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N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMP0001CN-F * FG (49 N ,IN () () -6No.PF-OMP0001CN-F * 6 33 () 10 m DC(-)() -7No.PF-OMP0001CN-F * () () CE 050 -8No.PF-OMP0001CN-F * 1015 10 /23% 3 LCD * OUT -9No.PF-OMP0001CN-F / PFMB 7 7 A*8 *8 2 501 5500 L/min 102 101000 L/min *7 202 202000 L/min R Rc *7 N NPT F G*1 *1IS0228 5 M SI6 *5: 501 102 202 (SI) 04 1/2 *6:L/min 06

set value 12 Wind mode upper side set value 13 Wind mode hysteresis OUT2 14 Accumulated output mode 15 Accumulated pluse output mode 16 Err mode 17 oFF mode 18 Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode display -87No.PF-OMZ0002-A [Line name communication data] Value (16 hex number) 00 01 02 03 04 05 06

Vrms] 42.4[V ]2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMS0001CN-A * FG (49 N 9022545 ,IN () () -6No.PF-OMS0001CN-A * () 6 33 () 10 m DC(-)() -7No.PF-OMS0001CN-A * () () CE 050 -8No.PF-OMS0001CN-A * 1015 10 /23% 3 LCD * OUT -9No.PF-OMS0001CN-A PFMC 7 7 A*8 8 501 5~500L/min 2 102 10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06

side set value 12 Wind mode upper side set value 13 Wind mode hysteresis OUT2 14 Accumulated output mode 15 Accumulated pluse output mode 16 Err mode 17 oFF mode 18 Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode display -83No.PF-OMY0002 [Line name communication data] Value (16 hex number) 00 01 02 03 04 05 06

13 Wind mode hysteresis OUT2 14 Accumulated output mode 15 Accumulated pluse output mode 16 Err mode 17 oFF mode 18 Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode (Refer to page 13) 22 Option display Line name, not displayed -83No.PF-OMX0002-B [Line name communication data] Value (16 hex 00 01 02 03 04 05 06

13 Wind mode hysteresis OUT2 14 Accumulated output mode 15 Accumulated pluse output mode 16 Err mode 17 oFF mode 18 Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode (Refer to page 13) 22 Option display Line name, not displayed -48No.PF-OMX0007-A [Line name communication data] Value (16 hex 00 01 02 03 04 05 06

16 Line name (left side 4 digits, right side 5 digits) 17 Display channel 18 CH1 measurement display value 19 CH2 measurement display value 20 CH3 measurement display value 21 CH4 measurement display value 22 Display OFF (No display) : Settable : Not settable (negative acknowledge) -87No.PF-OMA1011-A [Line name communication data] Value (16 Hex number) 00 01 02 03 04 05 06

9No.PF-OMN0009CN-F * , *PVC PVC PVC () PVC PVC , -10No.PF-OMN0009CN-F PF3W5 48 () 3 A : 04 20 40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06

Note 2) Calculated for atmospheric condition, 20 OC (ANR) How to order Female thread Actuation Option Port size Symbol Option Symbol Actuation Symbol Port size Nill None Automatically operated 06 3/4" N With silencer Thread type Symbol Type Nill 5 - Tube extension With nut Actuation Symbol Actuation Thread type Option 0 Automatically operated Symbol Type Symbol Option Nill None Nill

Note 2) Calculated for atmospheric condition, 20 OC (ANR) How to order Female thread Actuation Port size Symbol Port size Symbol Actuation 06 3/4" 3 Air operated Thread type Symbol Type Nill 5 - Tube piping Actuation Thread type Symbol Type Symbol Actuation 3 Air operated Nill Tubing size Symbol Main fluid connection size 19 3/4" With nut Actuation Thread type Symbol Actuation Symbol

M3 0.5 ~0.6 Nm M3 0.5 ~0.6 Nm A-A () 1) 2) 3) 30 1) 2) 1 0.1MPa 5 VN-OMP0002 Series Series Series Series 1 DC AC VT307 VNA ( ) (JIS B2301)(JIS B 2302) VNA (JIS B 6349) VNA 1 ISO VG32 VNA ( JIS K 6439) VNA VNA VNA VNA AS AS AS AS VNA AS 10A 111 420-03 3/8 B(9.5) 12 12 12 12(P1) (P1) (P1) (P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) 15A 211 420-04 1/2 B(12.7) 20A 311 500-06

Nil Standard Option/function Remote function 1 : +24V 2 : 24V COM (See section 3 remote ON/OFF function) 7 Output Cut off Alarm Common 6 Output Cut off Alarm a contact (OPEN During Alarm) 8 Output Cut off Alarm b contact (CLOSE During Alarm) 9 Temperature Alarm a contact (OPEN During Alarm) 11 Temperature Alarm b contact (CLOSE During Alarm) 10 Temperature Alarm Common 10 10m 02 2m 04 4m 06

systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0001 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0001 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06

systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0002 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0002 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06

Applicable Symbol accuracy Element model Element length 002 2m Filtration Element Applicable 004 4m HEPO FGH100 Symbol efficiency length Element 300 006 6m 99% 100 L117 EJ701S 013 13m 200 L246 EJ801S,ED801S X20 0.2m Filtration FGH200 300 L496 EJ901S,ED901S efficiency Membrane 300 X40 0.4m 99.9% Element category Symbol Element J HEPO D Membrane Port size Port size Symbol (Rc) 03 3/8 04 1/2 06

Software for compatible robot control devices If the software for the robot control device is V9.40P / 05 version or earlier, update to the latest version V9.40P / 06 version or later before installing the plug-in software. CRX plug-in software installation 1. Please download the CRX plug-in software "SMC_GrpSwMH.IPL" from the SMC website. 2.

ZB-OM00201-B Model Indication and How to Order Model Indication of the Single Unit Vacuum pump system Ejector system (1) Nozzle size Applicable supply valve and Nominal standard supply pressure Symbol nozzle Latching Large flow size (N.C.) 00 Note 1) 03 0.3 (0.35MPa) (0.4MPa) 04 0.4 (0.35MPa) (0.4MPa) 05 0.5 (0.35MPa) 06 0.6 (0.5MPa) Note1) Vacuum pump system only (2) Body type Symbol

VBA2A AMC510-06 270mm Mounting posture Horizontal VBA4A AMC610-10 300mm Handle-operated type Air-operat Handle-op Governor* * Separate piping should be prepared to If dry air (atmospheric pressure dew point 23C or less) is used, the ed type erated type life expectancy may be shortened because dry air will accelerate evaporation of grease inside.

Example: VEX1300-03 240 VAC 240V VK300-82-2-07 G36-4-01 6 VDC 6V VK300-82-4-51 12 VDC 12V VK300-82-4-06 Sub-plate and gasket part no. 24 VDC 24VDC VK300-82-3-05 48 VDC 48VDC VK300-82-3-53 Body size 2 Circuit with indicator light 12 VDC or less 24 VDC or more AC circuit Sub-plate circuit diagram circuit diagram diagram Base gasket VEX1-11-2 How to Wire DIN Terminal (VEX1101, 1201, 1301) D

Maximum Flow Rate 1000 SFD200-C12, -02 SFD200-C08 SFD200-C10 Flow rate (L/min(ANR)) SFD100-C08, -02 A 100 SFD100-04 SFD100-06 10 0 0.5 1 Pressure (MPa) 320 Clean Air Filter SFD Series RoHS HAA HAW How to Order AT IDF IDU 1 0 SFD 0 C08 IDF FS Clean air filter IDFA Size Max. flow rate 100 L/min (ANR) 500 L/min (ANR) Option Option None Bracket (SFD100 only) IDFB Symbol 1 2 Symbol Nil B IDH