Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension with cover Reference dimension of R thread after installation.

Ｍ icro Mist Separator Regulator

AWD20-D AWD30-D AWD40-D (1) Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS (2) Set nut AR23P-260S AR33P-260S AR43P-260S Rc G46-10-01 G36-10-01 G36-10-N01 G46-10-N01 Pressure gauge Note 2) NPT (Round type) G36-P10-N01-X30 Z : Both in MPa and psi G46-P10-N01-X30 (3) G36-10-01 G G46-10-01 G36-10-01-L Rc G46-10-01-L Pressure gauge Note 2) G36-10-N01-L NPT G46-10-N01-L (Round type

Mist Separator Regulator

AWM20-D AWM30-D AWM40-D (1) Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS (2) Set nut AR23P-260S AR33P-260S AR43P-260S G36-10-01 Rc G46-10-01 Pressure gauge Note 2) G36-10-N01 G46-10-N01 NPT (Round type) G36-P10-N01-X30 Z : Both in MPa and psi G46-P10-N01-X30 (3) G36-10-01 G G46-10-01 G36-10-01-L Rc G46-10-01-L Pressure gauge Note 2) G36-10-N01-L NPT G46-10-N01-L (Round type

76

) 14 (10) 32 (0) 50 (10) 68 (20) 86 (30) Atmospheric pressure dew point F (C) How to read the dew point conversion chart Example) To obtain the atmospheric pressure dew point at a pressure dew point 50F (10C) and a pressure 102 psi (0.7 MPa). 1.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2

PC Wiring System Series PCW

Refer to the page 58 for details. 4.5 5 5 Circuit Diagram PCW-EC08Z00 PCW-EC08Z01 2 4 6 8 10 12 14 20 16 18 Power supply terminal block Input/output connector (CS0) 1 3 5 7 9 11 13 15 17 19 14 8 4 2 6 20 16 18 10 12 Input/output connector (CS1) 13 1 3 5 7 9 11 19 15 17 Green Red Connection 1 1 1 1 1 1 1 1 2 2 2 3 4 3 4 CN2 CN3 2 2 2 3 4 CN5 2 2 1 3 3 3 4 CN4 3 4 3 4 CN6 24VDC 4 CN1 4 2 *S2

Guide Table Series MGF ø40, ø63, ø100 1

50 40 50 40 MGF63 Load weight m0 (kg) Load weight m0 (kg) MGF63 Load weight m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) How to read the graph 1) When the load

IDX-OM-W034

2 Specifications . 8 1 8 3 Specification of heavy duty auto drain (ADH4000-04) . 8 2 8 4 Maintenance. 8 2 Chapter 9 Specification for Option R 9 1 Safety instructions . 9 1 9 2 Specifications of the GFCI . 9 1 9 3 Cautions for handling the GFCI . 9 1 9 4 Electric circuit . 9 2 Chapter 10 Specification for Option S 10 1 Safety instructions . 10 1 10 2 Specifications . 10 1 Chapter 11 Specification

Series VS

-8 VSS8-10 Description Description VSR8-8 VSR8-10 VSR8-10 VSR8-6 VSR8-6 VSR8-8 VSR8-10 VSR8-8 VSR8-6 1.

Actuator Position Sensor

3 (62) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x003F 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC2 (63) 3 R/W Hysteresis bit(0) 16 bit 10 Y 1 to 400 SetPoint1 bit(16) 16 bit 3 Y 3 1 R/W 0x4000 BDC3 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (16384) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x4001 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC3 (16385) 3 R/W Hysteresis bit(0) 16 bit 10 Y 1 to 400 SetPoint1 bit(16) 16 bit 3 Y 3 1 R/W 0x4002

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

12 2 x 2 x M6 x 1.0 effective depth 10 2 x 5.4 through 52 12 1 28 40 Flat washer 10 10 7 7 28 42.5 + Stroke 5 40 47.5 + Stroke Note 1) Standard strokes available in 5 mm increments.



size P , A port R port Body size Port 01 02 02 03 04 04 06 10 10 12 14 20 Nil 01 02 8 1 1 4 1 4 1 3 8 3 Body ported Base mounted 2 1 2 1 5 4 3 1 1 1 1 2 4 1 1 7 4 1 2 1 9 2 Without sub-plate 8 1 2 4 1 Option Description Part no. 0 3 0 3 0 3 0 3 0 3 0 3 VEX1A33 VEX1B33 VEX113 VEX123 VEX133 VEX153 VEX173 VEX193 B Bracket (With bolt and washer) VEX1-18-1A VEX1-18-1A VEX3-32A VEX5-32A VEX7-

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Relation of Operating Temperature and Maximum Operating Pressure Particulate Generation Grade Classifications 1.2 10 Average particle concentration Particles/ft Grade 4 Max. operating pressure MPa 1.0 10 0.8 Grade 3 10 0.6 10 Grade 2 10 0.4 Grade 1 100.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 1 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06

Stainless Steel Heat

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8 Series IDUS/IDFS Safety Instructions These safety instructions are intended to prevent a hazardous situation and/

3 Port Solenoid Valve Rubber Seal Series SY100 1

SY1 4, SY1 4A only 1 2 1 2 4-3-6 7 Series SY100 Construction SY114, SY114A (A) 2 3 (R) i q y e r w V100 SY SYJ VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP A R P !1 o u t !0 VG VP S070 VQ VKF Part no.

3 Port Solenoid Valve Rubber Seal Series SY100

SY1 4, SY1 4A only 1 2 1 2 4-3-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) i q y e r w V100 SY SYJ VK VZ VT VP A R P !1 o u t !0 VG VP S070 VQ VKF Part no. Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !

PSxx-OMV0008CN

* 1015 10 1% 2162 LCD * -8No.PS-OMV0008CN-E ISE70G 02 L2 M 3 Y K T ISE70G 0~1 MPa ISE75G 0~2 MPa ISE76G 0~5 MPa ISE77G 0~10 MPa ISE78G 0~16 MPa 2 A A B B 02 Rc1/4 N02 NPT1/4 F02 G1/4 :ISO1179-1 1 M12 5m M12 5m T S : L IO-Link/1+2 NPNorPNP L2 1 M SI2 1 2kPaMPa / A ZS-50-A M46 2 B ZS-50-B M46 2 ZS-48-A ZS-31-B 5 m M12 ZS-31-C 5 m -9No.PS-OMV0008CN-E M12 4 24 OUT1 IO-Link

C92

2 (On different faces or same face) 20 D-A59W 120 115 110 85 60 25 70 1 15 2 (On different faces or same face) 15 120 115 110 85 60 25 70 D-F5/J5 1 10 2 (On different faces or same face) 15 130 125 120 95 70 25 75 D-F5NTL 1 10 D-F5W D-J59W D-F5BAL D-F5F D-F5LF 2 (On different faces or same face) 15 130 125 120 90 70 25 75 10 1 1.12-14

70pvvna

B (9.5) B (12.7) B (19.1) B (25.4) B (31.8) B (38.1) B (50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 3 8 1 2 3 4 10A 15A 20A 25A 32A 40A 50A 1 2 VNA01 VNA02 VNA03 VNA1 Port 12 (P1) 1 1 1 2 External pilot External pilot External pilot External pilot External pilot Pilot exhaust Bleed port Bleed port 1 4 1 2 10 (P2) Installing a silencer to the

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Lead wire color Black Brown Red Orange Yellow Pink Blue Violet Gray White White Yellow Orange Yellow Pink Blue Violet Gray Orange Red Dot marking 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 4 1 5 10 16 11 20 17 Multi-connector pin arrangement DIN rail mounting bracket White Black Black Red Red Red Black Black White Pin no. 1 SOL. 1 station SOL. 2 stations 2 SOL. 3 stations 3 (a) SOL