Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6H (ø6 One-touch Fitting, Straight Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)

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Manifold Regulator ARM1000/2000 Series

18 24 K 19 28 M 52 66 P 9 11.5 Q 11.5 16.5 R 4.8 4.8 A 4.5 4.5 B 25 34.5 ARM1000 ARM2000 IC ITVH Dimensions by the Number of Stations Manifold stations (n) ITVX Model Symbol 1 36 27 48 39 2 55 46 76 67 3 74 65 104 95 4 93 84 132 123 5 112 103 160 151 6 131 122 188 179 7 150 141 216 207 8 169 160 244 235 9 188 179 272 263 10 207 198 300 291 L1 L2 L1 L2 ARM1000 PVQ ARM2000 VY1 VBA VBAT AP100

Manifold Regulator Modular Type ARM2500/3000 Series

B C D E F G H I J K L M N O P Symbol Model A ITVH ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 ITVX 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 PVQ Manifold stations Dimensions by the Number of Stations 10 Model Symbol VY1 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 VBA VBAT ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration

Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

.: None, Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: J (Instantaneous Flow: L/min, Accumulated Flow: L, Temperature: °F), Bracket: R (w/Bracket), Calibration Certificate: None

.: None, Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: J (Instantaneous Flow: L/min, Accumulated Flow: L, Temperature: °F), Bracket: R (w/Bracket), Calibration Certificate: None

.: None, Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: J (Instantaneous Flow: L/min, Accumulated Flow: L, Temperature: °F), Bracket: R (w/Bracket), Calibration Certificate: None

End Lock Cylinder Series CBJ2

B L F D Basic Axial foot Front flange Double clevis Note) Lock position H R Rear end lock Front end lock Rail mounting CDBJ2B16-45-A Note) Front end lock only. Ex. Band mounting CDBJ2B16-60-B L 16 60 H N CBJ2 In case of the rail mounting type, screws and nuts for two auto switches are attached to the rail.

High Purity Fluoropolymer Fittings/Needle Valve/Tubing

LQ-GM 1, 2, 3, 4, 5, 6 L type M type High Purity Fluoropolymer Tubing P. 40 Series Tubing O.D. 4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" Material: Super PFA Metric size TL Inch size TIL Features 5

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C4H (ø4 One-touch Fitting, Straight Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter)

Size: 6, Motor Size: Standard, Lead Screw Type, mm: J (LEP*6: 8; LEP*10: 10), Stroke: 25mm, Motor Cable Mounting Direction: U (Bottom Entry), Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length, m: 3, Controller Type - LEC, JXC: C51 (JXC51, Parallel NPN, Step Data Input Type), I/O Cable Length for LEC: No Cable, Controller Mounting: 8 (DIN Rail Mounting), Communication

Size: 6, Motor Size: Standard, Lead Screw Type, mm: J (LEPS6: 8; LEPS10: 10), Stroke: 25mm, Motor Cable Mounting Direction: R (Entry on Right Side), Actuator Cable Type: S (Standard Cable), Actuator Cable Length, m: 3

Size: 10, Motor Size: L (Compact Type), Lead Screw Type, mm: J (LEPS6: 8; LEPS10: 10), Stroke: 50mm, Motor Cable Mounting Direction: Top Entry, Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length, m: C (20), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: No Cable, Controller Mounting: 8 (DIN Rail Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: None, Operation Manual: T (w/o Operation Manual, Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C6H (ø6 One-touch Fitting, Straight Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)