Table Accuracy: Basic, Size: 30, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: Reducing Union Tee, Applicable Tube Outer Dia. (in) D (D1): 1/4, Applicable Tube Outer Dia. (in) D2: 1/4, Applicable Tube Outer Dia. (in) D3: -, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: Reducing Union Tee, Applicable Tube Outer Dia. (in) D (D1): 3/8, Applicable Tube Outer Dia. (in) D2: 3/8, Applicable Tube Outer Dia. (in) D3: 1/4, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material:

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: Reducing Union Tee, Applicable Tube Outer Dia. (in) D (D1): 1/2, Applicable Tube Outer Dia. (in) D2: 1/2, Applicable Tube Outer Dia. (in) D3: 3/8, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material:

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: Reducing Union Tee, Applicable Tube Outer Dia. (in) D (D1): 3/4, Applicable Tube Outer Dia. (in) D2: 3/4, Applicable Tube Outer Dia. (in) D3: 1/2, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material:

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: Reducing Union Tee, Applicable Tube Outer Dia. (in) D (D1): 1, Applicable Tube Outer Dia. (in) D2: -, Applicable Tube Outer Dia. (in) D3: 3/4, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA,

Oscillation Angle A: 310°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: Standard, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.22, Size: 10, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible) cable, Actuator cable length(

Oscillation Angle A: 310°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: Standard, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.32, Size: 10, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible) cable, Actuator cable length(

Oscillation Angle A: 320°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 1.2, Size: 30, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible) cable

Multi-channel Digital Sensor Monitor ( compatible)

. -76No.PS-OMW0012-C Unit specification and measurement value (PD) Range Unit Rated pressure range Display / settable range A to B C to D kPa 0 to 2.000 -0.200 to 2.100 Pa 0 to 2000 -200 to 2100 Mbar 0 to 20.00 -2.00 to 21.00 2 kPa Psi 0 to 0.2901 -0.029 to 0.305 (0.002) mmH2O 0 to 203.94 -20.4 to 214.1 Pressure gauge measurement value (PD) 0 to 4000 -400 to 4200 MPa 0 to -0.101 0.010 to

XLA Series

H 5 Initial power/ Power 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models.

XLA- ∗ -F7NJ ∗ - ∗ Series

H 5 Initial power/ Power consumption (W) 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models. 200V The heaters are PTC thermistor type design.

XL-OMV0002

XL-25 XL-40 XL-50 XL-63 AC90240V Ass'y XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 Ass'y 1 1 1 H4 AC100V 200/40 200/50 400/100 / AC200V 800/40 800/50 800/100 Ass'y XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 Ass'y 1 1 1 1 H5 AC100V 200/40 400/70 400/80 600/130 / AC200V 800/40 1600/80 1600/80 2400/130 XL-80 XL-100 XL-160 AC90240V Ass'y XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 Ass'y

XL-OMY0002

800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-50,XLD-160 XLD-63,XLD-80,XLD-100 S 1 SUS304+ 4 1) S S O 2) S O FKM 5 O 6 S O 2 FKM 9 S SUS304 10 11

IP8001 Series

Parameter Functioning in Manual Mode For the position indication (P value), zero / span setting (parameter code: 400) functions as it is. Reflection of Changed Content in Parameter Mode The changed content is reflected at the time when the mode moves from parameter to manual, and then moves to auto mode*1.

Actuator Position Sensor

3 R/W Hysteresis bit(0) 16 bit 10 Y 1 to 400 SetPoint1 bit(16) 16 bit 3 Y 3 1 R/W 0x4002 BDC4 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (16386) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x4003 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC4 (16387) 3 R/W Hysteresis bit(0) 16 bit 10 Y 1 to 400 1: "R" means Read and "W" means Write. 2: Y: Included in DS (data storage), N: Not included in DS. 3: Refer to initial value

XLF Series

H 5 Initial power/ Power consumption (W) 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models. 200V The heaters are PTC thermistor type design.

High Vacuum L Type Valve

H 5 Initial power/ Power 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models.

IZ-OMK0015

to 500 3 300 to 2000 300 to 400 5 300 to 2000 300 to 400 10 200 to 2000 200 to 300 15 200 to 2000 200 to 300 20 150 to 2000 150 to 250 30 50 to 2000 50 to 200 60 50 to 2000 50 to 150 (Note) After installation, verify the effects of static neutralization.

XLG Series

H 5 Initial power/ Power consumption (W) 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models. The heaters are PTC thermistor type design.