HRX-OM-Y120

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure *1 Alarm flag 1 6 Air exhaust fan failure *2 7 Reservation 8 CH1 abnormal rise of circulating fluid

JXCx-OMY0004

Please take appropriate countermeasures in accordance with alarm content in reference to the controller Operation Manual. 15. Alarm for Motor Control (P.64) SF Red LED is ON. Alarm generated Check the content of alarm Refer to the controller operation manual and take appropriate measures. 15.

Thermo-con

External sensor connector (EXT.SENSOR) D-sub 15 pin (socket) Holding screw: M2.6 4 5 6 3 8 7 1 2 Pin No. Signal contents 1-2 Unused 3 Terminal A of resistance temperature detector 4 Terminal B of resistance temperature detector 5 Terminal B of resistance temperature detector 6-14 Unused 9 15 14 13 12 11 10 15 FG 4.

33

of 20%, V 1120 [W] x 1.2 = 1344 [W] After 15 minutes, cool 32C down to 20C.

Plug-in Unit

A (+) () () (+) 15 15 Station 8 Station 8 SOL. B SOL. B (+) () () (+) 16 16 Hirose Electric CO., Ltd. Sumitomo/3-M Limited Fujitsu, Ltd. Japan Aviation Electronics Industry, Ltd. J.S.T. Mfg. Co., Ltd. Oki Electric Cable Co., Ltd. SOL. A SOL. A (+) () () (+) 17 17 Station 9 Station 9 SOL. B SOL. B (+) () () (+) 18 18 SOL. A (+) () 19 COM (+) () 19 Station 10 SOL.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VP7 285.5 21 273 No.

SI Unit for Vacuum Manifold

Configuration 15 3.1. GSD file and symbol file 15 3.2. Head modules 15 3.3. Modules 16 3.4. Sub modules 17 3.5. Configuration steps 18 4. Parameter 19 4.1. Module parameters for Vacuum / Release module 19 5. Process data 23 5.1. Process data on Vacuum / Release module 23 5.2. Process data of Pressure value / Channel status module 27 5.3. Process data of Unit status module 28 6.

JXCx-OMT0001CN

) ) 1 2 (+)(-) 14 M PWR 1 2 15 ENC3 (16 ) 3 16 MOT3 (6 ) 17 ENC4 (16 ) 4 18 MOT4 (6 ) ) (+) 3 (+) 3 (+) 19 CI 3 4 4 (+)4 (+) ) 3 4 (+)(-) 20 M PWR 3 4 21 P1, P2 EtherNet/IP EtherNet -28No.JXC-OMT0001CN-C ) 6.

Fieldbus system Ethernet POWERLINK compatible SI unit

2006h 00h DXD, IN 0 15 (Slot 2) RO : : : 2020h 00h RO *1: RO means Read Only data.

MHZ2/MHZJ2

Dimension table Unit: mm Model A B D2 E D1 -0.016 -0.043 12f8 15 7 11 52.8 MHZ2-10 -0.016 -0.043 16f8 20 10 15 58.7 MHZ2-16 -0.020 -0.053 20f8 22 12 19 70.5 MHZ2-20 -0.020 -0.053 25f8 25 15 24 82.9 MHZ2-25 Other dimensions and specifications correspond to the standard type.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A SOL.B SOL.A SOL.B (+) () () (+) 15 15 Oki Electric Cable Co,.

Compact Rotary Actuator

21.5 19 25.5 10 75 3 180 18 31 22 35 63 12 360 25 52.5 29 56.5 90 18.5 27 22.5 31 15 69 3 180 22.5 39.5 26.5 43.5 52 9 360 30.5 64.5 34.5 68.5 90 36 48.5 40 52.5 20 56 4 180 42 67.5 46 71.5 41 9 360 55.5 106 59.5 110 90 43 59 47 63 30 43 3 180 51 82 55 86 32 7 360 62 125.5 66 129.5 90 50 69 54 73 40 36 4 180 59.5 97.5 63.5 101.5 24 5 360 72.5 152 76.5 156 Operation angle The value in which

JXCx-OMT0005CN

(OUT05)OFF (1) IN0 3INPOFF (9) PLC 4BUSYON IN1 (7) 5DRIVEOFF OUT0 (15) 6No.1 ON (OUT0ON) 7INPON OUT1 (14)(11)(6)(3) INP (16)(12)(8)(4) BUSY *1 8BUSYOFF No.1 9No.2(IN0OFF IN1ON) 10DRIVEON () 10mm ... No.

Step Motor Driver （ Pulse input type ）

(1) Confirmation of the package content . 15 (2) Installation . 15 (3) Wiring and connection . 15 (4) Power ON alarm (error) . 15 (5) Operation pattern setting . 16 (6) Trial run (Electric actuator adjustment) . 16 3.

Digital Flow Switches

PF2D5--1 (With voltage output type) PF2D540-19 Display unit (PF2D30/31) 186 Sensor unit 78 86 Brown 6 2 Analog output Switch output or Pulse output Main circuit Main circuit 56 8 4 Load + 12 to 24 VDC 15 White 7 3 Black 5 1 Blue Load is an analog input equipment such as a voltmeter.

Micro Mechanical Valve Series VM1000

(Pre-Travel) 1 VH VHS 4 x 5.1 mounting hole 4 x M6 x 1 Thread depth 15 VHS 3 x 1/8 3.0 mm T.T. 2.0 mm O.T. 1.0 mm P.T. 23 N F.O.F. 2315 Series VM800 Series VM800 Roller lever VM830-01-01 Stainless steel sintered roller 17.4 x 7.1 Symbol (OUT) 2 10 12 3 (N.C.) 1 (N.O.) 4 x 5.1 mounting hole Hexagon socket head cap screw M5 x 12 4 x M6 x 1 depth 15 50 T.T. 30 O.T. 20 P.T. 20 N F.O.F. 3 x 1/

AC Servo Motor Driver (Pulse input type/Positioning type)

COM3 15 LA Encoder A-phase pulse (differential line driver) Y004 CR 5 16 LAR (Note 15) COM2 17 LB Encoder B-phase pulse (differential line driver) 18 LBR X INP 10 19 LZ Encoder Z -phase pulse (differential line driver) 20 LZR X X RD 11 21 14 LG SD Control common OP LG Plate 14 SD Plate (Note 7) (Note 3, 5) Forced stop CN1 EM1 8 Servo-on SON 4 Reset (Note 10, 11) RES 3 Forward rotation stroke

MLGP

Applicable Auto Switch/Refer to page 9-15-1 for further information on auto switches.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

thread Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 1/2 15 to 30 14 to 15 By chamfering as shown in the table below, machining of threads is easier and effective for burr prevention.

MLGP

For detailed specifications, refer to page 9-15-1.