Modular F.R.L. Unit

Unit AC10A to 40A Dimensions AC10A, 20A A N F E P K C G G IN OUT Q Q B Pressure gauge (accessory) K H OUT Pressure gauge port size Square embedded type pressure gauge (accessory) J L Port size Lubricator M Drain Min. clearance for maintenance Filter regulator D AC30A, 40A A N F E P K C G G OUT IN B Pressure gauge (accessory) K OUT Pressure gauge port size J L Square embedded type pressure

High Purity Fluoropolymer

No. 1 1 2 2 3 3 3 4 4 5 5 6 6 Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 Applicable tubing size (inch) 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" Class 1 2 1 2 1 2 3 1 2 1 2 1 2 A A B C A B A B A B A B 15A 20A

Modular F.R.L. Unit

Unit AC10A to 40A Dimensions AC10A, 20A A N F E P K C G G IN OUT Q Q B Pressure gauge (Option) K H OUT Pressure gauge port size Square embedded type pressure gauge (Option) J L Port size Lubricator M Drain Min. clearance for maintenance Filter regulator D A N F AC30A, 40A E P K C G G OUT IN B Pressure gauge (Option) K OUT Pressure gauge port size J L Square embedded type pressure gauge (Option

3 Port Air Operated Valve Series SYJA300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc size VR VPA3145 VPA3165 VPA3185 Symbol Body size 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 VH 04 06 10 12 14 20 8 1 2 1 Valve option VHS Nil For general purpose (32A) 1 4 1 (40A) 1 2 1 Body ported

PA3145/3165/3185

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc size VR VPA3145 VPA3165 VPA3185 Symbol Body size 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 VH 04 06 10 12 14 20 8 1 2 1 Valve option VHS Nil For general purpose (32A) 1 4 1 (40A) 1 2 1 Body ported

V100

VQ Port size (IN, OUT port) Conduit terminal with indicator light TS Conduit terminal with surge voltage suppressor TZ Conduit terminal with light/surge voltage suppressor DL DIN terminal with indicator light DS DIN terminal with surge voltage suppressor DZ DIN terminal with light/surge voltage suppressor VKF Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol 03 (10A) 3 8 (15A) 1 2 (20A

VP3145/3165/3185

VQ Port size (IN, OUT port) Conduit terminal with indicator light TS Conduit terminal with surge voltage suppressor TZ Conduit terminal with light/surge voltage suppressor DL DIN terminal with indicator light DS DIN terminal with surge voltage suppressor DZ DIN terminal with light/surge voltage suppressor VKF Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol 03 (10A) 3 8 (15A) 1 2 (20A

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Without sub-plate VH VPA454/474 00 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 (32A) 1 4 1 (40A) 1 2 1 VHS standard 5 Body size 04 06 10 12 14 VPA450 Piping 3 4 standard 7 11 4 JIS Symbol 2 position double VPA4250/4270 0 Side ported 1 Bottom ported 2 position single VPA4150/4170 VPA470 4 W/o sub-plate Option Specifications Fluid Air 3 position exhaust center VPA4450 3 position closed center

VPA4

Without sub-plate VH VPA454/474 00 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 (32A) 1 4 1 (40A) 1 2 1 VHS standard 5 Body size 04 06 10 12 14 VPA450 Piping 3 4 standard 7 11 4 JIS Symbol 2 position double VPA4250/4270 0 Side ported 1 Bottom ported 2 position single VPA4150/4170 VPA470 4 W/o sub-plate Option Specifications Fluid Air 3 position exhaust center VPA4450 3 position closed center

VP4

Conduit terminal with indicator light DL DIN terminal with indicator light Piping Option EVS 0 Bottom ported 1 Side ported Port size Rated voltage VFN 4 Without sub-plate Applicable valve model Port size 1 100 VAC, 50/60 Hz Symbol Option Without sub-plate VP454 2 200 VAC, 50/60 Hz 00 3 110 VAC, 50/60 Hz VP474 4 220 VAC, 50/60 Hz (10A) 3 8 (15A) 1 2 03 04 5 24 VDC VP450 6 12 VDC 06 (20A

VQ5000

sbar)] 12 12 1 4/2 (P A/B) 0.33 0.33 b 0.33 3.4 3.4 Cv 3.4 2 position rubber seal VQ5 01 1 2 16 16 C [dm3/(sbar)] 16 4/2 5/3 (A/B EA/EB) 0.33 0.33 0.33 b 4.4 4.4 4.4 Cv Note) For port size Rc 1/2 Manifold Option Individual EXH spacer VVQ5000-R-1EXH block plate VVQ5000-16A-2 Blanking plate assembly VVQ5000-10A-1 Individual SUP spacer VVQ5000-P-103 04 03 04 Throttle valve spacer VVQ5000-20A

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ i VQD VQD1000-9-1H AXT632-7-13 (M1.7 x 18) o w Note) Body cannot be disassembled. 3(R) 4(A) 1(P) 2(B) 1(P) Valve Single Unit Option Piping plate assembly VQD1000-20A Manifold type (VQD1131) can be changed to single unit type (VQD1121) by mounting

VQZ1000/2000/3000

VQC SQ VQ0 Throttle valve spacer (For VQZ2000 only) VVQZ2000-20A-5 VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Mount a throttle valve spacer between manifold base and valve, and thus making it possible to control cylinder speed by meter-out.

VXZ

B N.O. 1/2 G 15 With surge voltage suppressor C 110 VAC Stainless steel D 200 VAC 5 20A H C37 N.C. 3/4 20 E 230 VAC C N.O. J Stainless steel F 24 VDC 6 25A N.C. K C37 Stainless steel 1 25 G DIN terminal 24 VDC D N.O.

Coolant Valve: Air Operated/External Pilot Solenoid VNC Series

CE-compliant Nil Q CE-compliant Note) Electrical entry: D or DZ only Manual override Valve size Valve type Port size Rated voltage Nil: Non-locking push type Nil Air operated Symbol Orifice diameter (mm) Symbol Port size Rc 1 2 4 3 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Symbol A: Non-locking push type A (projecting) N.C. 0.5 MPa N.O. 1 MPa N.C. 1 MPa 4 1 6A 8A 10A 10A 15A 20A

Size: 3 [ø20(ø14)], Valve Type: 4 [NC (Operating Pressure 1MPa)], Sealant: A (NBR seal), Thread: N (NPT), Port Size: 20A (3/4), Voltage: 5 (24VDC), Lead Wire: D (DIN Terminal), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: J (Stainless Steel; Port 3/4;, Orifice 20), Voltage/Electrical Entry: P (110VAC, Conduit Terminal w/Surge Voltage Suppressor)

Size/Valve Type: 5 (Size: 20A; Valve Type: N.C.), Body/Port/Orifice: L (Body Material: C37; Port Size: 3/4, Orifice Dia.: 20), Voltage/Electrical Entry: N (100VAC; Conduit Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread), Bracket: XB (w/Bracket)

Size/Valve Type: 5 (Size: 20A; Valve Type: N.C.), Body/Port/Orifice: M (Body Material: Stainless Steel; Port Size: 3/4, Orifice Dia.: 20), Voltage/Electrical Entry: J (110VAC; DIN Terminal w/Surge Voltage Suppressor)

Size: 3 [ø20(ø14)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: A (NBR Seal), Body Material: Standard, Pilot System Option: V (Vacuum Pilot), Thread: F (G(PF)), Port Size: 20A (3/4), Voltage: 5 (24VDC), Lead Wire: D (DIN Terminal), Manual Override: Non-locking Push Style, Bracket: None, X200: No, CE Compliance: Q (CE Compliance)