energy saving effect

SMC Thermo-chiller Variations Series Temperature stability [C] Set temperature range [C] Cooling capacity [kW] Environment International standards 1.2 1.8 2.4 3 5 6 9 10 15 20 25 28 HRSE Basic type 2.0 10 to 30 V V V Indoor use (Only 230 VAC type) HRS Standard type 0.1 5 to 40 V V V V V V Indoor use (Only 60 Hz) HRS090 Standard type 0.5 5 to 35 V Indoor use (400 V as standard) Outdoor installation

CHKD/CHKG

CHN CHM Examples of D-A9(V), M9(V), M9W(V), M9A(V) models mounted on CHKD.

Environment

B2 LECSB2/Pulse input (Absolute encoder) 200 V to 230 V C2 LECSC2/CC-Link (Absolute encoder) 200 V to 230 V !

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LAT Applicable Stroke Table*4 V: Standard Model Stroke [mm] LZ 200 300 400 500 600 700 800 900 1000 1200 1500 LEJS40 V V V V V V V V V V LEJS63 V V V V V V V V V V LC3F2 *4 Please consult with SMC for non-standard strokes as they are produced as special orders. For auto switches, refer to pages 142 to 144.

Aluminum High Vacuum Angle Valve

U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd. 417 XLA/XLAV Series Specifications Model XLA(V)-16 XLA(V)-25 XLA(V)-40 XLA(V)-50 XLA(V)-63 XLA(V)-100 XLA(V)-160 XLA(V)-80 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum XLA 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLAV 5 to 50 1 x 10-6 to atmospheric pressure Operating

1

Method of Mounting Two Auto Switches at the Stroke End of a Cylinder for Strokes Less Than 20 mm Auto switch model Applicable strokes 15 mm stroke 20 mm stroke 15 6 3 A 6 A 20 0.5 D-M9m(V) D-M9mW(V) D-M9mA(V) 0.5 3 6 B 6 B The correct mounting position of the D-M9 is 3 mm from the end face of the switch holder (dimensions A and B).

OMR0032

Turn ON No. 3 and No. 6, and (c) Differential input R3 = 120 turn OFF the others. ON ON ON 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 (a) Open collector input (24 V) (b) Open collector input (5 V) (c) Differential input 36 - (4) Pulse input circuit example i.

HRS100/150

SMC Thermo-chiller Variations HECR HEC Series Temperature stability [C] Set temperature range [C] Cooling capacity [kW] Environment International standards 1.2 1.8 2.4 3 5 6 9 10 15 20 25 28 HEB HED HRSE Basic type 2.0 10 to 30 V V V Indoor use (Only 230 VAC type) HEA IDH HRS Standard type 0.1 5 to 40 V V V V V V Indoor use (Only 60 Hz) HRS090 Standard type 0.5 5 to 35 V Indoor use (400 V

CQ2

V 32 40 50 20.5 M14 X 1.5 28.5 23.5 20.5 M14 X 1.5 28.5 23.5 26 M18 X 1.5 33.5 28.5 Z1 Built-in One-touch fitting (mm) W1 Without auto switch With auto switch Bore size (mm) P1 Z1 W1 60.5 68 82 W1 59 66.5 82 V 38 42 50 V 36.5 40.5 50 13 13 16 6 6 8 32 40 50 Auto switch shown above is D-A73 and D-A80. Refer to p.2.3-20 for auto switch mounting position and mounting height.

MY1

6 D-F9B(V) OUT(+) Brown [Red] D-F9NV, D-F9PV, D-F9BV M2.5 x 4 Slotted set screw 4.3 Main circuit of switch 2 Indicator light OUT() Blue [Black] 20 2.7 2.8 4.6 3.8 3.1 6.2 4 Most sensitive position 6 15 Solid State Switches with 2-Color Display: Direct Mounting Type D-F9NW(V), D-F9PW(V), D-F9BW(V) Specifications Grommet D-F9W, D-F9WV (with indicator light) D-F9NW D-F9NWV D-F9PW D-F9PWV D-F9BW

HRL

c u i t Contact output 4: OFF 8 3 Contact output 5: OFF 4 15 Users power supply usage example (Example 2) Contact output 1-5 common 5 1 Contact output 6: OFF 2 Power supply 24 VDC 24 COM 18 14 Contact output 6 common 3 4 24 COM +15 V 100 11 + Analog output 1: CH2 circulating fluid temperature 15 V 23 Analog output 1 common ANALOG COM 100 +15 V 10 + Analog output 2: CH2 electric conductivity

EXxx-OMQ0015CN

[GSDML ] PLC H.T Enable [Fault_MA] [Fault Mode] Disable 6 [Fault_MA] [Fault Value] 2 0 Enable 3 7 [Idle_MA] [] Disable 1ScaledH.T.Upr_LmtUpLm/SclLwr_LmtLwLm/Scl 2 3PLC STOP -46No.EX-OMQ0015CN . 0..10 V 0.00+10.45 V +0.05+10.50 V 0.00+10.50 V 0..5 V 0.00+5.22 V +0.03+5.25 V 0.00+5.25 V 1..5 V +0.75+5.22 V +0.78+5.25 V +0.75+5.25 V 0..20 mA 0.00+20.90 mA +0.10+21.00 mA 0.00+21.00

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

CXWM/CXWL

A73C A72H A73H E76A E73A F79 F7P J79 F79W 200 V Relay, PLC 2-wire 100 V 12 V Yes 24 V Connector 3-wire (NPN equivalent) IC circuit 10 5 V Grommet 2-wire 24 V Relay, PLC 100 V 12 V F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 10 16 20 25 32 3-wire (NPN) 3-wire (PNP) 24 V IC circuit 16 20 25 32 5 V, 12 V Diagnostic

CE

6 Port joint Stainless steel Valve seal NBR 40 to 63 #6 !

CE

6 Port joint Stainless steel Valve seal NBR 40 to 63 #6 !

EXxx-OMZ0016

Wireless Wireless Communication channel WEB distance Protocol Base Remote select function function (F.C.S.) 1 EXW1 EXW1 Up to 100 m V.1.0/V.2.0*1 Available*2 2 EXW1 EXW1+EX600 *3 V.1.0 NA 3 EXW1 EX600 Up to 10 m V.1.0 NA 4 EX600 EXW1 Up to 10 m V.1.0 NA Available*4 5 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*4 6*5 EX600 EX600 Up to 10 m V.1.0 NA Available *1: For more details, check

Compact Cylinder

D-F9BAL 5 5.5 6 6 6 6.5 D-A9(V) D-M9(V) 9 9 9 9 9 10.5 3 3.5 3.5 3.5 3.5 4 The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).

Compact Cylinder

M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NAVM9NA v v V v v IC circuit 3-wire (PNP) M9PAVM9PA v v V v v 2-wire 12 V M9BAVM9BA v v V v v Water resistant (2-color indicator) Water resistant type auto switches can be mounted on the

MLGP

6 6 6 6 6.5 Note) This is a standard including hysteresis, and is not guaranteed.