IZ-OMK0015

3 2 Installation distance: 10 mm 1 Installation distance: 25mm Installation distance: 25mm 0 -2000 -1500 -1000 -500 0 500 1000 1500 2000 Charged potential [V] Sensor head Installation Detection range distance (mm) (mm) Installation 10 45 distance 25 100 Detection port 50 180 Detection range 30 Doc.No.IZ-OMK0015D Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel

70pvvna

In this case, pilot solenoid valve is VO307-DZ. 17-4-6 3 Series VNA Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control Model Flow characteristics Measured by air Measured by water Note) Weight (kg) Orifice size (mm) Air operated Model Port size Rc Cv Av x 10-5 m2 b External pilot solenoid C [dm3/ (barsec) ] VNA1-6A VNA1-8A 1 8 1 4 10 0.88 1.5 1.9 3.8 4.8 7.5 25

c

Features 1 Fluoropolymer Tubing (PFA) Metric Size Series TLM RoHS Series Metric size Size TLM0201 TLM0302 TLM0425 TLM0403 TLM0604 TLM0806 TLM1075 TLM1008 TLM1209 TLM1210 TLM1916 TLM2522 TLM1613 Model Tubing size 2 x 1 3 x 2 4 x 2.5 4 x 3 6 x 4 8 x 6 10 x 7.5 10 x 8 12 x 9 12 x 10 19 x 16 25 x 22 16 x 13 O.D. (mm) I.D.

ZL3-OM00801

No.ZL3-OM00801-A / / ZL3 ZL6 No.ZL3-OM00801-A 2 1. 5 2. 6 3. 7 3.1. 7 3.2. 8 3.3. 9 3.4. 10 3.5. 12 4. 13 5. 14 6. 15 7. 16 8. 20 9. 21 10. 24 11. ,, 25 11.1. 25 11.2. 26 11.3. 26 12. 27 13. 28 1 - No.ZL3-OM00801-A /ZL3ZL6 *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

RSH

20 7 8 36 32 64 20 73 93 16 128 30 221 45 9 63 18 depth 6 103 107 24 12.5 20 8.5 10 45 40 77 25 90 114 24 144.5 30 251.5 54 11 80 20 depth 6 132 128 35 12.5 25 10 10 45 50 98 25 110 138 24 171.5 40 299.5 56 13 SRSH Bore size A, #1 (#1+#5) : RSH Bore size -lll Basic w/locking mechanism w/cancel cap w/lever detection switch w/locking mechanism + cancel cap w/locking mechanism + lever detection

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

0.1 ASS 0.2 10 ASR 0 0 0 0 0 0 10 20 5 10 5 10 ASF Number of needle rotations Number of needle rotations Number of needle rotations 15-9-65 10 Series AS-FM Construction Component Parts No.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

0.7 29 40 30 10 70 3.5 20.9 4 25 2.5 25 5 14 MXY12 M5 x 0.8 31 52 40 15 86 8.5 30.9 5 3 36 32 6 18 PH TB Z T WR RL QW R RH WE WD Q W PR P PL TH Model MXY6 5.1 2.9 88 4 12 60 5 7 30 11 13 3(depth 3) 3(depth 3) 2.5 9 20 25.5 MXY8 6.1 98 3.4 4 15 70 6.5 7 38 19 13 3(depth 3) 3(depth 3) 3 10 25 32 MXY12 7.8 114 4.5 21 5 8.5 90 7 50 29 18 4(depth 4) 4(depth 4) 4 13 33 42 n QL Model 50 100 150

5 Port Solenoid Valve Series SQ1000/2000

or less 95 Metal seal 13 or less 0.1MPa 0.2MPa Double 3 position (double solenoid) 4.5 (0.25) SQ1231D 15 or less 95 Rubber seal 20 or less 0.15MPa 4 position 2.9 (0.16) Closed center SQ1330 20 or less 100 Metal seal 26 or less Ambient and fluid temperature 10 to 50C Note 1) SQ1000 3.2 (0.18) SQ1331 25 or less 100 Rubber seal 33 or less Not required Lubrication 3.2 (0.18) SQ1430 20 or less

3 Port Air Operated Valve

Applicable manifold base model VP300-25-1A VV3PA3 Blanking plate assembly (With a gasket and two mounting bolts) VP700-25-1A VV3PA7 VP500-25-1A VV3PA5 1569 VPA300/500/700 Series How to Order Valve (With a gasket and two mounting bolts) VPA 3 4 4 1 A Type of actuation A B N.C. (Normally closed) N.O.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

VCHC ASR ASQ ASD230F ASD330F ASD430F 100 200 400 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 07,08,09,10,11 300 06 200 50 100 100 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 12 10,11 10,11,12 08,09 1000 500 06,07 500 0 5 10 0 5 10

CRQ2

plated 20, 30, 40 with cushion Steel wire Hexagon nut with flange Cushion valve assembly 25 11 26 Cushion pad Elastic material 10, 15 Zinc chromated Steel wire Round head No. 0 Phillips screw 12 10, 15 nickel plated 13 Round head No. 0 Phillips screw Steel wire 20, 30, 40 nickel plated Round head Phillips screw Replacement parts Kit number 10 15 20 30 40 Contents Description P473010-1 P473020

Large Size Vacuum Module: Series ZR

ZS-10-5A-50 . 1 pc.

NCA1

Please See Below for How to Order Piston Rod Assembly 7 Rod Bushing Bronze casting Available only as an Assembly Please See Rod/Head Cover NC1A400-10-124 NC1A200-10-124 NC1A250-10-124 NC1A325-10-124 8 Cushion Valve Carbon steel NC1A150-10-124 9 Tie Rod Carbon steel Please See Below for How to Order Tie Rod NCA325-13-Q6311 5008-131 NCA325-31-Q6311 NCA200-13-Q6309 5008-93 NCA250-13-Q6309 5008

RZQ

Confirm the internal stopper strength at extension and retraction ends in the graph on page 10-10-8.

Digital pressure switch for energy-saving control ejector

Normal output Pressure setting Sets the ON or OFF point of the switch output. -70 kPa(P_1) Hysteresis Set the hysteresis to prevent chattering. 10 kPa(H_1) [F 2] Setting of OUT2 Refer to page 25 Same setting as [F 1] OUT1.

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

HRX-OM-W069

Fig.1-3 shows the location of the communication port. 1 6 Serial communication connector D sub 9 female pin (socket) type 9 5 1 14 Contact input / output signal connector D sub 25 female pin (socket) type 25 13 Fig.1-3 Communication port 1.3 Communication port HRL Series 1-4 HRX-OM-W069 Chapter 1 Read before using 1.4 Touch panel flow Press the [Comm.

Digital Pressure Switch

We show the temperature characteristics for 0 to 50[oC] or -5 to 50[oC] based on data at 25[oC]. Ex.)

P

(mm) ZX Pad diameter (mm) Lock ring 1 2 10 to 16 20 to 32 02 04 2 4 -X19 With lock ring Without lock ring (10 or larger) ZR 3 40, 50 06 6 08 8 ZM Material 10 10 N S NBR Silicon rubber 13 13 ZH 16 16 U Urethane rubber Pad style 20 20 ZU F Fluorine rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 GSConductive silicon rubber (2 to 16) 40 40 D Deep ZL 50 50 B Bellows 20

Direct Solenoid

Mtrual opralor assmbly $llh Odng PA0@1 PBO{01 I 1 Raplacdr3nl coll only-4.C. sol6nold 1Al0 aot@ 1O/@ cl2A{9 cl2A-10 cl2A.1t 10 I Sol6noi, aBsmbly-4,C. conplst wllh coll, 120/ao 24(m0 a0,t0 @14O9 @ta-10 cora-1t At2A{9 412A,10 1 l '| NXT01010 NXT0307.3 12 1 NXTO1G12 NXTO1G12 13 @t|vo scr6w .nd locl wa5hsr xTt)10-21 xT010.21 DIRECTIONAL AIR YALVE MANIFOLD ASSEMBLY SERIES NVS 3115, 3125 NVS 3135