Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 10 (1), Output Specification/Temperature Sensor: L2 (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 10 (1), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 10 (1), Output Specification/Temperature Sensor: LT (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 10 (1), Output Specification/Temperature Sensor: LT (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: Instantaneous Flow: gal/min; Accumulated Flow: gal; Temperature: °C, Bracket

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 10 (1), Output Specification/Temperature Sensor: L2 (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: Instantaneous Flow: gal/min; Accumulated Flow: gal; Temperature

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 10 (1), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: Instantaneous Flow: gal/min; Accumulated Flow: gal; Temperature

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 10 (1), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Super Mist-Separator NAME Series

Elemq Ute The following table indicates life for the NAM and NAME combination. ll the NAMD tilter is also installed, the lite of the NAME filter will increase 10 times. htdHio.l lDPlease install in cool dace. OPlease install with the sight glass tacirE frort.

Air Cylinder NCJP Series Pin Cylinder

Series NCJP Dimsaians Notei Includes Mounting Nut. 0.43 No.5-40 UNC 0.56 No.10 32 UNF /6 \1/4") 0 (3!

Electro-Pneumatic Proportional Valve

or less 3% or less 1MPa 12, 24VDC 0 to 2W 0 to 4W Class B Series PVQ How to Order P V Q 13 5 L 03 M5 Valve type Body materials Symbol A Nil Body Brass C37 Note for PVQ13 for PVQ31, 33 13 31 33 N.C.

Precision Clean Regulator

0 q 9 Valve seat PTFE IRV 10 O-ring Fluororubber u w 11 Diaphragm Fluororubber VEX 12 Gasket Fluororubber SRH 13 Pressure regulator spring Steel wire Pressure regulator screw assembly 14 SRP SRP SRF ITV Dimensions IC ITVH 30.5 Bracket ITVX PVQ 40 A B SMC P K U C S O H L 36 VY1 51 31 30 Panel mounting hole VBA VBAT 40 AP100 8.5 28 20 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 1.6 Port

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

A 24 M5 thread, depth 8 With or without insert depending on base material. 32 A' Coding stud M5 x 10 DIN913-45H 12 2 8 M5 Drive flange face G1/4 DIN/ISO228/1 19.5 5.5 Solenoid valve flange face O-ring 16 x 2 1.5 IP 3 IW 1301 AW The solenoid valve can be attached with 2 mounting bolts.

How to Order

(For type 20 manifold) M 1 SYJ3 2 5 M M3 10 Body ported M 1 SYJ3 4 5 M 10 Base mounted CE-compliant Clean series Port size Nil Q CE-compliant 3 port Nil: Without sub-plate M5: M5 port With sub-plate Note) CE-compliant: For DC only.

NAME

Operation tinre @ntinuous (ShourVday) =1.Syears Clean Air for Clean Room Seruice Clean roorn Comgessed ait C Supa Mist Seoarator q/silem B/Blcrrviq air b partsdebning ODerry pcint: -58'F or less (Atnospheric p(essure), OEfficiency: Less than 100 particles 0.3 microns ol1 larger per cubic foot.

NGIP seies

Series NCJP Dimsaians Notei Includes Mounting Nut. 0.43 No.5-40 UNC 0.56 No.10 32 UNF /6 \1/4") 0 (3!

3M/SMseries

' spaold order Elgctrical Entry//lndicator llght and surge voltage Series NVFSOOO Manifold Manifold Manifold B mount (Barstock Type) Manifold type 10 stations Maximum stations x lf thero sre more than 5 stiations supply both sides of supply (P) porl and exhatlsl bottl sides ol xhaust (R) pod.

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), Chemical valve, CHEMICAL VALVE, 2 PORT, 42 lb

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), Chemical valve, CHEMICAL VALVE, 2 PORT, 42 lb

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), CHEMICAL VALVE, CHEMICAL VALVE, 2 PORT, B07, 0.042 lb

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), CHEMICAL VALVE, CHEMICAL VALVE, 2 PORT, B07, 0.042 lb