48

1 1 6N q w e r t y !

Digital Flow Switches Series PF2A

PF2W520(T) PF2W540(T) PF2W511 PF2W704(T) PF2W720(T) PF2W740(T) PF2W711 0.5 to 4 2 to 16 5 to 40 10 to 100 PF2W30 PF2W20 PF2W33 For Deionized Water and Chemicals For Deionized Water and Chemicals P. 44 Remote type Flow rate measurement range l/min Display unit Display unit (4ch) Sensor unit PF2D504 PF2D520 PF2D540 PF2D20 0.4 to 4 1.8 to 20 4.0 to 40 PF2D30 Application Examples Application

Power Clamp Cylinder

2 Cover cap screw CKZ1N-S050 T P Note 1) 50 45 G CKZ1N-S063 T P Note 1) Switch cassette 63 60 F CKZ1N-S080 T P Note 1) 75 E 80 90 D q Switch actuator o Spring washer !0 Socket head cap screw 105 C CKZN-D050 Note 2) 120 B w Stopper bolt r Bumper !1 Seal washer 135 A 50 CKZN-B050 Note 2) CKZN-D050 CKZN-B050 CKZN-K050 Note 2) q Switch actuator o Spring washer !

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

t l t t m m R1 m m d Dd9 d Dd9 12 + 0.2 0 0.1 0.3 NX A1 U1 L1 7 12 Material: Stainless steel 304 Material: Pin and retaining ring both stainless steel 304 Material: Pin and retaining ring both stainless steel 304 Part no.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

Note LVH 1 y t r PP Actuator section Integral fitting type PFA LVD Stainless steel With reducer 2 Body Threaded type PPS LVQ i PFA 3 Diaphragm PTFE LQ1 End plate PPS 4 PFA body only Insert bushing 5 PFA LVN 6 PFA Nut t y PP Lever 7 TL/TIL PFA Collar 8 LQ3 Dimensions/Integral Fitting Type N G A D L 4 x M K Non-locking type Locking type 60 (H2) (H1) C B A E J B (F) Dimensions (mm) A B C D

High Power Cylinder Series RHC

3 y r t !1 A A Enlarged view of A Component Parts Description No.

1

Allowable Kinetic Energy [J] Bore size [mm] 20 25 32 40 Male rod end 0.11 0.18 0.29 0.52 Female rod end 0.11 0.18 0.18 0.52 18 fR: Allowable lateral load at rod end [N] Kinetic energy E [J] = (m1 + m2) V2 16 m1: Mass of cylinder moving parts kg m2: Load mass kg V : Piston speed at the end m/s 2 14 JCM40 12 JCM32 10 Table (2) Mass of Cylinder Moving Parts Without Built-in Magnet/0 Stroke 8

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

thread) AQ AP Finger closing port Vacuum suction port AN Finger opening port 4 x AK through (Thread for mounting attachment) S J O Auto switch mounting groove dimensions U X V AM AL 10 16 to 25 W AZ Finger option: Narrow type (N) AX When open AU AW AV AY (mm) H Q A J R B K S C L T D M E N F P G Model 11220 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.1 0 -0.1 0 -0.1 0 -0.1 MHZ2-10D 4 12 57 5 7.6 29

Series MLGP

t e 2 ) 1 pcs. 15 D-P3DW(A) 2 pcs. 15 1 pc. 5 N o t e 2 ) N o t e 4 ) 2pcs.

Series CE1

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No. No.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

6 r t !3 w q e !5 !0 !1 !

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size Dd9 d L L1 m t Included retaining ring Part no.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

of ge ge an an n r tio ta n r Ro +8 0 io Ro tat tat Ro 80 io t 1 n r fla an ge gle of sin +10 0 Ro tat 90 ion t 1 ra fla ng le e o ing f s With external stopper For 90 For 180 Single flat Single flat A n 5 5 gl e ge ge ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings show the rotation range for the shaft's single flat.

Table of Contents

Single Acting, Spring Return (S) Without auto switch: CU-S Single Acting, Spring Extend (T) Without auto switch: CU-T Standard Double Acting, Single Rod Without auto switch: CU-D (N) (N) (N) Model Model Model Stroke (mm) Stroke (mm) Stroke (mm) 5 10 15 20 25 30 40 50 60 70 80 90 100 5 10 15 5 10 15 CU6 CU10 CU16 CU20 CU25 CU32 CU6 CU10 CU16 CU20 CU25 CU32 CU6 CU10 CU16 CU20 CU25 CU32 0.085

VXF

Start-up speed = PM x 0.9 t MPa/ms 17-3-74 5 The VX series will be revised shortly.

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g

99

Dimensions A B 70 53 Element Dimensions A B Model EJ701S-T EJ801S-T EJ901S-T Applicable container 157 117 FGH100 286 246 FGH200 538 498 FGH300 71 Membrane Element for FGH Series ED Series RoHS Specifications Model EDS-X20 EDS-X40 Filtration accuracy (Filtration efficiency 99.9%) Note 1) 0.2 0.4 Length 247 mm 4,000 6,200 Filtration area (cm2) 495 mm 8,000 12,400 Heat resistant temperature

AS-FPQ/AS-FPG

AS-FG AS-FP AS-FP AS-FM AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 715

AS-FPQ/AS-FPG

AS-FG AS-FP AS-FP AS-FM AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 715