Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 19 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 19 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF
Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 19 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 19 Stations, A B Port Size: ø4 One-touch Fitting, P R Port Thread: -
Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 19 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 19 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 19 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 19 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 19 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -
Serial Transmission System Series EX250 Series EX500 Ports 2, 4 size (metric) Ports 2, 4 Symbol C3 C4 C6 M5 CM Ports 1, 3, 5 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting M5 threads Mixed size/with port plug Top ported elbow 3.2 One-touch fitting Top ported elbow 4 One-touch fitting Top ported elbow 6 One-touch fitting M5 threads Bottom ported elbow 3.2 One-touch fitting Bottom ported elbow 4 One-touch fitting Bottom ported
Suction: 100 L ZL1 Silencer Pressure switch for vacuum with energy saving function *3 ZL112 (Existing model): 450 g \ ZL1: 180 g Max. suction flow rate: 300 L/min (ANR) ZL3 Series Max. suction flow rate: 100 L/min (ANR) ZL1 Series Series Vacuum pressure [kPa] Max. suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Weight*6 [g] Page ZL1 84 100 57 180 p. 7 ZL3 93*4 300*5 135*4 390 p. 19
HEB Anchor bolt fixing position A Anchor bolt fixing position B HED 1100 (Dimension of anchor bolt fixing bracket) 756 136 1020 (Dimension of anchor bolt fixing bracket) HEA 12 x 12 670 43 670 138 8 x 12 IDH (850) (Thermo-chiller dimension) 700 (715) (Thermo-chiller dimension) 627 43 617 752 50 (954) (Thermo-chiller dimension) 19 76 984 19 (1035) (Thermo-chiller dimension) 1064 View A-A View
H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82
ST 10 20 30 40 50 9+ST 19 29 39 49 59 10+ST 20 30 40 50 60 37+ST 47 57 67 77 87 47+ST 57 67 77 87 97 CXSJ6-10 21-/2211-/12CXSJ6-20 CXSJ6-30 CXSJ6-40 CXSJ6-50 21-/2211-/1221-/2211-/1221-/2211-/1221-/2211-/12850 Dual Rod Cylinder/Compact Type CXSJ 2122CXSJ/ 1112Dimensions: 10 16 17+ST 4 x M3 x 0.5 thread depth 4.5 3.5 8 7.5 2 x M5 x 0.8 thread depth 4 (Piping port) 21 8 Steel ball 34 M3 x 0.5
x 0.8 10.9 42.4 48.7 15 36.7 41.7 18.5 12 17 R 1/4 1/8 ASN 14.4 50 56.2 19.8 41.9 46.9 23 12 19 R 3/8 1/8 AQ 18.3 61.8 70.3 26.5 57.3 64.8 28.6 17 24 R 1/2 1/4 25.9 ASV Reference dimensions of R thread after installation.
A 24 V100 M5 thread 8 deep, with or without insert depending on base material. SY 32 SYJ A' VK Coding stud.
A 24 VK M5 thread 8 deep, with or without insert depending on base material. VZ 32 VF A' VFR Coding stud.
Refer to P.19 for assembling method. NPN output PNP output M8 8 Pin connector (plug) PIN No.
A 24 VK M5 thread 8 deep, with or without insert depending on base material. VZ 32 VF A' VFR Coding stud. M5 x 10 DIN913-45H VP4 12 2 8 VZS G 1/4 DIN/ISO228/1 M5 Drive flange face VFS VS4 19.5 5.5 Solenoid valve flange face O-ring 16 x 2 VQ7 1.5 3 EVS VFN The solenoid valve can be attached with 2 mounting bolts.
. * If the step motor and servo motors do not meet your specifications, also consider the AC servo specification (Page 46). 38 Model Selection LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication For the LECPA, refer to page 40.