Series IRV10/20 Vacuum Regulator

IRV10A P P P P IRV20A P P P P P P Accessory q Note 1) C06 C08 C10 N07 N09 N11 6 8 10 1/4" 5/16" 3/8" Metric None With bracket With bottom bracket Nil B L Inch Note 1) Accessories are shipped together. Bottom bracket 1

IR1000-A/2000-A/3000-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.005 to 0.2 MPa V V 0.01 to 0.2 MPa V 1 0.01 to 0.4 MPa V V V 2 0.01 to 0.8 MPa V V V + ARM ARP IR-A IR-A e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR IRV r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH

IR1200-A/2200-A/3200-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.02 to 0.2 MPa V V V 1 0.02 to 0.4 MPa V V V 2 0.02 to 0.8 MPa V V V + ARM ARP e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR-A IR-A IR r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + IRV VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH t Port size SRP a

VM100F

Metric size: Light gray Inch size: Orange 1 Refer to the table on page 2 for combinations of actuator type and sufx. Construction Side ported Bottom ported t y w u q q w u y t 3(R) (3-port only) 3(R) (3-port only) Non-actuated Non-actuated !4 i !0 2(A) 1(P) r o e !3 !1 !2 !3 e o r !0 i !1 !2 2(A) 1(P) Actuated Actuated 2(A) 1(P) 2(A) 1(P) Component Parts No.

Clean Rodless Cylinder Series CYP

69 M4 x 0.7 6 4.5 67 M5 x 0.8 25 60 105 48 45 23 13 18 69 32 17 2.5 118 CYP32 8.6 115 M6 x 1 8 7.5 90 Rc 1/8 50 100 138 87 79.5 29 17 22 115 46 27 3.5 155 Note 1) These dimension drawings indicate the case of piping port position "Nil".

Electric Gripper 2-Finger Type LEHZ10, 16, 20, 25, 32, 40 Series LEHZ ® Step Motor (Servo/24 VDC)

Electric Gripper 2-Finger Type Step Motor (Servo/24 VDC) LEHZ10, 16, 20, 25, 32, 40 Series LEHZ RoHS How to Order 10 2 K 4 1 1 S 6N LEHZ q w e r t y u i o !0 !1 !

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

VFR2 5 SY 1 E 10 1 Non plug-in VFR2 02 SV CE-compliant SYJ Q CE-compliant Nil Pilot valve manual override SZ Electrical entry: D/DO, Y/YO and F only Nil: Non-locking push type B: Locking type B (Tool required) C: Locking type C (Lever) A: Non-looking push type A (Extended) VP4 Symbol 2 position single S0700 1 Pilot type VQ Nil R Internal pilot External pilot Option 2 position double

How to Order LER10, 30, 50 Series LER Step Motor (Servo/24 VDC) Electric Rotary Table ®

Step Motor (Servo/24 VDC) Electric Rotary Table How to Order LER10, 30, 50 Series LER RoHS LER 10 1 1 S K 6N q w e r t y u i o !

VG342

A Valve option CE-compliant Nil R Internal pilot External pilot Q CE-compliant Nil Rated voltage Electrical entry: D only 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 Pilot valve option Standard type Nil 4 Energy-saving type (DC only) Y 24 VDC 12 VDC 5 6 Continuous duty type E Option 7 240 VAC, 50/60 Hz Passage symbol 9 Other External pilot Nil Option

Symbol: 11 (Body Ported), Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Bracket: None, Lead Wire Length: Grommet, 300mm; Light/Surge: No, CE Compliant: Q (CE Compliant)

Symbol: 11 (Body Ported), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Bracket: None, Lead Wire Length: Grommet, 300mm; Light/Surge: No, CE Compliant: Q (CE Compliant)

Symbol: 11 (Body Ported), Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Bracket: None, Lead Wire Length: Grommet, 300mm; Light/Surge: No, CE Compliant: Q (CE Compliant)

Symbol: 11 (Body Ported), Voltage: 6 (12 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Bracket: None, Lead Wire Length: Grommet, 300mm; Light/Surge: No, CE Compliant: Q (CE Compliant)

Symbol: 11 (Body Ported), Voltage: 5 (24 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Bracket: None, Lead Wire Length: Grommet, 300mm; Light/Surge: No, CE Compliant: Q (CE Compliant)

Symbol: Body Ported, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Reverse Mounting Prevention Pin: None, Bracket: None, Lead Wire Length: Grommet, 300mm; Light/Surge: No, CE Compliant: CE Compliant

Symbol: Body Ported, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Reverse Mounting Prevention Pin: None, Bracket: None, Lead Wire Length: Grommet, 300mm; Light/Surge: No, CE Compliant: CE Compliant

Symbol: Body Ported, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Reverse Mounting Prevention Pin: None, Bracket: None, Lead Wire Length: Grommet, 300mm; Light/Surge: No, CE Compliant: CE Compliant

: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: M, Plumbing Thread Nominal: M5, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.5, Insulation Class: B, Pipe opening type (details): Body Ported Type, Voltage: 24 V DC, Option: None, Power Consumption(W): Inrush: 2.5 / Holding: 1,

: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: M, Plumbing Thread Nominal: M5, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.5, Insulation Class: B, Pipe opening type (details): Body Ported Type, Voltage: 24 V DC, Option: None, Power Consumption(W): Inrush: 2.5 / Holding: 1,

Compact Guide Cylinder End Lock Type SeriesMGP

M8 x 1.25 16 21 97 140 20 12.5 55.5 32 32 50 4 4.5 3 6 M8 x 1.25 16 22 97 102 140 20 6 11 49 40 40 66 5 6 4 8 M10 x 1.5 20 24 50 106.5 118 161 25 9.5 21 64 50 80 5 6 4 8 M10 x 1.5 20 24 63 106.5 118 161 25 4.5 16 59 63 End lock mechanism dimensions MGPL (ball bushing)/A, DB, E dimensions (mm) (mm) E A HN (Max.)