Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -, Cushion: Air cushion, Operating Pressure(MPa): 0.1 to 0.7, Specification: Built-in magnet, Auto Switches: C73, Lead

Digital Pressure Switch

B Bottom hold mode Shows the minimum pressure reached at that moment. D Shows how precisely the pressure can be indicated or set by the digital Pressure switch. When 1 digit = 1 kPa, the pressure is given with an increment of 1kPa, e.g., 1, 2, 3, , 99, 100.

Precision Clean Regulator

0 q 9 Valve seat PTFE IRV 10 O-ring Fluororubber u w 11 Diaphragm Fluororubber VEX 12 Gasket Fluororubber SRH 13 Pressure regulator spring Steel wire Pressure regulator screw assembly 14 SRP SRP SRF ITV Dimensions IC ITVH 30.5 Bracket ITVX PVQ 40 A B SMC P K U C S O H L 36 VY1 51 31 30 Panel mounting hole VBA VBAT 40 AP100 8.5 28 20 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 1.6 Port

Series MY3A/3B Mechanically Jointed Rodless Cylinder/Basic Type ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Mechanically Jointed Rodless Cylinder/Basic Type Series MY3A/3B 16, 20, 25, 32, 40, 50, 63 How to Order B M9BW 16 300 HL Basic MY3 Type Short type (Rubber bumper) Standard type (Air cushion) Number of auto switches A Nil S n 2 pcs. 1 pc. n pcs. B Made to Order For details, refer to page 14.

Variable impact force

Example) 500 1 Unit 300 XT316 -40B XT316 -63B XT316 -80B XT316 -100B Consult factory 200 -30B XT316 100 1 2 3 4 5 6 7 8 9 10 11 12 Hopper thickness T(mm) 2

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: H (High Precision Type), Size: 40, Motor Type: T8 (400W Output, Absolute Encoder), Lead: B (LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 1000mm, Motor Option: B (w/Lock), Vacuum Port: R (Right), Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length: 5 (5m), Driver Type: 92 (LECSN2-T-9, 200~240V, Absolute

Precision Clean Regulator Series SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

HRX-OM-X010

HRZ Series 5.3 Operation Screen 5-11 5-11 HRX-OM-X010 Chapter 5 System Operation Unit of PUMP SP can be selected on Initial Setting screen 1.

HRX-OM-K003

Attach the front panel. 11. Connect the power cable to the power breaker on customer side (primary side).

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Type: T8 (400W Output, Absolute Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 200mm, Motor Option: B (w/Lock), Vacuum Port: Left, Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length: 5 (5m), Driver Type: 92 (LECSN2-T-9, 200~240V, Absolute, EhterNet/IPâ„

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: T6 (100W Output, Absolute Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 100mm, Motor Option: B (w/Lock), Vacuum Port: Left, Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length: 5 (5m), Driver Type: 92 (LECSN2-T-9, 200~240V, Absolute, EhterNet/IPâ„

Exhaust Cleaner Series AMC

ANR: 20C atmospheric pressure, relative humidity 65% 200 300 , 0.2 AMC-EL3 BE30 1,000 1 4 3 8 1 4 , 3 4 1 2 0.12 AMC-EL2 BE20 0.5 AMC-EL5 BE50 5-10-11

Diaphragm Valve for Ultra High Purity

Construction Diaphragm Seat Body 1110 B

Air Cylinder Double Acting, Single Rod JCM Series ø 20, ø 25, ø 32, ø 40

Refer to pages 11 to 13 for cylinders with auto switches.

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Type: S4 (400W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 200mm, Motor Option: B (w/Lock), Vacuum Port: Left, Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length: 5 (5m), Driver Type: A2 (LECSA2-S, 200~230V Incremental, Pulse Input

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: T7 (200W Output, Absolute Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 650mm, Motor Option: B (w/Lock), Vacuum Port: D (Both Left and Right), Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length: A (10m), Driver Type: E2 (LECSN2-T-E, 200~240V, Absolute

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: H (High Precision Type), Size: 32, Motor Type: T7 (200W Output, Absolute Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 300mm, Motor Option: B (w/Lock), Vacuum Port: Left, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Driver Type: E2 (LECSN2-T-E, 200~240V, Absolute, EtherCAT® Card)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: H (High Precision Type), Size: 32, Motor Type: T7 (200W Output, Absolute Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 300mm, Motor Option: B (w/Lock), Vacuum Port: Left, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Driver Type: E2 (LECSN2-T-E, 200~240V, Absolute, EtherCAT® Card)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: H (High Precision Type), Size: 32, Motor Type: T7 (200W Output, Absolute Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 300mm, Motor Option: B (w/Lock), Vacuum Port: Left, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Driver Type: E2 (LECSN2-T-E, 200~240V, Absolute, EtherCAT® Card)

VBA-OM-S001

No gap Booster regulator Air tank Booster regulator A B C D E F G H I J K L M Grooves There should be no damage or dust O-rings VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc 3/8 257 60 Rc 1/4 20 Air tank There is a slight play on the diagonal parts.