A

~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 26VDC or less 28VDC or less 24VDC (10~28VDC) 24VDC (10~28VDC) Yes/3 Wire (NPN) Yes/3 Wire (PNP) Yes/2 Wire Yes/3 Wire (NPN) Yes/3 Wire (NPN) Yes/3 Wire (PNP) Yes/2 Wire Yes/2 Wire Yes/3 Wire (NPN) Yes/3 Wire (PNP) Yes/2 Wire Yes/4

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Application Example qBlow off valve (SYJ llR) 3 5 7 wValve for vacuum control eOperation of a single acting cylinder rDivider valve (SYJ llR) tSelector valve (SYJ llR) yPressure release Valve (SYJ llR) 3 5 7 3 5 7 3 5 7 (SYJ llR) 3 5 7 3 5 7 3 5 7 (SYJ ll/SYJ ll R) X port X port X port X port X port Tank Tank 0.2MPa (R)3 2(A) (R)3 2(A) 2(A) (R)3 2(A) 2(A) 2(A) (R)3 (P)1 (R)3 (R)3 (P)1 Plug

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Round head combination screw M3 x 10, Matt nickel plated (with spring washer) 7 Round head combination screw M3 x 10, Matt nickel plated (with spring washer) Adapter plate SYJ700-3-3 A B A B 7 Adapter plate SYJ700-3-2 O-ring SYJ300-9-5 Manifold Gasket DXT199-21-11 15 15 15 R2 R2 Individual EXH spacer SJ7000-17-1 Individual EXH spacer SJ7000-17-2 Applicable manifold base Type SS5YJ7-20 Type

3 Port Air Operated Valve Series SYJA300 1

55.8 52 81.5 82.3 33.5 32.5 24 16 (P port) Rc 3/8, 1/2 A B Base mounted: VPA744V(A port) Rc 3/8, 1/2 16 119.5 (PA port) Rc 1/8 16 80 67 (R port) Rc 3/8, 1/2 2(A) NO 53 66 PA 40 3(R) 1(P) NC 2-6.2 (Mounting hole) Switch mark 55.8 52 81.5 82.3 33.5 32.5 24 16 (P port) Rc 3/8, 1/2 5-5-20 9 Series VPA300/500/700 Manifold Specifications How to Order 1 04 41 02 3 VV3PA Thread type SA Nil Rc G

HEC-OM-S008

09E1 10 [CR][LF] Answer 25.29 deg.C. 0041 Reading external Sensor temperature 1 :01 03 0041 0001 BA [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0043 Reading status 1 :01 03 0043 0001 B8 [CR][LF] :01 03 02 0005 F5 [CR][LF] Run with alarm 0044 Alarm flag 1 1 :01 03 0044 0001 B7 [CR][LF] :01 03 02 8000 7A [CR][LF] ERR15 :01 06 0050 0 A9 [CR][LF] :01 06 0050 0 A9 [CR][LF] Stop 0050

4/5 Port Air Operated Valve Series SYJA3000

range MPa 2 position double 3 position 2 position single Note 1) Pilot pressure range MPa 2 position double 3 position 10 to 50 (No freezing.

3 Port Air Operated Valve Series SYJA300

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

type) Normally closed Normally open Port size Bracket Series M5 01 M5 x 0.8 1/8 (10-SYJ700 only) Nil Without bracket F With bracket 3 5 7 10-SYJ300 10-SYJ500 10-SYJ700 3 port (Type 20, 21 manifold) 1 5 10 M SYJ 2 5 WAO M5 Body ported 5 1 SYJ 4 5 WAO 01 10 M Base mounted CE-compliant 3 port Nil Q CE-compliant Sub-plate type, type 40, 41, S41, 42, S42 manifold Body option Electrical entry

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

fitting for 6 n-C6, C8, C10, 02 Grommet (G) 34 (7.5) (3) 23.5 C8: One-touch fitting for 8 C10: One-touch fitting for 10 U side 02: Rc(PT)1/4 n A 2 A 2 Manual override 5 4 (L4) 3 (L3) L2 L1 2 P=20 P=20 19.5 1 23 9 Station D side 50 29.5 75.5 300 3.8 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 64 62 11.5 R P 29.5 34 3 1 PE port 2-Rc(PT)3/8 P(SUP) port M5 X 0.8 External pilot port (Only

F

14.29 9.6 10 17.5 25.5 24.5 15.5 2.5 18 5/32 1/16 KQL03-33S 11.11 10.4 10 18 22 23 16 3 8 5/32 1/8 KQL03-34S 11.11 10.4 10 18 22 23 16 3 9 5/32 1/4 KQL03-35S 14.29 10.4 10 18 26 25 16 3 18 3/16 1/8 KQL05-34S 11.11 11.4 10 19.5 22.5 24 16.5 3.5 10 3/16 1/4 KQL05-35S 14.29 11.4 10 19.5 26.5 26 16.5 3.5 19 1/4 1/8 KQL07-34S 11.11 13.2 10 20.5 23.5 26 17 4.6 10 1/4 1/4 KQL07-35S 14.29 13.2 10

SZ3000

Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications (1) Double wiring specifications 10 02 11 02 10 stations 11 stations Mounting position Symbol D 2 stations 2 stations Specified layout (2) (Up to 21 solenoids possible) D side Specified layout (Up to 22 solenoids possible) 20 20 20 stations 20 stations PG: Flat ribbon cable

5 Port Solenoid Valve SY Series

AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075 x 1 m AS4001F-10 SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 SY9120-03 SY9140-04 AS3001F-06 AS4001F-10 AS4001F-12 AN202-02 AN200-02 AN200-02 Conditions [When using SGP (steel

E-P HYREG ® Series VY1 1

Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4

VQ4000

port (21) (21) 5-Rc 1/4, 3/8 1(P), 4(A), 2(B), 5(R1), 3(R2) port 31 31 ( ): Rc 3/8 3 position double check: VQ465 0 1 2 position double: VQ425 3 position closed center: VQ435 3 position exhaust center: VQ445 3 position pressure center: VQ455 0 1 0 1 0 10 1 G H G H G H G H 178.5 105.5 73 42.5 50 Indicator light 164.5 178.5 11 (12.5) 4(A) port 11 (12.5) 2(B) port 59 73 42.5 105.5 Indicator

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Type 2 3 Elbow Universal Applicable tubing O.D. Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

E-P HYREG

sub-plate ITVH 02 14 03 38 04 12 4 ITVX A M5 M5 (3) (3) 1 01 18 (3) (3) 02 14 PVQ 3 02 14 03 38 04 12 VY1 VY1 VBA VBAT Body ported 5 04 12 VY1B0-X39 (5) 06 34 10 1 AP100 7 10 1 1 14 12 1 14 9 14 1 12 2 20 2 Note 3) Only bracket or foot may be mounted.

Booster Regulator/Air Tank

05 10 20 38 Drain valve/ VBAT-V2 22 (Width across flats 19) When the tank OUT port is 3/8, use 3/8 fittings.

Process Pump

A PAF3410S-1S13 PAF3410S-1S19 4 5 10 x 8, 12 x 10, 3/8" x 1/4", 1/2" x 3/8" 12 x 10, 19 x 16, 1/2" x 3/8", 3/4" x 5/8" 115 118 Applicable Fluids Material and Fluid Compatibility Check List for Process Pumps The data below is prepared based on data provided by the material manufacturers.

VCC

mountable number 3 port valve mountable number 00 02 04 00 02 04 No 2 port valves used 2 pcs.

VZ100/300/500

DXT170-176-2-01 DXT170-176-2-02 DXT170-176-2-03 DXT170-176-2-04 DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 For Series VZ300/500 With light/surge voltage suppressor With surge voltage suppressor 100 VAC 200 VAC 110 VAC 220 VAC 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC S E For VZ120 Indicator light is not available for grommet type.