Nozzle Type Ionizer

8 5 Width across flats 12 10.6 17 Nozzle Type Ionizer IZN10E Series Dimensions L-bracket IZN10-B1 17 (Mounting angle adjustable range) 40 2 x M3 7.5 2 x 3.4 2 x R10 25 5 40 50 Internal mounting 2 x 3.4 20.5 33 30 30 52 46 44 26 17 11 26 12 8 x 3.4 2 x Hexagon socket head cap screw M3 x 6 (Accessory) 40 5 22.7 Internal mounting Pivot mounting 21 33 30 (Mounting angle adjustable range) (83)

Compressed Air Preparation Filter

15 16 0 2 1 3 4 5 6 7 8 9 Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] 6 AFF/AM/AMD Series Micro Mist Separator AMD Series Standard Specifications Model AMD70D AMD80D AMD90D Fluid Compressed air Operating pressure range [MPa] 0.1 to 1.0 Ambient and fluid temperatures [C] 5 to 60 (No freezing) Proof pressure [MPa] 1.5 Maximum flow capacity*1 [m3/min

1.63

MGP (mm) MGPW MGPW Bore size (mm) GC PA PB MGQ 20 25 32 40 50 63 9.9 23.5 10.5 10.3 25 13.5 MGG 11.4 31 16 13.5 31 18 MGC 14 35 21.5 15.5 36 28 MGF MGZ MGT PB PA GC D-X 517 MGPW Series Specific Product Precautions Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 3 to 12 for Actuator and Auto Switch Precautions.

CC

Load ratio RS Q G RS H A Bore size (mm) Bore size (mm) Bore size (mm) RZQ CCVL20/21/22/23 CCVL02 CCVS30/31/32/33 Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) MI W S CEP1 CE1 CE2 No load No load Load ratio Load ratio ML2B C J G5-S Bore size (mm) Bore size (mm) Bore size (mm) CCVL10/11/12/13 4.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP This is used when changing piping location.

DOC1020530

Startup . 10 3.1 Startup procedure. 10 3.2 Procedures for actuator operation . 11 3.3 Setup software (MR Configurator2TM ) . 12 3.3.1 Installation method . 12 3.3.2 Startup setup software (MR Configurator2TM) . 12 3.3.3 System settings . 13 3.3.4 Model selection. 13 3.3.5 Driver ON LINE check . 14 3.3.6 Help function . 14 4. Parameter setting . 15 4.1 Operation modePr.

PSxx-OMV0008CN

No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -78No.PS-OMV0008CN-E No.

High-precision Digital Pressure Switch

Remarks Bracket A ZS-50-A With 2 mounting screws M4 x 6 Bracket B ZS-50-B With 2 mounting screws M4 x 6 Orifice ZS-48-A ZS-31-B Straight: 5 m Lead wire with M12 connector ZS-31-C Right angle: 5 m -9No.PS-OMV0009-E Summary of Product parts Names of individual parts Body Power supply/output connectors: Connects the power supply/output lead wire.

VDW

(mm ) Port size 12 (INN.C.) 13 (INN.O.) 12 (INN.C.) 13 (INN.O.) Model Cv converted Cv Cv converted Av x 106 m2 Av x 106 m2 b Cv b N.C. N.O.

155

29 14.5 103.3 111.3 155.8 26 26 52 4.5 44.5 25 26.3 115 74.2 1/2 63 49.6 29 14.5 103.3 111.3 155.8 26 26 52 4.5 44.5 25 26.3 115 74.2 3/4 80 59 35 17.5 112 120.5 165 35 31 62 5.5 48 30 31 124.2 80.1 1 90 74 44 22 135.9 144.5 189 40 36 72 6.5 60 35 39.5 148.2 91.1 382 Coolant Valve Series SGC Dimensions External pilot solenoid type (DIN terminal) PP J Pilot port 2 x 1/8" (Back side PE: Filter

Air Fittings Fitting Series For Special Environment

(mm) Effective orifice(mm 2) A D1 D2 L1 L2 1 8 KRL06-02S KRL06-01S 12.8 10.8 33.8 13.9 21.9 35.9 26.3 27.3 37.3 10 27.5 23 27 29 24.5 28.5 30.5 27 30 32 36 31 33 37 1 4 10 22 6 31 29.5 19 5.0 14 17 12 14 17 16.8 3 8 1 8 KRL06-03S 30 14.9 KRL08-01S KRL08-02S KRL08-03S KRL10-01S KRL10-02S KRL10-03S 1 4 3 8 1 8 1 4 3 8 32 33.5 34.4 35.4 36.9 8 19.2 12 25 20.5 14.9 17 23.3 10 17 28.5 23 25.0

energy saving effect

Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions.

PFxx-OMJ0005CN

No.PF-OMJ0005CN-I () // PFM7## 2 10 13 14 14 16 17 20 22 22 F0 23 F1 OUT1 24 F2 OUT2 27 F3 28 F4 29 F5 30 F6 31 F7 32 F8 35 F9 36 F10 38 F11 39 F12 40 F13 41 F98 42 F99 44 45 49 50 53 54 54 57 59 73 -1No.PF-OMJ0005CN-I (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

fittings Mounting female thread recommended dimensions G1/4 7 or more 9 to 13 C0.5 or less 4 or less Bottom seal Seal material: Nylon VCKH Male connector Width across flats E B A After tightening manually, tighten 1.5 to 2 more turns.

MLGC

160 176 125 165 M 8 160 115 4 11 12 142 95 18 19 96 42 35 67 190 210 135 200 M10 194 P GL GQ GR I J K L M N O Q R S T U V W Bore size (mm) 20 25 32 40 93 60 5.5 80 M5 x 0.8 4 4 35 50 25 14 26 16 53 50 105 M6 x 1 112 103 70 9 95 M5 x 0.8 7 7 40 60 32 14 31 20 63 60 125 M8 x 1.25 132 104 70 9 95 Rc 1/8 Rc 1/8 7 7 40 60 32 13 38 20 63 60 125 M8 x 1.25 132 115 82.5 11 115 8 8 45 75 38 14 47

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

75 7 94 86 8 105 97 9 116 108 10 127 119 11 138 130 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215 207 19 226 218 20 237 229 L1 L2 1.13-11

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

13 01: R 1/8 T1: NPTF 1/8 Dimensions/Base Mount Type: ZSE2-0R Grommet type: ZSE2-0R-15 Connector type: ZSE2-0R-15C Pressure setting trimmer Indicator light (Red) Pressure setting trimmer Indicator light (Red) H SET L H SET L 15 15 9 9 2 x M2.5 x 41L Mounting thread 25 25 2 x M2.5 x 41L Mounting thread 31 31 9 600 (3000) 9 600 (3000) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum

Information

When it is OFF (alarm occurs), stop the sequencer signal using the sequence program. 13 Series LECSm Control Signal Wiring Example: LECSS 10 m or less 10 m or less LECSS Note 4) Note 4) Note 2) CN3 CN3 24 VDC MBR DICOM 5 13 RA1 D0COM 3 Electromagnetic brake interlock Note 2) RA2 9 INP Forced stop EM1 20 In position D11 2 Upper stroke limit (FLS) 15 ALM RA3 Failure Note 3) D12 12 Lower stroke

Air Cylinder

62 13 M8 x 1.25 7 19 13 M22 x 1.5 26 1/4 83 158 85 Up to 500 40 37 95 32 74 22 45 12 13 62 13 M10 x 1.25 7 19 14 M22 x 1.5 26 1/4 83 159 100 Up to 500 40 37 110 41 87 26 50 10 14 66 16 M10 x 1.25 12 23 14 M26 x 1.5 28 3/8 88 168 Rod end nut (Standard) 30 d D C H B [mm] Part no.

MLGC

160 176 125 165 M 8 160 115 4 12 11 142 95 19 18 67 190 210 135 96 200 M10 42 194 35 J K L U I O T GR N S W P GL GQ M Q R V Bore size (mm) 20 25 32 40 93 60 5.5 80 35 16 4 25 26 50 M5 x 0.8 4 50 14 53 105 M6 x 1 112 103 70 9 95 40 20 7 32 31 60 M5 x 0.8 7 60 14 63 125 M8 x 1.25 132 104 70 9 95 40 20 7 32 38 60 Rc 1/8 Rc 1/8 7 60 13 63 125 M8 x 1.25 132 115 82.5 11 115 45 25 8 38 47 70 8