 DM 23 b a Section XX detail e c d End lock mechanism (Locking type manual release) T-slot dimensions (mm) 30 Bore size (mm) a b c d e With rear lock 13.3 20.3 12 8 22.5 80 15.3 23.3 13.5 10 30 100 (mm) Standard stroke

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Refer to page 645 for the connector assembly with cover for L and M plug connectors. 628 3 Port Pilot Solenoid Valve 10-SYJ700 Construction w r t q y e w r t q y e N.C. N.O. (A) 2 (A) 2 2(A) 2(A) 3(R) (P)1 3(R) (P)1 i i 3 (R) 1 (P) 3 (R) 1 (P) u u Component Parts Replacement Parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring No.

Electric Actuator with Integrated Guide

Model Allowable Moment (Nm) Allowable dynamic moment Model Mounting orientation Load movement direction LTF6 200 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep L1 (mm) Pitching 100 m a=1000 a=2000 a=3000 L1 30 20 10 0 Transfer load m (kg) L2 200 a=1000 a=2000 a=3000 Mer L2 (mm) Rolling Yawing 100 m L2 Mer 30 20 10 0 m Transfer load m (kg) 200 a=1000 a=2000 a=3000 L3 (mm) 100

CA2

9 @0 @1 @2 @3 q w e r t y u i o !0 !2 A A-A' Piston rod section A' !1 !3 !4 Component Parts Note Description Material No.

SYJ3000/5000/7000

To order connector cable only Connector dimensions (Ground) 4 SV Brown: 1 Blue: 3 Station 4 Station 3 Station 2 Station 1 Station 12 Coil 9 SZ 3 1 Black: 4 Side A Coil Side B Coil Side A Coil Side B Coil Side A Coil Side B Coil Side A Coil Side B Coil Side A Coil Side B Coil Triangle mark indicator position 33.9 SY L 35 10 1 3 5 7 23 25 Note) Connector SYJ 24 26 2 4 6 8 Part no.

1

Construction ZZ CXW 20/32 M L A 10 ZZ 15, 16, 25 (mm) A (Max.)

0.4

D side Stations U side 8 7 6 5 4 3 2 1 n SQ C10: 10 One-touch fitting C10 [3(R) EXH port] VFS 4 x G 1/2 Conduit port C10 [3(R) EXH port] (C12 in case of branch type) VFR 90.7 2.6 C10: 10 One-touch fitting (C12: 12 One-touch fitting) VQ7 DIN rail clamp screw R R 3 X 3 X 12 10 55.5 49.5 B B B B B B B B 12 P12 P 30 25 1 1 A A A A A A A A 13.5 33.5 (7.5) 25 P = 16 45 C10: 10 One-touch fitting

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

Integrated Controller

Weight [g] JX-CIS-E-1-S 88 JX-CIS-E-3-S 164 JX-CIS-E-5-S 265 JX-CIS-E-10-S 517 JX-CIA-E-1-S 88 JX-CIA-E-3-S 164 JX-CIA-E-5-S 265 JX-CIA-E-10-S 517 Power supply cable JX CD E S S 1 Connector type Cable length 1 1.5 m 3 3 m 5 5 m 10 10 m Symbol Specifications S Straight A Right angled Connector type: Straight Pin no.

ZP

Basic Pad Dimensions/Models Single unit 10 to 40 w q ZP D N 10 D Model A B C D E Y q Pad dia.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Fitting type LVQ E T Union elbow Union tee Class t Applicable tubing size LQ Class Applicable tubing size (mm) 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" Applicable tubing size (mm) 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 No. 2 2 3 3 3 4 4 5 5 No. 2 2 2 3 3 4 4 5 5 1 2 1 2 3 1 2 1 2 A B C A B A B A