------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

Valve Mounting Direction: S (Solenoid on Same Side as A Port), Piping: 41 (Base Mounted), Stations: 10 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 10 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Base mounted VFS3000/5000/6000 series: ③ Base mounted VFS3000 to 6000 series
Manifold/01 type (with attachment plug lead wire): ④ Type 01 with attachment plug lead wire
Manifold/01T

Single/Base mounted VFR2000 to 6000 series: ① VFR series
Manifold/01T type (with terminal block): ② Type 01T with terminal block
Manifold/01C type (with multi-connector

LX

10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 40 40 2.6 2.6 1.3 1.3 0.3 0.3 0.1 0.1 80 80 1.3 1.3 0.7 0.7 0.2 0.2 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 2.6 40

CJ2

104 116 95.5 103 115 127 100.5 48.5 57 69 81 87 111 129 141 86.5 95 107 119 125 149 167 179 109 121 133 139 163 181 193 T mounting dimensions Bore TC TH TV TW TX TY 10 16 4.5 29 40 22 32 12 5.5 35 48 28 38 16 1.3-41 Built-in Speed Controller: Double Acting Single Rod Series CJ2Z 10, 16 How to Order Bore size 10 16 10mm 16mm Mounting Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125

Dual Rod Cylinder Series CXSJ/CXS

15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction flow rate of vacuum suction type (Reference

Environment

kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500 1500 Mep 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m L3 Z 500 500 500 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500

Parallel Style Air Gripper Series MHZ

14 4 4 6 10 14 4 4 6 10 14 6 10 16 20 25 6 10 16 20 25 6 10 16 20 25 Double acting Single acting type, Normally closed Normally closed Normally open MHZ MHF Single acting 3.7 12 31 56 83 MHL Refer to pages 436 to 440 for the specifications with auto switch.

Possible to transfer a workpiece at low-speed.

Applicable shaft types: S, W d1 = d1 = E3 = E1 = L2 = Y = L4 = L3 = Size 10, 15 Size 20, 30, 40 L1 = X = (mm) d1 Size 10 15 20 30 40 E4 = E2 = 2 to 3 2 to 4 2.5 to 3.5 3 to 5.5 4 to 7 (mm) (mm) L4 max Y Y L2 6 (9 Y) to Y 7 (10 Y) to Y Y 3 to 9 3 to10 L3 max X 2 X 2 L1 {10 (18 X)} to (X 2) {10 (20 X)} to (X 2) X 8 to 18 10 to 20 Size 10 15 Size 10 15 Symbol: A14 Symbol: A15 Symbol

Rotary Actuator

$Applicable shaft type: W $Applicable shaft type: W (mm) Y L2 Size (mm) 10 X L1 Size 3 to 8 5-( 8-Y) to (Y-1) 15 10 3 to 9 6-( 9-Y) to (Y-1.5) 9-(14-X) to (X-3) 5 to 14 Y = L1 = 20 15 3 to 10 7-(10-Y) to (Y-1.5) 10-(18-X) to (X-4) 8 to 18 L2 = 30 20 5 to 13 8-(13-Y) to (Y-2) 10-(20-X) to (X-4.5) 10 to 20 X = 40 30 7 to 15 9-(15-Y) to (Y-2) 12-(22-X) to (X-5) 10 to 22 Symbol: A11 The long

Rotary Actuator/Vane Style Series CRB2

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 Series CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63,80,100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P211070-13.

Electric Slide Tables

0.25 20 to 400 8 6 2 10 to 200 5 Step motor (Servo/24 VDC) Series LECP1 50, 100 4 1 20 to 400 10 9 4 10 to 150 8 50, 100 150 Series LECPA LESH25 6 2 20 to 400 16 Page 25 2 0.5 10 to 200 4 Symmetrical type/ L type LESH8A 50, 75 1 0.25 20 to 400 8 5 2 10 to 200 5 Servo motor (24 VDC) Series LECA6 LESH16A 50, 100 2.5 1 20 to 400 10 6 2.5 10 to 150 8 50, 100 150 R L LESH25 A 4 1.5 20 to 400

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

EX120/121/122

1 10 Connector for unit (Plug) o !

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Page Series Guide type Motor type Model Mounting orientation Ground ball screw Rolled ball screw 6 10 20 10 20 6 10 20 10 20 LTF6 LTF8 LTF6 LTF8 Page 60 to Horizontal 10 10 Page 68 to Standard Frame-type LTF motor linear guide 6 6 Page 76 to Vertical 10 10 Page 84 to Construction Page 92 Mounting Page 93