MU

M5 x 0.8 depth 11 M6 x 1 depth 11 M6 x 1 depth 12 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 M12 x 1.75 depth 15 M12 x 1.75 depth 18 Rod End Female Thread (mm) (mm) MM M6 x 1 depth 12 H 14 14 15 18 21 ZZ 91 98 105 127 131 The position of the four flats of the piston rod is 3 in relation to the cylinder side surface.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

23.5 28 34.5 36 Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 MGT Stroke range Bore size (mm) MM XA Y ZZ MA MB MC NA NB P S M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 6 6 12 12 16 16 20 5 6.5 8.5 9.5 12.5 15 20 106 128 155 178 195 221 248 11 11 16 16 16 16 20 4 4 4 4 5 5 6 10 10 12 12 15 15 23 19 26 21 34 86 107 120 138 150 171 198 20 25 32

MU

M5 x 0.8 depth 11 M6 x 1 depth 11 M6 x 1 depth 12 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 M12 x 1.75 depth 15 M12 x 1.75 depth 18 Rod End Female Thread (mm) (mm) MM M6 x 1 depth 12 H 14 14 15 18 21 ZZ 91 98 105 127 131 The position of the four flats of the piston rod is 3 in relation to the cylinder side surface.

Compact Guide Cylinder Series MGQ

74 19 17 26 M5 x 0.8 13 M5 x 0.8 7 18 60 Rc1/8 NPT1/8 G1/8 G1/8 20, 30, 40, 50, 75, 100 125, 150, 175, 200 12 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 8 26 70 Rc1/8 47.5 37.5 NPT1/8 Bore size T TA TB U V W X YY YL Z S (mm) 12 16 20 25 22 56 2 5 36 40 5 50 M4 x 0.7 7 12 25 62 38 42 7 54 M5 x 0.8 8 13 2.5 5.5 30 72 46 52 10 64 M5 x 0.8 8 13 2 4 38 86 56 62 10 76 M6 x 1.0 9 14 2 2 MGQM (Slide

CE

stroke 25, 50, 75, 100, 125, 150 94 69 15 6 25 42.5 M5 x 0.8 16 5.2 25 15.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5 M8 x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod nut and accessory bracket, refer to page 10-12-20.

CE

x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 For rod nut and accessory bracket, refer to page 10-12-20.

CE

25, 50, 75, 100, 125, 150 94 69 15 6 25 42.5 M5 x 0.8 16 5.2 25 15.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5 M8 x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod nut and accessory bracket, refer to page 10-12-20.

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Plug-in/Plug Lead: Single Unit

VQ0 55.5 M5 ground screw VQ4 34.5 U side n VQ5 12 X VQZ B 2 A 4 6 B A VQD B 2 A 4 SMC SMC SMC SMC SMC 5 B A A 4 B 2 4 B A L2 L1 A 4 B 2 3 B A A 4 B 2 2 B A P = 41 58.5 34.5 48 P = 41 A 4 B 1 B A 2 68.5 X 12 Stations D side 42 16 107.8 179 15.5 22 51 69 117 2-Rc 1/8 (External pilot port) Dimensions Formula: L1 = 41n + 76, L2 = 41n + 96 n: Stations (Maximum 12 stations) L n 9 445 465 8 404

Stroke Reading Cylinder and Counter

x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod end nut accessory bracket, refer to page 658.

LEC-OM07605CN

b LECSS2-T9 c 12 12 1560.5 6 420.3 M5 d a 4.9 /LECS / 1./ YES [ ]NO [ ] 2.

LEC-OM02904

12.5 . 5 12 1 12 12 (AE3) LE-S6-LE-S7-LE-S812.1 1 ON/OFF CYC CYC LS LS 1 1 LS0 CYC0 LEC-MR-J3BAT MR-J3BAT 1pul se/rev 1pulse/rev 1 1 12 2 12 12.2.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

+0.052 0 26H9 36 3-4H9 depth 4 +0.030 0 4 3 ( A , B , C ) 3-R2 3-R2 2-5.5 through 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5 2-5.5 through Angle adjustment bolt 6 Adjustment: Max.10.2 2-M5 x 0.8 1.5 7 +0.030 0 3-4H9 long groove depth 3 B port A port 0.5 ( A , B , C ) 4-M5 x 0.8 depth 10 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 11-5-12 These drawings indicate the

New

Thread depth N B 2 x P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal F Cable 6 to 12 Q D D S G1/2 Qp2 F 34 (44) 31.5 32 R 25 T C K C R E E Sp2 A A B1 2 x P 1 (IN), 2 (OUT) port B1 2 x P 1 (IN), 2 (OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H J H G1/2 (mm) Grommet Grommet (with surge Dimensions Size Port size A B B1 C D E F voltage



8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 2 M5 M5 AMR 1 4 2 1 (5) (5) Weight (kg) 0.15 0.18 0.2 0.3 0.5 1.4 2 4 ITV Note 1) No condensation.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

12-CY3R63 3.5 4.5 6 7 6.5 8.5 11 15 16 P (Piping port) Model Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 12-CY3R6 12-CY3R10 12-CY3R15 12-CY3R20 12-CY3R25 12-CY3R32 12-CY3R40 12-CY3R50 12-CY3R63 Note) The asterisk denotes the dimensions which are different from the 12-CY1R

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Can select female thread (M5 x 0.8).

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

200 201 to 1500 6 8 10 14 18 18 22 26 8 10 12 16 20 20 25 30 18 22 22 30 35 35 40 40 5 6 6 8 11 11 13 16 77 (85) 77 (85) 79 (87) 78 (87) 90 (102) 90 (102) 108 (122) 108 (122) 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 20 20 20 13 14 14 20 20 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Up to 300 301 to 1500 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22

Vacuum Pad

Dimensions: With Male Thread Adapter ZP3P-T20PTSF-A5 [Weight: 3.9 g] ZP3P-T20PTSF-AG1 [Weight: 5.9 g] 13 12 M5 x 0.8 G1/8 16 Width across flats 14 17 21.5 26.5 5 17 18.5 22 3.5 1.6 20 3 Width across flats 2.5 20 2.5 1.6 ZP3P-T25PTSF-A5 [Weight: 4.3 g] ZP3P-T25PTSF-AG1 [Weight: 6.3 g] 12 14 G1/8 16 Width across flats 14 17.5 22 27 5 17.5 19 22.5 3.5 M5 x 0.8 Width across flats 2.5 25 2.5 25